Patent | Date |
---|
Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof Grant 9,298,083 - Chang , et al. March 29, 2 | 2016-03-29 |
Method of defining an intensity selective exposure photomask Grant 9,026,957 - Liu , et al. May 5, 2 | 2015-05-05 |
Extreme Ultraviolet Light (euv) Photomasks, And Fabrication Methods Thereof App 20140248555 - CHANG; Ching-Hsu ;   et al. | 2014-09-04 |
Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof Grant 8,764,995 - Chang , et al. July 1, 2 | 2014-07-01 |
Method Of Defining An Intensity Selective Exposure Photomask App 20140170537 - Liu; George ;   et al. | 2014-06-19 |
Method and apparatus for monitoring mask process impact on lithography performance Grant 8,681,326 - Wu , et al. March 25, 2 | 2014-03-25 |
Intensity selective exposure photomask Grant 8,673,520 - Liu , et al. March 18, 2 | 2014-03-18 |
Method And Apparatus For Monitoring Mask Process Impact On Lithography Performance App 20130290912 - Wu; Ping-Chieh ;   et al. | 2013-10-31 |
Target-based thermal design using dummy insertion for semiconductor devices Grant 8,527,918 - Cheng , et al. September 3, 2 | 2013-09-03 |
Method and apparatus for monitoring mask process impact on lithography performance Grant 8,477,299 - Wu , et al. July 2, 2 | 2013-07-02 |
Intensity selective exposure photomask Grant 8,431,291 - Liu , et al. April 30, 2 | 2013-04-30 |
Target-based Dummy Insertion For Semiconductor Devices App 20130061196 - Cheng; Ying-Chou ;   et al. | 2013-03-07 |
Model import for electronic design automation Grant 8,352,888 - Liu , et al. January 8, 2 | 2013-01-08 |
Method of thermal density optimization for device and process enhancement Grant 8,219,951 - Cheng , et al. July 10, 2 | 2012-07-10 |
Model import for electronic design automation Grant 8,214,772 - Liu , et al. July 3, 2 | 2012-07-03 |
Extreme Ultraviolet Light (euv) Photomasks, And Fabrication Methods Thereof App 20120045712 - CHANG; Ching-Hsu ;   et al. | 2012-02-23 |
Intensity Selective Exposure Photomask App 20120040278 - Liu; George ;   et al. | 2012-02-16 |
Method And Apparatus For Monitoring Mask Process Impact On Lithography Performance App 20110243424 - Wu; Ping Chieh ;   et al. | 2011-10-06 |
Model Import For Electronic Design Automation App 20110230998 - Liu; Ru-Gun ;   et al. | 2011-09-22 |
Model Import For Electronic Design Automation App 20110231804 - Liu; Ru-Gun ;   et al. | 2011-09-22 |
Intensity Selective Exposure Photomask App 20110217630 - Liu; George ;   et al. | 2011-09-08 |
Method Of Thermal Density Optimization For Device And Process Enhancement App 20110214101 - Cheng; Ying-Chou ;   et al. | 2011-09-01 |
Model import for electronic design automation Grant 7,954,072 - Liu , et al. May 31, 2 | 2011-05-31 |
Model Import for Electronic Design Automation App 20070265725 - Liu; Ru-Gun ;   et al. | 2007-11-15 |