Ma; Yamin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ma; Yamin.The latest application filed is for "apparatus and method for vapor generation and film deposition".

Company Profile

1.16.20

Ma; Yamin - Roseville MN

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus and method for vapor generation and film deposition Grant 10,287,679 - Dinh , et al.	2019-05-14
Apparatus and method for vapor generation and film deposition App 20180044789 - Dinh; Thuc M. ; et al.	2018-02-15
Apparatus and method for vapor generation and film deposition Grant 9,797,593 - Dinh , et al. October 24, 2	2017-10-24
Apparatus and method for vapor generation and film deposition App 20160334099 - Dinh; Thuc M. ; et al.	2016-11-17
Method and apparatus for vapor and gas filtration Grant 9,089,800 - Liu , et al. July 28, 2	2015-07-28
Fine droplet atomization for liquid precursor vaporization Grant 8,986,784 - Liu , et al. March 24, 2	2015-03-24
Method and apparatus for vapor generation and wafer cleaning Grant 8,945,281 - Dinh , et al. February 3, 2	2015-02-03
Liquid flow control for film deposition Grant 8,783,652 - Dinh , et al. July 22, 2	2014-07-22
Apparatus for vapor condensation and recovery Grant 8,728,240 - Liu , et al. May 20, 2	2014-05-20
Apparatus for filtration and gas-vapor mixing in thin film deposition App 20140096715 - Liu; Benjamin Y.H. ; et al.	2014-04-10
Integrated system for vapor generation and thin film deposition App 20130312674 - Liu; Benjamin Y.H. ; et al.	2013-11-28
Apparatus for vapor condensation and recovery App 20130295749 - Liu; Benjamin Y.H. ; et al.	2013-11-07
Method for vapor condensation and recovery App 20130295776 - Liu; Benjamin Y.H. ; et al.	2013-11-07
Fine droplet atomizer for liquid precursor vaporization App 20130292485 - Liu; Benjamin Y.H. ; et al.	2013-11-07
Method and apparatus for generating vapor at high rates Grant 8,554,064 - Dinh , et al. October 8, 2	2013-10-08
Liquid flow control for film deposition App 20130233395 - Dinh; Thuc M. ; et al.	2013-09-12
Fine droplet atomizer for liquid precursor vaporization Grant 8,511,583 - Liu , et al. August 20, 2	2013-08-20
Method and apparatus for vapor and gas filtration App 20130203264 - Liu; Benjamin Y.H. ; et al.	2013-08-08
Method and apparatus for particle filtration and enhancing tool performance in film deposition Grant 8,297,223 - Liu , et al. October 30, 2	2012-10-30
Integrated system for vapor generation and thin film deposition App 20110232588 - Liu; Benjamin Y.H. ; et al.	2011-09-29
Fine droplet atomizer for liquid precursor vaporization App 20110192909 - Liu; Benjamin Y.H. ; et al.	2011-08-11
High accuracy vapor generation and delivery for thin film deposition App 20100203244 - Liu; Benjamin Y.H. ; et al.	2010-08-12
Apparatus for filtration and gas-vapor mixing in thin film deposition App 20090293807 - Liu; Benjamin Y.H. ; et al.	2009-12-03
Method And Apparatus For Particle Filtration And Enhancing Tool Performance In Film Deposition App 20090084315 - Liu; Benjamin Y.H. ; et al.	2009-04-02
Simple but effective sail handling system that allows sail control to be carried out single-handed from the safety of the cockpit App 20060174810 - Ma; Yamin	2006-08-10
High accuracy vapor generation and delivery for thin film deposition App 20060144338 - Liu; Benjamin Y.H. ; et al.	2006-07-06
High-performance vaporizer for liquid-precursor and multi-liquid-precursor vaporization in semiconductor thin film deposition App 20050147749 - Liu, Benjamin Y.H. ; et al.	2005-07-07
High voltage sealing and isolation via dynamic seals Grant 5,364,035 - Ma , et al. November 15, 1	1994-11-15

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