Ma; Tristan Y.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ma; Tristan Y..The latest application filed is for "techniques and device structures based upon directional dielectric deposition and bottom-up fill".

Company Profile

10.9.10

Ma; Tristan Y. - Lexington MA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Techniques And Device Structures Based Upon Directional Dielectric Deposition And Bottom-up Fill App 20220119938 - Zeeshan; M. Arif ; et al.	2022-04-21
Ribbon Beam Plasma Enhanced Chemical Vapor Deposition System For Anisotropic Deposition Of Thin Films App 20210189566 - Hautala; John ; et al.	2021-06-24
Performance improvement of EUV photoresist by ion implantation Grant 10,990,014 - Ma , et al. April 27, 2	2021-04-27
Selective photoresist etching for bridge defect removal Grant 10,937,663 - Ma , et al. March 2, 2	2021-03-02
Performance Improvement Of Euv Photoresist By Ion Implantation App 20200096870 - Ma; Tristan Y. ; et al.	2020-03-26
Selective Photoresist Etching For Bridge Defect Removal App 20200098589 - MA; Tristan Y. ; et al.	2020-03-26
Techniques for processing a polycrystalline layer using an angled ion beam Grant 10,553,448 - Ma , et al. Fe	2020-02-04
Performance improvement of EUV photoresist by ion implantation Grant 10,545,408 - Ma , et al. Ja	2020-01-28
Multiple patterning approach using ion implantation Grant 10,310,379 - Ma , et al.	2019-06-04
Three dimensional structure fabrication control using novel processing system Grant 10,222,202 - Evans , et al.	2019-03-05
Performance Improvement Of Euv Photoresist By Ion Implantation App 20190056914 - Ma; Tristan Y. ; et al.	2019-02-21
Three Dimensional Structure Fabrication Control Using Novel Processing System App 20180340769 - Evans; Morgan D. ; et al.	2018-11-29
Multiple Patterning Approach Using Ion Implantation App 20180204719 - Ma; Tristan Y. ; et al.	2018-07-19
Techniques For Processing A Polycrystalline Layer Using An Angled Ion Beam App 20180122650 - Ma; Tristan Y. ; et al.	2018-05-03
Ion implantation for improved contact hole critical dimension uniformity Grant 9,735,013 - Ma , et al. August 15, 2	2017-08-15
Ion Implantation For Improved Contact Hole Critical Dimension Uniformity App 20170178911 - MA; Tristan Y. ; et al.	2017-06-22
Ion implantation for improved etch performance Grant 9,520,290 - Ma , et al. December 13, 2	2016-12-13
Multiple exposure treatment for processing a patterning feature Grant 9,512,517 - Ma , et al. December 6, 2	2016-12-06
Multiple Exposure Treatment For Processing A Patterning Feature App 20160215385 - Ma; Tristan Y. ; et al.	2016-07-28

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