Lubashevsky; Yuval

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lubashevsky; Yuval.The latest application filed is for "non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices".

Company Profile

5.7.8

Lubashevsky; Yuval - Haifa IL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices Grant 11,409,205 - Gdor , et al. August 9, 2	2022-08-09
Non-Orthogonal Target and Method for Using the Same in Measuring Misregistration of Semiconductor Devices App 20210364935 - Gdor; Itay ; et al.	2021-11-25
Mitigation of inaccuracies related to grating asymmetries in scatterometry measurements Grant 11,112,704 - Adam , et al. September 7, 2	2021-09-07
Diffraction based overlay scatterometry Grant 10,824,079 - Lubashevsky , et al. November 3, 2	2020-11-03
Process compatibility improvement by fill factor modulation Grant 10,579,768 - Levinski , et al.	2020-03-03
Simultaneous capturing of overlay signals from multiple targets Grant 10,401,228 - Hill , et al. Sep	2019-09-03
Approaches in first order scatterometry overlay based on introduction of auxiliary electromagnetic fields Grant 10,197,389 - Levinski , et al. Fe	2019-02-05
Mitigation of Inaccuracies Related to Grating Asymmetries in Scatterometry Measurements App 20190033726 - Adam; Ido ; et al.	2019-01-31
Diffraction Based Overlay Scatterometry App 20190004439 - LUBASHEVSKY; Yuval ; et al.	2019-01-03
Diffraction Based Overlay Scatterometry App 20180342063 - LUBASHEVSKY; Yuval ; et al.	2018-11-29
Simultaneous Capturing of Overlay Signals From Multiple Targets App 20180335346 - Hill; Andrew V. ; et al.	2018-11-22
Simultaneous capturing of overlay signals from multiple targets Grant 10,048,132 - Hill , et al. August 14, 2	2018-08-14
Process Compatibility Improvement by Fill Factor Modulation App 20180157784 - Levinski; Vladimir ; et al.	2018-06-07
Simultaneous Capturing Of Overlay Signals From Multiple Targets App 20180031424 - Hill; Andrew V. ; et al.	2018-02-01
New Approaches in First Order Scatterometry Overlay Based on Introduction of Auxiliary Electromagnetic Fields App 20170268869 - Levinski; Vladimir ; et al.	2017-09-21

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