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Patent applications and USPTO patent grants for Ma; Yorkman.The latest application filed is for "gas supply with angled injectors in plasma processing apparatus".
Patent | Date |
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Gas Supply With Angled Injectors In Plasma Processing Apparatus App 20200258718 - A1 | 2020-08-13 |
Temperature Control Using Temperature Control Element Coupled to Faraday Shield App 20180240652 - Ma; Yorkman ;   et al. | 2018-08-23 |
Apparatus And Method For Uniform Irradiation Using Secondary Irradiant Energy From A Single Light Source App 20150163860 - Burkhart; Vincent E. ;   et al. | 2015-06-11 |
Method and system for rotating a semiconductor wafer in processing chambers Grant 6,770,146 - Koren , et al. August 3, 2 | 2004-08-03 |
Method and system for rotating a semiconductor wafer in processing chambers App 20020104619 - Koren, Zion ;   et al. | 2002-08-08 |
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