Lyulina; Irina

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lyulina; Irina.The latest application filed is for "methods & apparatus for obtaining diagnostic information relating to an industrial process".

Company Profile

4.10.11

Lyulina; Irina - Son NL
Lyulina; Irina - Veldhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods and apparatus for obtaining diagnostic information relating to an industrial process Grant 11,385,550 - Ypma , et al. July 12, 2	2022-07-12
Methods & Apparatus For Obtaining Diagnostic Information Relating To An Industrial Process App 20200264520 - YPMA; Alexander ; et al.	2020-08-20
Methods and apparatus for obtaining diagnostic information relating to an industrial process Grant 10,642,162 - Ypma , et al.	2020-05-05
Methods And Apparatus For Obtaining Diagnostic Information Relating To An Industrial Process App 20190278188 - YPMA; Alexander ; et al.	2019-09-12
Methods and apparatus for obtaining diagnostic information relating to an industrial process Grant 10,274,834 - Ypma , et al.	2019-04-30
Methods And Apparatus For Obtaining Diagnostic Information Relating To An Industrial Process App 20180253015 - Ypma; Alexander ; et al.	2018-09-06
Methods and apparatus for obtaining diagnostic information relating to an industrial process Grant 9,946,165 - Ypma , et al. April 17, 2	2018-04-17
Deformation pattern recognition method, pattern transferring method, processing device monitoring method, and lithographic apparatus Grant 9,753,377 - Cekli , et al. September 5, 2	2017-09-05
Method to determine the usefulness of alignment marks to correct overlay, and a combination of a lithographic apparatus and an overlay measurement system Grant 9,454,084 - Lyulina , et al. September 27, 2	2016-09-27
Methods And Apparatus For Obtaining Diagnostic Information Relating To An Industrial Process App 20160246185 - Ypma; Alexander ; et al.	2016-08-25
Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods Grant 9,291,916 - Van Der Sanden , et al. March 22, 2	2016-03-22
Deformation Pattern Recognition Method, Pattern Transferring Method, Processing Device Monitoring Method, And Lithographic Apparatus App 20150205213 - Cekli; Hakki Ergun ; et al.	2015-07-23
Method of Applying a Pattern to a Substrate, Device Manufacturing Method and Lithographic Apparatus for Use in Such Methods App 20150153656 - VAN DER SANDEN; Stefan Cornelis Theodorus ; et al.	2015-06-04
Method To Determine The Usefulness Of Alignment Marks To Correct Overlay, And A Combination Of A Lithographic Apparatus And An Overlay Measurement System App 20150146188 - Lyulina; Irina ; et al.	2015-05-28
Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus Grant 8,982,347 - Wei , et al. March 17, 2	2015-03-17
Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods Grant 8,976,355 - Van Der Sanden , et al. March 10, 2	2015-03-10
Method of Applying a Pattern to a Substrate, Device Manufacturing Method and Lithographic Apparatus for Use in Such Methods App 20130230797 - VAN DER SANDEN; Stefan Cornelis Theodorus ; et al.	2013-09-05
Alignment Mark Deformation Estimating Method, Substrate Position Predicting Method, Alignment System and Lithographic Apparatus App 20130141723 - WEI; Xiuhong ; et al.	2013-06-06
Method Of Calculating Model Parameters Of A Substrate, A Lithographic Apparatus And An Apparatus For Controlling Lithographic Processing By A Lithographic Apparatus App 20120218533 - LYULINA; Irina ; et al.	2012-08-30

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