Luong; Tony
Patent Applications and Registrations
Patent applications and USPTO patent grants for Luong; Tony.The latest application filed is for "air platen for leading edge and trailing edge control".
- Luong; Tony - San Jose CA
| Patent | Date |
|---|---|
| Air platen for leading edge and trailing edge control Grant 7,018,276 - de la Llera , et al. March 28, 2 | 2006-03-28 |
| Method and apparatus for heating polishing pad Grant 6,896,586 - Pham , et al. May 24, 2 | 2005-05-24 |
| Liquid dispense manifold for chemical-mechanical polisher Grant 6,896,600 - Wu , et al. May 24, 2 | 2005-05-24 |
| Air platen for leading edge and trailing edge control App 20040242136 - de la Llera, Anthony ; et al. | 2004-12-02 |
| Method and apparatus for applying downward force on wafer during CMP App 20040161939 - Llera, Anthony de la ; et al. | 2004-08-19 |
| Air platen for leading edge and trailing edge control Grant 6,761,626 - de la Llera , et al. July 13, 2 | 2004-07-13 |
| Method and apparatus for applying downward force on wafer during CMP Grant 6,712,670 - de la Llera , et al. March 30, 2 | 2004-03-30 |
| Belt wiper for a chemical mechanical planarization system Grant 6,666,755 - Taylor , et al. December 23, 2 | 2003-12-23 |
| Method and apparatus for heating polishing pad App 20030186623 - Pham, Xuyen ; et al. | 2003-10-02 |
| Method and apparatus for applying downward force on wafer during CMP App 20030139115 - de la Llera, Anthony ; et al. | 2003-07-24 |
| Air platen for leading edge and trailing edge control App 20030119433 - Llera, Anthony de la ; et al. | 2003-06-26 |
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