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Apparatus and method for vapor generation and film deposition Grant 10,287,679 - Dinh , et al. | 2019-05-14 |
Apparatus and method for vapor generation and film deposition App 20180044789 - Dinh; Thuc M. ;   et al. | 2018-02-15 |
Apparatus and method for vapor generation and film deposition Grant 9,797,593 - Dinh , et al. October 24, 2 | 2017-10-24 |
Apparatus and method for vapor generation and film deposition App 20160334099 - Dinh; Thuc M. ;   et al. | 2016-11-17 |
Method and apparatus for vapor and gas filtration Grant 9,089,800 - Liu , et al. July 28, 2 | 2015-07-28 |
Fine droplet atomization for liquid precursor vaporization Grant 8,986,784 - Liu , et al. March 24, 2 | 2015-03-24 |
Method and apparatus for vapor generation and wafer cleaning Grant 8,945,281 - Dinh , et al. February 3, 2 | 2015-02-03 |
Liquid flow control for film deposition Grant 8,783,652 - Dinh , et al. July 22, 2 | 2014-07-22 |
Apparatus for vapor condensation and recovery Grant 8,728,240 - Liu , et al. May 20, 2 | 2014-05-20 |
Apparatus for filtration and gas-vapor mixing in thin film deposition App 20140096715 - Liu; Benjamin Y.H. ;   et al. | 2014-04-10 |
Integrated system for vapor generation and thin film deposition App 20130312674 - Liu; Benjamin Y.H. ;   et al. | 2013-11-28 |
Apparatus for vapor condensation and recovery App 20130295749 - Liu; Benjamin Y.H. ;   et al. | 2013-11-07 |
Method for vapor condensation and recovery App 20130295776 - Liu; Benjamin Y.H. ;   et al. | 2013-11-07 |
Fine droplet atomizer for liquid precursor vaporization App 20130292485 - Liu; Benjamin Y.H. ;   et al. | 2013-11-07 |
Method and apparatus for generating vapor at high rates Grant 8,554,064 - Dinh , et al. October 8, 2 | 2013-10-08 |
Liquid flow control for film deposition App 20130233395 - Dinh; Thuc M. ;   et al. | 2013-09-12 |
Fine droplet atomizer for liquid precursor vaporization Grant 8,511,583 - Liu , et al. August 20, 2 | 2013-08-20 |
Method and apparatus for vapor and gas filtration App 20130203264 - Liu; Benjamin Y.H. ;   et al. | 2013-08-08 |
Method and apparatus for particle filtration and enhancing tool performance in film deposition Grant 8,297,223 - Liu , et al. October 30, 2 | 2012-10-30 |
Integrated system for vapor generation and thin film deposition App 20110232588 - Liu; Benjamin Y.H. ;   et al. | 2011-09-29 |
Fine droplet atomizer for liquid precursor vaporization App 20110192909 - Liu; Benjamin Y.H. ;   et al. | 2011-08-11 |
High accuracy vapor generation and delivery for thin film deposition App 20100203244 - Liu; Benjamin Y.H. ;   et al. | 2010-08-12 |
Apparatus for filtration and gas-vapor mixing in thin film deposition App 20090293807 - Liu; Benjamin Y.H. ;   et al. | 2009-12-03 |
Method And Apparatus For Particle Filtration And Enhancing Tool Performance In Film Deposition App 20090084315 - Liu; Benjamin Y.H. ;   et al. | 2009-04-02 |
Simple but effective sail handling system that allows sail control to be carried out single-handed from the safety of the cockpit App 20060174810 - Ma; Yamin | 2006-08-10 |
High accuracy vapor generation and delivery for thin film deposition App 20060144338 - Liu; Benjamin Y.H. ;   et al. | 2006-07-06 |
High-performance vaporizer for liquid-precursor and multi-liquid-precursor vaporization in semiconductor thin film deposition App 20050147749 - Liu, Benjamin Y.H. ;   et al. | 2005-07-07 |
High voltage sealing and isolation via dynamic seals Grant 5,364,035 - Ma , et al. November 15, 1 | 1994-11-15 |