Lucas NovaSensor
Patent Applications and Registrations
Patent applications and USPTO patent grants for Lucas NovaSensor.The latest application filed is for "single crystal silicon sensor with high aspect ratio and curvilinear structures".
- Lucas NovaSensor - Fremont CA
| Patent | Date |
|---|---|
| Single crystal silicon sensor with high aspect ratio and curvilinear structures Grant 6,316,796 - Petersen , et al. November 13, 2 | 2001-11-13 |
| Single crystal silicon sensor with high aspect ratio and curvilinear structures Grant 6,084,257 - Petersen , et al. July 4, 2 | 2000-07-04 |
| Miniature gauge pressure sensor using silicon fusion bonding and back etching Grant 6,038,928 - Maluf , et al. March 21, 2 | 2000-03-21 |
| Pressure sensor isolated within housing having integral diaphragm and method of making same Grant 5,461,922 - Koen October 31, 1 | 1995-10-31 |
| Method and apparatus for thermally actuated self testing of silicon structures Grant 5,355,712 - Petersen , et al. October 18, 1 | 1994-10-18 |
| Semiconductor sensor with piezoresistors and improved electrostatic structures Grant 5,231,301 - Peterson , et al. July 27, 1 | 1993-07-27 |
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