Patent | Date |
---|
Metal oxide semiconductor thin film transistors Grant 8,513,720 - Herman , et al. August 20, 2 | 2013-08-20 |
Solution process for fabricating a textured transparent conductive oxide (TCO) Grant 8,404,302 - Maa , et al. March 26, 2 | 2013-03-26 |
Germanium film optical device Grant 8,106,473 - Lee , et al. January 31, 2 | 2012-01-31 |
Metal Oxide Semiconductor Thin Film Transistors App 20120012835 - Herman; Gregory ;   et al. | 2012-01-19 |
Solution Process for Fabricating a Textured Transparent Conductive Oxide (TCO) App 20120015147 - Maa; Jer-shen ;   et al. | 2012-01-19 |
Germanium Film Optical Device App 20110163404 - Lee; Jong-Jan ;   et al. | 2011-07-07 |
Germanium film optical device fabricated on a glass substrate Grant 7,927,909 - Lee , et al. April 19, 2 | 2011-04-19 |
Ge imager for short wavelength infrared Grant 7,906,825 - Tweet , et al. March 15, 2 | 2011-03-15 |
Germanium Film Optical Device Fabricated on a Glass Substrate App 20100276776 - Lee; Jong-Jan ;   et al. | 2010-11-04 |
Method of fabricating a low, dark-current germanium-on-silicon pin photo detector Grant 7,811,913 - Lee , et al. October 12, 2 | 2010-10-12 |
CMOS active pixel sensor Grant 7,800,148 - Lee , et al. September 21, 2 | 2010-09-21 |
Thermal sensor with a silicon/germanium superlattice structure Grant 7,786,469 - Maa , et al. August 31, 2 | 2010-08-31 |
Ge Imager for Short Wavelength Infrared App 20100090110 - Tweet; Douglas J. ;   et al. | 2010-04-15 |
Germanium phototransistor with floating body Grant 7,675,056 - Lee , et al. March 9, 2 | 2010-03-09 |
Silicon Nanoparticle Precursor App 20100047476 - Maa; Jer-Shen ;   et al. | 2010-02-25 |
Ge short wavelength infrared imager Grant 7,651,880 - Tweet , et al. January 26, 2 | 2010-01-26 |
Gallium nitride-on-silicon interface using multiple aluminum compound buffer layers Grant 7,598,108 - Li , et al. October 6, 2 | 2009-10-06 |
Thermal Sensor with a Silicon/Germanium Superlattice Structure App 20090173933 - Maa; Jer-Shen ;   et al. | 2009-07-09 |
Patterned silicon submicron tubes Grant 7,514,282 - Li , et al. April 7, 2 | 2009-04-07 |
Gallium nitride-on-silicon interface using multiple aluminum compound buffer layers App 20090008647 - Li; Tingkai ;   et al. | 2009-01-08 |
Method of making CMOS devices on strained silicon on glass Grant 7,470,573 - Lee , et al. December 30, 2 | 2008-12-30 |
Thermal Expansion Transition Buffer Layer for Gallium Nitride on Silicon App 20080315255 - Maa; Jer-Shen ;   et al. | 2008-12-25 |
CMOS Active Pixel Sensor App 20080303072 - Lee; Jong-Jan ;   et al. | 2008-12-11 |
Gallium nitride-on-silicon multilayered interface App 20080296625 - Li; Tingkai ;   et al. | 2008-12-04 |
Gallium nitride-on-silicon nanoscale patterned interface App 20080296616 - Li; Tingkai ;   et al. | 2008-12-04 |
Transfer method for forming a silicon-on-plastic wafer Grant 7,459,375 - Maa , et al. December 2, 2 | 2008-12-02 |
Gallium nitride-on-silicon interface App 20080280426 - Li; Tingkai ;   et al. | 2008-11-13 |
Silicon/germanium superlattice thermal sensor Grant 7,442,599 - Maa , et al. October 28, 2 | 2008-10-28 |
Real-time CMOS imager having stacked photodiodes fabricated on SOI wafer Grant 7,419,844 - Lee , et al. September 2, 2 | 2008-09-02 |
Method of growing a germanium epitaxial film on insulator for use in fabrication of CMOS integrated circuit Grant 7,413,939 - Hsu , et al. August 19, 2 | 2008-08-19 |
Smooth surface liquid phase epitaxial germanium Grant 7,405,098 - Lee , et al. July 29, 2 | 2008-07-29 |
Gallium nitride on silicon with a thermal expansion transition buffer layer App 20080173895 - Maa; Jer-Shen ;   et al. | 2008-07-24 |
Epitaxial growth of GaN and SiC on silicon using nanowires and nanosize nucleus methodologies App 20080171424 - Li; Tingkai ;   et al. | 2008-07-17 |
Silicon nanostructures and fabrication thereof App 20080166878 - Li; Tingkai ;   et al. | 2008-07-10 |
Patterned silicon submicron tubes App 20080164577 - Li; Tingkai ;   et al. | 2008-07-10 |
Strained silicon on insulator from film transfer and relaxation by hydrogen implantation Grant 7,390,725 - Maa , et al. June 24, 2 | 2008-06-24 |
Method for isolating silicon germanium dislocation regions in strained-silicon CMOS applications Grant 7,384,837 - Hsu , et al. June 10, 2 | 2008-06-10 |
Ge short wavelength infrared imager App 20080121805 - Tweet; Douglas J. ;   et al. | 2008-05-29 |
Method of fabricating local interconnects on a silicon-germanium 3D CMOS Grant 7,378,309 - Lee , et al. May 27, 2 | 2008-05-27 |
Germanium infrared sensor for CMOS imagers Grant 7,361,528 - Lee , et al. April 22, 2 | 2008-04-22 |
Germanium photo detector having planar surface through germanium epitaxial overgrowth Grant 7,361,526 - Maa , et al. April 22, 2 | 2008-04-22 |
Single-crystal silicon-on-glass from film transfer Grant 7,361,574 - Maa , et al. April 22, 2 | 2008-04-22 |
Method of fabricating a germanium photo detector on a high quality germanium epitaxial overgrowth layer Grant 7,358,107 - Maa , et al. April 15, 2 | 2008-04-15 |
Floating body germanium phototransistor having a photo absorption threshold bias region Grant 7,351,995 - Hsu , et al. April 1, 2 | 2008-04-01 |
Silicon/germanium superlattice thermal sensor App 20080067499 - Maa; Jer-Shen ;   et al. | 2008-03-20 |
Self-aligned cross point resistor memory array Grant 7,323,349 - Hsu , et al. January 29, 2 | 2008-01-29 |
Germanium phototransistor with floating body App 20070295953 - Lee; Jong-Jan ;   et al. | 2007-12-27 |
Transfer method for forming a silicon-on-plastic wafer App 20070298588 - Maa; Jer-Shen ;   et al. | 2007-12-27 |
Floating body germanium phototransistor having a photo absorption threshold bias region App 20070290288 - Hsu; Sheng Teng ;   et al. | 2007-12-20 |
Fabrication of vertical sidewalls on (110) silicon substrates for use in Si/SiGe photodetectors Grant 7,297,564 - Tweet , et al. November 20, 2 | 2007-11-20 |
Fabrication Of Vertical Sidewalls On (110) Silicon Substrates For Use In Si/sige Photodetectors App 20070259467 - Tweet; Douglas J. ;   et al. | 2007-11-08 |
Method of fabricating single-layer and multi-layer single crystalline silicon and silicon devices on plastic using sacrificial glass Grant 7,279,400 - Maa , et al. October 9, 2 | 2007-10-09 |
Floating body germanium phototransistor with photo absorption threshold bias region Grant 7,276,392 - Hsu , et al. October 2, 2 | 2007-10-02 |
Method of fabricating local interconnects on a silicon-germanium 3D CMOS App 20070218622 - Lee; Jong-Jan ;   et al. | 2007-09-20 |
Real-time CMOS imager having stacked photodiodes fabricated on SOI wafer App 20070218578 - Lee; Jong-Jan ;   et al. | 2007-09-20 |
Floating body germanium phototransistor Grant 7,271,023 - Lee , et al. September 18, 2 | 2007-09-18 |
Iridium etching for FeRAM applications Grant 7,267,996 - Zhang , et al. September 11, 2 | 2007-09-11 |
Method of fabricating silicon on glass via layer transfer Grant 7,265,030 - Maa , et al. September 4, 2 | 2007-09-04 |
Silicon-on-insulator near infrared active pixel sensor array App 20070190681 - Lee; Jong-Jan ;   et al. | 2007-08-16 |
Liquid phase epitaxial GOI photodiode with buried high resistivity germanium layer App 20070170536 - Hsu; Sheng Teng ;   et al. | 2007-07-26 |
Fabrication of a low defect germanium film by direct wafer bonding Grant 7,247,545 - Maa , et al. July 24, 2 | 2007-07-24 |
Method to form relaxed SiGe layer with high Ge content using co-implantation of silicon with boron or helium and hydrogen Grant 7,241,670 - Tweet , et al. July 10, 2 | 2007-07-10 |
Method of fabricating a low, dark-current germanium-on-silicon pin photo detector App 20070141744 - Lee; Jong-Jan ;   et al. | 2007-06-21 |
Method to form thick relaxed SiGe layer with trench structure Grant 7,226,504 - Maa , et al. June 5, 2 | 2007-06-05 |
Germanium photo detector having planar surface through germanium epitaxial overgrowth App 20070099315 - Maa; Jer-Shen ;   et al. | 2007-05-03 |
Method of fabricating a germanium photo detector on a high quality germanium epitaxial overgrowth layer App 20070099329 - Maa; Jer-Shen ;   et al. | 2007-05-03 |
High-density germanium-on-insulator photodiode array Grant 7,186,611 - Hsu , et al. March 6, 2 | 2007-03-06 |
Strained silicon devices transfer to glass for display applications Grant 7,176,072 - Lee , et al. February 13, 2 | 2007-02-13 |
Surface-normal optical path length for infrared photodetection App 20070012876 - Lee; Jong Jan ;   et al. | 2007-01-18 |
Floating body germanium phototransistor with photo absorption threshold bias region App 20070004067 - Hsu; Sheng Teng ;   et al. | 2007-01-04 |
Floating body germanium phototransistor App 20070001163 - Lee; Jong-Jan ;   et al. | 2007-01-04 |
Fabrication of thin film germanium infrared sensor by bonding to silicon wafer Grant 7,157,300 - Lee , et al. January 2, 2 | 2007-01-02 |
Method of growing a germanium epitaxial film on insulator for use in fabrication of a CMOS integrated circuit App 20060281232 - Hsu; Sheng Teng ;   et al. | 2006-12-14 |
Integration of biaxial tensile strained NMOS and uniaxial compressive strained PMOS on the same wafer Grant 7,138,309 - Lee , et al. November 21, 2 | 2006-11-21 |
Self-aligned cross point resistor memory array App 20060246606 - Hsu; Sheng Teng ;   et al. | 2006-11-02 |
Surface-normal optical path structure for infrared photodetection Grant 7,129,488 - Lee , et al. October 31, 2 | 2006-10-31 |
Strained silicon fin structure Grant 7,115,945 - Lee , et al. October 3, 2 | 2006-10-03 |
Germanium infrared sensor for CMOS imagers App 20060194415 - Lee; Jong-Jan ;   et al. | 2006-08-31 |
Smooth surface liquid phase epitaxial germanium App 20060194418 - Lee; Jong-Jan ;   et al. | 2006-08-31 |
High-density germanium-on-insulator photodiode array App 20060194357 - Hsu; Sheng Teng ;   et al. | 2006-08-31 |
Method of making CMOS devices on strained silicon on glass App 20060189111 - Lee; Jong-Jan ;   et al. | 2006-08-24 |
Method for forming an infrared photodetector with a vertical optical path App 20060189151 - Tweet; Douglas J. ;   et al. | 2006-08-24 |
Strained silicon devices transfer to glass for display applications App 20060172467 - Lee; Jong-Jan ;   et al. | 2006-08-03 |
Integration of biaxial tensile strained NMOS and uniaxial compressive strained PMOS on the same wafer App 20060160291 - Lee; Jong-Jan ;   et al. | 2006-07-20 |
Method of fabricating silicon integrated circuit on glass Grant 7,071,042 - Maa , et al. July 4, 2 | 2006-07-04 |
Method of making relaxed silicon-germanium on insulator via layer transfer with stress reduction Grant 7,067,430 - Maa , et al. June 27, 2 | 2006-06-27 |
Strained silicon fin structure App 20060113522 - Lee; Jong-Jan ;   et al. | 2006-06-01 |
Fabrication of thin film germanium infrared sensor by bonding to silicon wafer App 20060110844 - Lee; Jong-Jan ;   et al. | 2006-05-25 |
Vertical optical path structure for infrared photodetection Grant 7,045,832 - Tweet , et al. May 16, 2 | 2006-05-16 |
Strained silicon finFET device Grant 7,045,401 - Lee , et al. May 16, 2 | 2006-05-16 |
Fabrication of a low defect germanium film by direct wafer bonding App 20060099773 - Maa; Jer-Shen ;   et al. | 2006-05-11 |
Method of fabricating a low-defect strained epitaxial germanium film on silicon Grant 7,037,856 - Maa , et al. May 2, 2 | 2006-05-02 |
Low temperature anneal to reduce defects in hydrogen-implanted, relaxed SiGe layer Grant 7,030,002 - Tweet , et al. April 18, 2 | 2006-04-18 |
Strained silicon on insulator from film transfer and relaxation by hydrogen implantation App 20060073708 - Maa; Jer-shen ;   et al. | 2006-04-06 |
Method to form local "silicon-on-nothing" or "silicon-on-insulator" wafers with tensile-strained silicon Grant 7,018,882 - Tweet , et al. March 28, 2 | 2006-03-28 |
Method to form relaxed SiGe layer with high Ge content using co-implantation of silicon with boron or helium and hydrogen App 20060051960 - Tweet; Douglas J. ;   et al. | 2006-03-09 |
Epitaxial growth of germanium photodetector for CMOS imagers Grant 7,008,813 - Lee , et al. March 7, 2 | 2006-03-07 |
Iridium etching for FeRAM applications App 20060040493 - Zhang; Fengyan ;   et al. | 2006-02-23 |
Integrated circuit structure including electrodes with PGO ferroelectric thin film thereon Grant 6,998,661 - Zhang , et al. February 14, 2 | 2006-02-14 |
Method of fabricating single-layer and multi-layer single crystalline silicon and silicon devices on plastic using sacrificial glass App 20060030124 - Maa; Jer-Shen ;   et al. | 2006-02-09 |
Strained silicon on insulator from film transfer and relaxation by hydrogen implantation Grant 6,992,025 - Maa , et al. January 31, 2 | 2006-01-31 |
Method of fabricating silicon on glass via layer transfer App 20060019464 - Maa; Jer-Shen ;   et al. | 2006-01-26 |
Three-dimensional quantum dot structure for infrared photodetection Grant 6,967,112 - Maa , et al. November 22, 2 | 2005-11-22 |
Method to form local "silicon-on-nothing" or "silicon-on-insulator" wafers with tensile-strained silicon App 20050214997 - Tweet, Douglas J. ;   et al. | 2005-09-29 |
Three-dimensional Quantum Dot Structure For Infrared Photodetection App 20050196894 - Maa, Jer-Shen ;   et al. | 2005-09-08 |
Low temperature anneal to reduce defects in hydrogen-implanted, relaxed SiGe layer App 20050181592 - Tweet, Douglas J. ;   et al. | 2005-08-18 |
Strained silicon on insulator from film transfer and relaxation by hydrogen implantation App 20050153524 - Maa, Jer-shen ;   et al. | 2005-07-14 |
Method for isolating silicon germanium dislocation regions in strained-silicon CMOS applications App 20050151134 - Hsu, Sheng Teng ;   et al. | 2005-07-14 |
Vertical optical path structure for infrared photodetection App 20050153474 - Tweet, Douglas J. ;   et al. | 2005-07-14 |
Surface-normal optical path structure for infrared photodetection App 20050133723 - Lee, Jong Jan ;   et al. | 2005-06-23 |
System and method for isolating silicon germanium dislocation regions in strained-silicon CMOS applications Grant 6,903,384 - Hsu , et al. June 7, 2 | 2005-06-07 |
Method of making relaxed silicon-germanium on insulator via layer transfer with stress reduction App 20050070115 - Maa, Jer-Shen ;   et al. | 2005-03-31 |
Method of making relaxed silicon-germanium on glass via layer transfer Grant 6,852,652 - Maa , et al. February 8, 2 | 2005-02-08 |
Integrated circuit having barrier metal surface treatment prior to Cu deposition App 20050003663 - Pan, Wei ;   et al. | 2005-01-06 |
Strained silicon finFET device App 20040256647 - Lee, Jong-Jan ;   et al. | 2004-12-23 |
Method for recrystallizing an amorphized silicon germanium film overlying silicon Grant 6,793,731 - Hsu , et al. September 21, 2 | 2004-09-21 |
Method of forming relaxed SiGe layer Grant 6,780,796 - Maa , et al. August 24, 2 | 2004-08-24 |
Method of fabricating deep sub-micron CMOS source/drain with MDD and selective CVD silicide Grant 6,780,700 - Iguchi , et al. August 24, 2 | 2004-08-24 |
Method of barrier metal surface treatment prior to Cu deposition to improve adhesion and trench filling characteristics Grant 6,777,327 - Pan , et al. August 17, 2 | 2004-08-17 |
Methods of making relaxed silicon-germanium on insulator via layer transfer Grant 6,767,802 - Maa , et al. July 27, 2 | 2004-07-27 |
System and method for isolating silicon germanium dislocation regions in strained-silicon CMOS applications App 20040135138 - Hsu, Sheng Teng ;   et al. | 2004-07-15 |
Method to form relaxed sige layer with high ge content Grant 6,746,902 - Maa , et al. June 8, 2 | 2004-06-08 |
Method of forming relaxed SiGe layer App 20040087119 - Maa, Jer-Shen ;   et al. | 2004-05-06 |
Method of fabricating a nickel silicide on a substrate Grant 6,720,258 - Maa , et al. April 13, 2 | 2004-04-13 |
Method For Amorphization Re-crystallization Of Si1-xgex Films On Silicon Substrates App 20040048450 - Tweet, Douglas J. ;   et al. | 2004-03-11 |
Implantation at elevated temperatures for amorphization re-crystallization of Si1-xGex films on silicon substrates Grant 6,703,293 - Tweet , et al. March 9, 2 | 2004-03-09 |
Method for amorphization re-crystallization of Si1-xGex films on silicon substrates Grant 6,699,764 - Tweet , et al. March 2, 2 | 2004-03-02 |
Iridium conductive electrode/barrier structure and method for same Grant 6,682,995 - Zhang , et al. January 27, 2 | 2004-01-27 |
Implantation at elevated temperatures for amorphization re-crystallization of Si1-xGex films on silicon substrates App 20040009626 - Tweet, Douglas J. ;   et al. | 2004-01-15 |
Thermally stable nickel germanosilicide formed on SiGe Grant 6,627,919 - Maa , et al. September 30, 2 | 2003-09-30 |
Integrated circuit structure including electrodes with PGO ferroelectric thin film thereon App 20030176012 - Zhang, Fengyan ;   et al. | 2003-09-18 |
Method for recrystallizing an amorphized silicon germanium film overlying silicon App 20030172866 - Hsu, Sheng Teng ;   et al. | 2003-09-18 |
Method to form thick relaxed SiGe Layer with trench structure App 20030140844 - Maa, Jer-Shen ;   et al. | 2003-07-31 |
Method to form relaxed SiGe layer with high Ge content App 20030143783 - Maa, Jer-Shen ;   et al. | 2003-07-31 |
Thermally stable nickel germanosilicide formed on SiGe App 20030124780 - Maa, Jer-shen ;   et al. | 2003-07-03 |
Process integration of Si1-xGex CMOS with Si1-xGex relaxation after STI formation Grant 6,583,000 - Hsu , et al. June 24, 2 | 2003-06-24 |
Method Of Monitoring Pgo Spin-coating Precursor Solution Synthesis Using Uv Spectroscopy App 20030108670 - Zhuang, Wei-Wei ;   et al. | 2003-06-12 |
Method of fabricating a nickel silicide on a substrate App 20030104694 - Maa, Jer-Shen ;   et al. | 2003-06-05 |
Iridium conductive electrode/barrier structure and method for same App 20030104684 - Zhang, Fengyan ;   et al. | 2003-06-05 |
Molecular hydrogen implantation method for forming a relaxed silicon germanium layer with high germanium content Grant 6,562,703 - Maa , et al. May 13, 2 | 2003-05-13 |
Method of forming iridium conductive electrode/barrier structure Grant 6,555,456 - Zhang , et al. April 29, 2 | 2003-04-29 |
Method to form thermally stable nickel germanosilicide on SiGe Grant 6,506,637 - Maa , et al. January 14, 2 | 2003-01-14 |
Method for plasma etching of Ir-Ta-O electrode and for post-etch cleaning App 20020187645 - Ying, Hong ;   et al. | 2002-12-12 |
Nickel silicide including iridium for use in ultra-shallow junctions with high thermal stability and method of manufacturing the same Grant 6,468,901 - Maa , et al. October 22, 2 | 2002-10-22 |
Ferroelectric nonvolatile transistor Grant 6,462,366 - Hsu , et al. October 8, 2 | 2002-10-08 |
Method of making single c-axis PGO thin film on ZrO2 for non-volatile memory applications App 20020142536 - Zhang, Fengyan ;   et al. | 2002-10-03 |
Method of barrier metal surface treatment prior to Cu deposition to improve adhesion and trench filling characteristics App 20020142590 - Pan, Wei ;   et al. | 2002-10-03 |
Single c-axis PGO thin film electrodes having good surface smoothness and uniformity and methods for making the same App 20020142144 - Zhang, Fengyan ;   et al. | 2002-10-03 |
Method of the synthesis and control of PGO spin-coating precursor solutions App 20020139955 - Zhuang, Wei-Wei ;   et al. | 2002-10-03 |
Method to form thermally stable nickel germanosilicide on SiGe App 20020134982 - Maa, Jer-shen ;   et al. | 2002-09-26 |
Single c-axis PGO thin film on ZrO2 for non-volatile memory applications and methods of making the same Grant 6,441,417 - Zhang , et al. August 27, 2 | 2002-08-27 |
Method of forming iridium conductive electrode/barrier structure App 20020113314 - Zhang, Fengyan ;   et al. | 2002-08-22 |
Method of fabricating deep sub-micron CMOS source/drain with MDD and selective CVD silicide App 20020106850 - Iguchi, Katsuji ;   et al. | 2002-08-08 |
Method for anisotropic plasma etching using non-chlorofluorocarbon, fluorine-based chemistry Grant 6,350,699 - Maa , et al. February 26, 2 | 2002-02-26 |
Nitride overhang structure for the silicidation of transistor electrodes with shallow junctions Grant 6,339,245 - Maa , et al. January 15, 2 | 2002-01-15 |
MOCVD metal oxide for one transistor memory Grant 6,303,502 - Hsu , et al. October 16, 2 | 2001-10-16 |
Iridium Conductive Electrode/barrier Structure And Method For Same App 20010013637 - ZHANG, FENGYAN ;   et al. | 2001-08-16 |
MOS transistor having shallow source/drain junctions and low leakage current Grant 6,218,249 - Maa , et al. April 17, 2 | 2001-04-17 |
Composite iridium-metal-oxygen barrier structure with refractory metal companion barrier and method for same Grant 6,190,963 - Zhang , et al. February 20, 2 | 2001-02-20 |
Partial silicidation method to form shallow source/drain junctions Grant 6,071,782 - Maa , et al. June 6, 2 | 2000-06-06 |
Ferroelectric nonvolatile transistor and method of making same Grant 6,048,740 - Hsu , et al. April 11, 2 | 2000-04-11 |
Method for transferring a multi-level photoresist pattern Grant 6,043,164 - Nguyen , et al. March 28, 2 | 2000-03-28 |
Nitride overhang structures for the silicidation of transistor electrodes with shallow junction Grant 5,989,965 - Maa , et al. November 23, 1 | 1999-11-23 |
Method for a chemical vapor deposition of copper on an ion prepared conductive surface Grant 5,918,150 - Nguyen , et al. June 29, 1 | 1999-06-29 |
Raised silicided source/drain electrode formation with reduced substrate silicon consumption Grant 5,830,775 - Maa , et al. November 3, 1 | 1998-11-03 |
Method of forming transistor electrodes from directionally deposited silicide Grant 5,814,537 - Maa , et al. September 29, 1 | 1998-09-29 |
Low reflectance conductor in an integrated circuit Grant 4,990,995 - Maa February 5, 1 | 1991-02-05 |
Formation of conductive lines Grant 4,585,515 - Maa April 29, 1 | 1986-04-29 |
Anisotropic etching of aluminum Grant 4,547,261 - Maa , et al. October 15, 1 | 1985-10-15 |
Patterning of submicrometer metal silicide structures Grant 4,460,435 - Maa July 17, 1 | 1984-07-17 |
Etching of tantalum silicide/doped polysilicon structures Grant 4,411,734 - Maa October 25, 1 | 1983-10-25 |