Lubomirsky; Dimitry
Patent Applications and Registrations
Patent applications and USPTO patent grants for Lubomirsky; Dimitry.The latest application filed is for "chemical control features in wafer process equipment".
- Lubomirsky; Dimitry - Cupertino CA
| Patent | Date |
|---|---|
| Chemical Control Features In Wafer Process Equipment App 20160005572 - Liang; Qiwei ; et al. | 2016-01-07 |
| Method and system for improving dielectric film quality for void free gap fill Grant 7,541,297 - Mallick , et al. June 2, 2 | 2009-06-02 |
| Method And System For Improving Dielectric Film Quality For Void Free Gap Fill App 20090104789 - Mallick; Abhijit Basu ; et al. | 2009-04-23 |
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