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Patent applications and USPTO patent grants for Lupan; Michelle.The latest application filed is for "methods for removing black silicon and black silicon carbide from surfaces of silicon and silicon carbide electrodes for plasma processing apparatuses".
Patent | Date |
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Methods for removing black silicon and black silicon carbide from surfaces of silicon and silicon carbide electrodes for plasma processing apparatuses Grant 7,291,286 - Magni , et al. November 6, 2 | 2007-11-06 |
Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing Grant 7,226,869 - Takeshita , et al. June 5, 2 | 2007-06-05 |
Methods for removing black silicon and black silicon carbide from surfaces of silicon and silicon carbide electrodes for plasma processing apparatuses App 20060157448 - Magni; Enrico ;   et al. | 2006-07-20 |
Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing App 20060091104 - Takeshita; Kenji ;   et al. | 2006-05-04 |
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