Lymberopoulos; Dimitris P.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Lymberopoulos; Dimitris P..The latest application filed is for "integrated equipment set for forming a low k dielectric interconnect on a substrate".
- Lymberopoulos; Dimitris P. - San Jose CA
| Patent | Date |
|---|---|
| Integrated equipment set for forming a low K dielectric interconnect on a substrate App 20060246683 - Pan; Judon Tony ; et al. | 2006-11-02 |
| Fault detection and virtual sensor methods for tool fault monitoring Grant 6,895,293 - Reiss , et al. May 17, 2 | 2005-05-17 |
| Integrated equipment set for forming a low K dielectric interconnect on a substrate App 20040007325 - Pan, Judon Tony ; et al. | 2004-01-15 |
| Film thickness control using spectral interferometry Grant 6,589,869 - Sarfaty , et al. July 8, 2 | 2003-07-08 |
| Film thickness control using spectral interferometry App 20020119660 - Sarfaty, Moshe ; et al. | 2002-08-29 |
| Film thickness control using spectral interferometry Grant 6,413,867 - Sarfaty , et al. July 2, 2 | 2002-07-02 |
| Fault detection and virtual sensor methods for tool fault monitoring App 20020055801 - Reiss, Terry ; et al. | 2002-05-09 |
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