| Patent | Date |
|---|
In Situ Optical Surface Temperature Measuring Techniques And Devices
App 20080225926 - Gotthold; John P. ; et al. | 2008-09-18 |
In situ optical surface temperature measuring techniques and devices
Grant 7,374,335 - Gotthold , et al. May 20, 2 | 2008-05-20 |
In situ optical surface temperature measuring techniques and devices
Grant 7,080,940 - Gotthold , et al. July 25, 2 | 2006-07-25 |
In situ optical surface temperature measuring techniques and devices
App 20060140248 - Gotthold; John P. ; et al. | 2006-06-29 |
Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
Grant 7,042,581 - Schietinger , et al. May 9, 2 | 2006-05-09 |
Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
Grant 6,934,040 - Schietinger , et al. August 23, 2 | 2005-08-23 |
Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
App 20050105103 - Schietinger, Charles W. ; et al. | 2005-05-19 |
In situ optical surface temperature measuring techniques and devices
App 20040258130 - Gotthold, John P. ; et al. | 2004-12-23 |
Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
Grant 6,654,132 - Schietinger , et al. November 25, 2 | 2003-11-25 |
In situ optical surface temperature measuring techniques and devices
Grant 6,572,265 - Gotthold , et al. June 3, 2 | 2003-06-03 |
Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
Grant 6,570,662 - Schietinger , et al. May 27, 2 | 2003-05-27 |
Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
Grant 6,426,232 - Litvak July 30, 2 | 2002-07-30 |
Liquid etch endpoint detection and process metrology
Grant 6,406,641 - Golzarian June 18, 2 | 2002-06-18 |
Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
Grant 6,110,752 - Litvak August 29, 2 | 2000-08-29 |
Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
Grant 6,077,452 - Litvak June 20, 2 | 2000-06-20 |
In situ technique for monitoring and controlling a process of chemical-mechanical-polishing via a radiative communication link
Grant 6,010,538 - Sun , et al. January 4, 2 | 2000-01-04 |
Electro optical board assembly for measuring the temperature of an object surface from infra red emissions thereof including an automatic gain control therefore
Grant 5,897,610 - Jensen April 27, 1 | 1999-04-27 |
Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
Grant 5,891,352 - Litvak April 6, 1 | 1999-04-06 |
Interference removal
Grant 5,786,886 - Litvak , et al. July 28, 1 | 1998-07-28 |
Non-contact optical techniques for measuring surface conditions
Grant 5,769,540 - Schietinger , et al. June 23, 1 | 1998-06-23 |
Electro-optical board assembly for measuring the temperature of an object surface from infra-red emissions thereof, including an automatic gain control therefore
Grant 5,717,608 - Jensen February 10, 1 | 1998-02-10 |
Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
Grant 5,695,660 - Litvak December 9, 1 | 1997-12-09 |
Temperature measuring system having improved signal processing and multiple optical sensors
Grant 5,600,147 - Jensen February 4, 1 | 1997-02-04 |
Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
Grant 5,499,733 - Litvak March 19, 1 | 1996-03-19 |
Non-contact optical techniques for measuring surface conditions
Grant 5,490,728 - Schietinger , et al. * February 13, 1 | 1996-02-13 |
Apparatus and method for measuring temperatures at a plurality of locations using luminescent-type temperature sensors which are excited in a time sequence
Grant 5,470,155 - Jensen November 28, 1 | 1995-11-28 |
Autocalibrating non-contact temperature measuring technique employing dual recessed heat flow sensors
Grant 5,464,284 - Rall November 7, 1 | 1995-11-07 |
Measuring system employing a luminescent sensor and methods of designing the system
Grant 5,414,266 - Sun May 9, 1 | 1995-05-09 |
Apparatus and method for monitoring a temperature using a thermally fused composite ceramic blackbody temperature probe
Grant 5,364,186 - Wang , et al. November 15, 1 | 1994-11-15 |
Processing endpoint detecting technique and detector structure using multiple radiation sources or discrete detectors
Grant 5,362,969 - Glenn November 8, 1 | 1994-11-08 |
Modular luminescence-based measuring system using fast digital signal processing
Grant 5,351,268 - Jensen , et al. September 27, 1 | 1994-09-27 |
Non-contact techniques for measuring temperature of radiation-heated objects
Grant 5,318,362 - Schietinger , et al. June 7, 1 | 1994-06-07 |
Non-contact optical techniques for measuring surface conditions
Grant 5,310,260 - Schietinger , et al. May 10, 1 | 1994-05-10 |
Endpoint and uniformity determinations in material layer processing through monitoring multiple surface regions across the layer
Grant 5,308,447 - Lewis , et al. May 3, 1 | 1994-05-03 |
Luminescent decay time measurements by use of a CCD camera
Grant 5,304,809 - Wickersheim April 19, 1 | 1994-04-19 |
Autocalibrating dual sensor non-contact temperature measuring device
Grant 5,294,200 - Rall March 15, 1 | 1994-03-15 |
Autocalibrating dual sensor non-contact temperature measuring device
Grant 5,216,625 - Rall June 1, 1 | 1993-06-01 |
Method of endpoint detection and structure therefor
Grant 5,190,614 - Leach , et al. March 2, 1 | 1993-03-02 |
Temperature measurement with combined photo-luminescent and black body sensing techniques
Grant 5,183,338 - Wickersheim , et al. February 2, 1 | 1993-02-02 |
Techniques for measuring the thickness of a film formed on a substrate
Grant 5,166,080 - Schietinger , et al. November 24, 1 | 1992-11-24 |
Non-contact techniques for measuring temperature or radiation-heated objects
Grant 5,154,512 - Schietinger , et al. October 13, 1 | 1992-10-13 |
Temperature measurement with combined photo-luminescent and black body sensing techniques
Grant 5,112,137 - Wickersheim , et al. May 12, 1 | 1992-05-12 |
Fiberoptic techniques for measuring the magnitude of local microwave fields and power
Grant 5,110,216 - Wickersheim , et al. May 5, 1 | 1992-05-05 |
Method of making a fiberoptic sensor of a microwave field
Grant 5,109,595 - Wickersheim , et al. May 5, 1 | 1992-05-05 |
Modular luminescence-based measuring system using fast digital signal processing
Grant 5,107,445 - Jensen , et al. April 21, 1 | 1992-04-21 |
Knock detector using optical fiber thermometer
Grant 5,099,681 - Dils March 31, 1 | 1992-03-31 |
Knock detector using optical fiber thermometer
Grant 5,052,214 - Dils October 1, 1 | 1991-10-01 |
Fiberoptic sensing of temperature and/or other physical parameters
Grant 4,988,212 - Sun , et al. January 29, 1 | 1991-01-29 |
Three-parameter optical fiber sensor and system
Grant 4,986,671 - Sun , et al. January 22, 1 | 1991-01-22 |
Sensors for detecting electromagnetic parameters utilizing resonating elements
Grant 4,897,541 - Phillips January 30, 1 | 1990-01-30 |
Fiberoptic sensing of temperature and/or other physical parameters
Grant 4,883,354 - Sun , et al. November 28, 1 | 1989-11-28 |
Optical system using a luminescent material sensor for measuring very high temperatures
Grant 4,859,079 - Wickersheim , et al. August 22, 1 | 1989-08-22 |
Optical temperature measurement techniques
Grant 4,789,992 - Wickersheim , et al. * December 6, 1 | 1988-12-06 |
Optical fiber probe for measuring the temperature of an ultrasonically heated object
Grant 4,785,824 - Wickersheim , et al. * November 22, 1 | 1988-11-22 |
Fiberoptic sensing of temperature and/or other physical parameters
Grant 4,752,141 - Sun , et al. June 21, 1 | 1988-06-21 |
Multi-channel fiber optic connector
Grant 4,712,864 - Ellis , et al. December 15, 1 | 1987-12-15 |
Optical sensors for detecting physical parameters utilizing vibrating piezoelectric elements
Grant 4,678,905 - Phillips July 7, 1 | 1987-07-07 |
Optical temperature measurement techniques
Grant 4,652,143 - Wickersheim , et al. March 24, 1 | 1987-03-24 |
Technique for optically measuring the temperature of an ultrasonically heated object
Grant 4,626,110 - Wickersheim , et al. December 2, 1 | 1986-12-02 |
Fiber optic thermal anemometer
Grant 4,621,929 - Phillips November 11, 1 | 1986-11-11 |
Optical temperature measurement techniques utilizing phosphors
Grant 4,560,286 - Wickersheim December 24, 1 | 1985-12-24 |
Multiplexing and calibration techniques for optical signal measuring instruments
Grant 4,558,217 - Alves December 10, 1 | 1985-12-10 |
Optical system for an instrument to detect the temperature of an optical fiber phosphor probe
Grant 4,459,044 - Alves July 10, 1 | 1984-07-10 |
Optical temperature measurement technique utilizing phosphors
Grant 4,448,547 - Wickersheim May 15, 1 | 1984-05-15 |
Optical temperature measurement technique utilizing phosphors
Grant 4,215,275 - Wickersheim July 29, 1 | 1980-07-29 |
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