Patent | Date |
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Cylinder Valves And Methods For Inhibiting The Formation Of Contaminants In Cylnders And Cylinder Valves App 20210262619 - Mittonette; Paul ;   et al. | 2021-08-26 |
Direct Liquid Injection Of Solution Based Precursors For Atomic Layer Deposition App 20150211126 - Ma; Ce | 2015-07-30 |
Solution based precursors Grant 8,710,253 - Ma , et al. April 29, 2 | 2014-04-29 |
Low-volatility Compounds For Use In Forming Deposited Layers App 20130125788 - AITCHISON; Kenneth ;   et al. | 2013-05-23 |
Method And Apparatus For Using Solution Based Precursors For Atomic Layer Deposition App 20120294753 - MA; Ce ;   et al. | 2012-11-22 |
Method And Apparatus For Using Solution Based Precursors For Atomic Layer Deposition App 20120295038 - Ma; Ce ;   et al. | 2012-11-22 |
Container for precursors used in deposition processes Grant 8,261,908 - Ma September 11, 2 | 2012-09-11 |
Solution Based Precursors App 20120178953 - Ma; Ce ;   et al. | 2012-07-12 |
Formation of graphene wafers on silicon substrates Grant 7,947,581 - Ma May 24, 2 | 2011-05-24 |
Low-volatility Compounds For Use In Forming Deposited Layers App 20110048283 - Aitchison; Kenneth ;   et al. | 2011-03-03 |
Formation Of Graphene Wafers On Silicon Substrates App 20110034011 - MA; Ce | 2011-02-10 |
Solution Based Lanthanide And Group Iii Precursors For Atomic Layer Deposition App 20100290968 - MA; Ce ;   et al. | 2010-11-18 |
Solution Based Zirconium Precursors For Atomic Layer Deposition App 20100290945 - MA; Ce ;   et al. | 2010-11-18 |
Methods And Apparatus For The Vaporization And Delivery Of Solution Precursors For Atomic Layer Deposition App 20100151261 - Ma; Ce ;   et al. | 2010-06-17 |
Container For Precursors Used In Deposition Processes App 20100140120 - MA; Ce | 2010-06-10 |
Precursors For Atomic Layer Deposition App 20100055321 - Ma; Ce ;   et al. | 2010-03-04 |
Methods For Atomic Layer Deposition App 20100036144 - Ma; Ce ;   et al. | 2010-02-11 |
Single Precursors For Atomic Layer Deposition App 20090305504 - Ma; Ce ;   et al. | 2009-12-10 |
Method And Apparatus For Using Solution Precursors For Atomic Layer Deposition App 20090220374 - MA; Ce ;   et al. | 2009-09-03 |
Solution Based Lanthanum Precursors For Atomic Layer Deposition App 20090117274 - Ma; Ce ;   et al. | 2009-05-07 |
Method and apparatus for using solution based precursors for atomic layer deposition Grant 7,514,119 - Ma , et al. April 7, 2 | 2009-04-07 |
Method and apparatus for the production of high purity tungsten hexafluoride App 20090068086 - Hogle; Richard Allen ;   et al. | 2009-03-12 |
Method of forming low dielectric constant layer App 20070077778 - Ma; Ce ;   et al. | 2007-04-05 |
Method and apparatus for using solution based precursors for atomic layer deposition App 20060269667 - Ma; Ce ;   et al. | 2006-11-30 |
Low temperature selective epitaxial growth of silicon germanium layers App 20060071213 - Ma; Ce ;   et al. | 2006-04-06 |
Method and apparatus for maintaining by-product volatility in deposition process App 20050250347 - Bailey, Christopher M. ;   et al. | 2005-11-10 |
Methods for forming low-k dielectric films Grant 6,936,537 - Hogle , et al. August 30, 2 | 2005-08-30 |
Acid copper electroplating solutions App 20040187731 - Wang, Qing Min ;   et al. | 2004-09-30 |
Organosilane CVD precursors and their use for making organosilane polymer low-k dielectric film Grant 6,649,540 - Wang , et al. November 18, 2 | 2003-11-18 |
Asymmetric organocyclosiloxanes and their use for making organosilicon polymer low-k dielectric film Grant 6,572,923 - Ma , et al. June 3, 2 | 2003-06-03 |
Methods for forming low-k dielectric films App 20020192980 - Hogle, Richard A. ;   et al. | 2002-12-19 |
Asymmetric organocyclosiloxanes and their use for making organosilicon polymer low-k dielectric film App 20020132408 - Ma, Ce ;   et al. | 2002-09-19 |
Organosilane CVD precursors and their use for making organosilane polymer low-k dielectric film App 20020076944 - Wang, Qing Min ;   et al. | 2002-06-20 |
Low-k dielectric CVD precursors and uses thereof App 20020072220 - Wang, Qing Min ;   et al. | 2002-06-13 |
Method and apparatus for measuring metallic impurities contained within a fluid Grant 6,012,325 - Ma January 11, 2 | 2000-01-11 |