loadpatents
Patent applications and USPTO patent grants for Lu; Zhong-Hao.The latest application filed is for "heating apparatus with controlled thermal contact".
Patent | Date |
---|---|
Multi-zone variable power density heater apparatus containing and methods of using the same Grant 10,934,633 - Lu , et al. March 2, 2 | 2021-03-02 |
One-coat encapsulated graphite heater and process Grant 10,687,393 - Lu , et al. | 2020-06-16 |
Cylindrical heater Grant 10,237,921 - Lu | 2019-03-19 |
Heating Apparatus With Controlled Thermal Contact App 20180096867 - Lu; Zhong-Hao | 2018-04-05 |
Cylindrical Heater App 20170273145 - Lu; Zhong-Hao | 2017-09-21 |
One-coat Encapsulated Graphite Heater And Process App 20170127476 - Lu; Zhong-Hao ;   et al. | 2017-05-04 |
Multi-zone Variable Power Density Heater Apparatus Containing And Methods Of Using The Same App 20170022630 - Lu; Zhong-Hao ;   et al. | 2017-01-26 |
Coated Graphite Heater Configuration App 20160174302 - LU; Zhong-Hao | 2016-06-16 |
Resistance heater Grant 8,993,939 - Morikawa , et al. March 31, 2 | 2015-03-31 |
Large volume evaporation source Grant 8,512,806 - Mariner , et al. August 20, 2 | 2013-08-20 |
Resistance Heater App 20120223069 - Morikawa; Yuji ;   et al. | 2012-09-06 |
Electrode pattern for resistance heating element and wafer processing apparatus Grant 8,168,050 - Lu May 1, 2 | 2012-05-01 |
Large volume evaporation source App 20100040780 - Mariner; John ;   et al. | 2010-02-18 |
Electrode Pattern For Resistance Heating Element and Wafer processing Apparatus App 20080029195 - Lu; Zhong-Hao | 2008-02-07 |
Fast heating and cooling wafer handling assembly and method of manufacturing thereof App 20060127067 - Wintenberger; Eric ;   et al. | 2006-06-15 |
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