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Lithographic apparatus and device manufacturing method Grant 10,209,634 - Butler , et al. Feb | 2019-02-19 |
Lithographic Apparatus And Device Manufacturing Method App 20180017879 - BUTLER; Hans ;   et al. | 2018-01-18 |
Lithographic apparatus Grant 9,513,566 - Bal , et al. December 6, 2 | 2016-12-06 |
Lithographic Apparatus App 20150049323 - Bal; Kursat ;   et al. | 2015-02-19 |
Apparatus for Monitoring a Lithographic Patterning Device App 20140340663 - Scaccabarozzi; Luigi ;   et al. | 2014-11-20 |
Lithographic apparatus and device manufacturing method utilizing a substrate handler Grant 8,411,252 - Jacobs , et al. April 2, 2 | 2013-04-02 |
Lithographic apparatus and device manufacturing method Grant 8,289,498 - Loopstra , et al. October 16, 2 | 2012-10-16 |
Lithographic apparatus and device manufacturing method for clamping a patterning device Grant 8,264,670 - Loopstra , et al. September 11, 2 | 2012-09-11 |
Substrate handler, lithographic apparatus and device manufacturing method Grant 8,174,680 - Van Der Schoot , et al. May 8, 2 | 2012-05-08 |
Lithographic apparatus and device manufacturing method Grant 7,961,291 - Loopstra , et al. June 14, 2 | 2011-06-14 |
Integrated circuit manufacturing methods with patterning device position determination Grant 7,804,584 - Bartray , et al. September 28, 2 | 2010-09-28 |
Lithographic apparatus, device manufacturing method and exchangeable optical element Grant 7,724,351 - Loopstra , et al. May 25, 2 | 2010-05-25 |
Lithographic Apparatus and Device Manufacturing Method Utilizing a Substrate Handler App 20100085553 - Jacobs; Hernes ;   et al. | 2010-04-08 |
Lithographic apparatus and device manufacturing method utilizing a substrate handler Grant 7,656,506 - Jacobs , et al. February 2, 2 | 2010-02-02 |
Lithographic Apparatus And Device Manufacturing Method App 20100002207 - LOOPSTRA; Erik Roelof ;   et al. | 2010-01-07 |
Substrate Handler, Lithographic Apparatus and Device Manufacturing Method App 20090284730 - VAN DER SCHOOT; Harmen Klaas ;   et al. | 2009-11-19 |
Substrate handler, lithographic apparatus and device manufacturing method Grant 7,576,835 - Van Der Schoot , et al. August 18, 2 | 2009-08-18 |
Lithographic apparatus, thermal conditioning system, and method for manufacturing a device Grant 7,545,478 - Box , et al. June 9, 2 | 2009-06-09 |
Lithographic apparatus and device manufacturing method utilizing a substrate handler Grant 7,538,857 - Jacobs , et al. May 26, 2 | 2009-05-26 |
Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination Grant 7,522,258 - Luttikhuis , et al. April 21, 2 | 2009-04-21 |
Integrated Circuit Manufacturing Methods with Patterning Device Position Determination App 20090061361 - Bartray; Petrus Rutgerus ;   et al. | 2009-03-05 |
Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method Grant 7,483,120 - Luttikhuis , et al. January 27, 2 | 2009-01-27 |
Lithographic apparatus with patterning device position determination Grant 7,471,373 - Bartray , et al. December 30, 2 | 2008-12-30 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,375,795 - Lof , et al. May 20, 2 | 2008-05-20 |
Lithographic apparatus and device manufacturing method Grant 7,352,438 - Luttikhuis , et al. April 1, 2 | 2008-04-01 |
Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method App 20070263197 - Luttikhuis; Bernardus Antonius Johannes ;   et al. | 2007-11-15 |
Lithographic apparatus and device manufacturing method App 20070188723 - Luttikhuis; Bernardus Antonius Johannes ;   et al. | 2007-08-16 |
Lithographic apparatus and device manufacturing method Grant 7,256,867 - Luttikhuis , et al. August 14, 2 | 2007-08-14 |
Lithographic apparatus and device manufacturing method Grant 7,253,875 - Luttikhuis , et al. August 7, 2 | 2007-08-07 |
Lithographic apparatus and device manufacturing method App 20070178704 - Loopstra; Erik Roelof ;   et al. | 2007-08-02 |
Lithographic apparatus, device manufacturing method and exchangeable optical element App 20070177122 - Loopstra; Erik Roelof ;   et al. | 2007-08-02 |
Lithographic apparatus and device manufacturing method App 20070146678 - Loopstra; Erik Roelof ;   et al. | 2007-06-28 |
Substrate handler, lithographic apparatus and device manufacturing method App 20070008512 - Van Der Schoot; Harmen Klaas ;   et al. | 2007-01-11 |
Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination App 20070002297 - Luttikhuis; Bernardus Antonius Johannes ;   et al. | 2007-01-04 |
Lithographic apparatus and device manufacturing method Grant 7,130,019 - Bartray , et al. October 31, 2 | 2006-10-31 |
Lithographic apparatus and a device manufacturing method Grant 7,126,664 - Luttikhuis , et al. October 24, 2 | 2006-10-24 |
Lithographic apparatus and device manufacturing method utilizing a substrate handler App 20060158634 - Jacobs; Hernes ;   et al. | 2006-07-20 |
Lithographic apparatus and device manufacturing method utilizing a substrate handler App 20060139616 - Jacobs; Hernes ;   et al. | 2006-06-29 |
Lithographic apparatus and device manufacturing method App 20060132734 - Luttikhuis; Bernardus Antonius Johannes ;   et al. | 2006-06-22 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20060132735 - Lof; Joeri ;   et al. | 2006-06-22 |
Lithographic apparatus and device manufacturing method Grant 7,061,579 - Bartray , et al. June 13, 2 | 2006-06-13 |
Lithographic apparatus and a device manufacturing method App 20060007414 - Luttikhuis; Bernardus Antonius Johannes ;   et al. | 2006-01-12 |
Lithographic apparatus and device manufacturing method Grant 6,977,713 - Luttikhuis , et al. December 20, 2 | 2005-12-20 |
Lithographic apparatus, thermal conditioning system, and method for manufacturing a device App 20050248739 - Box, Wilhelmus Josephus ;   et al. | 2005-11-10 |
Lithographic apparatus and device manufacturing method App 20050151954 - Bartray, Petrus Rutgerus ;   et al. | 2005-07-14 |
Lithographic apparatus and device manufacturing method App 20050122490 - Luttikhuis, Bernardus Antonius Johannes ;   et al. | 2005-06-09 |
Lithographic apparatus and device manufacturing method App 20050105070 - Bartray, Pertrus Rutgerus ;   et al. | 2005-05-19 |
Lithographic apparatus and integrated circuit manufacturing method App 20050024611 - Bartray, Pertrus Rutgerus ;   et al. | 2005-02-03 |