Lu; William M.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Lu; William M..The latest application filed is for "pre-conditioned chamber components".
- Lu; William M. - Sunnyvale CA
| Patent | Date |
|---|---|
| Pre-conditioned chamber components Grant 11,072,852 - West , et al. July 27, 2 | 2021-07-27 |
| Pre-conditioned Chamber Components App 20200024725 - WEST; Brian T. ; et al. | 2020-01-23 |
| Protection Of Aluminum Process Chamber Components App 20200013589 - BALARAMAN; Karthikeyan ; et al. | 2020-01-09 |
| Pre-coated Shield Using In Vhf-rf Pvd Chambers App 20170145553 - LIU; Zhendong ; et al. | 2017-05-25 |
| Electrostatic chuck AlN dielectric repair Grant 9,001,489 - Boyd, Jr. , et al. April 7, 2 | 2015-04-07 |
| Electrostatic Chuck Aln Dielectric Repair App 20120307412 - Boyd, JR.; Wendell G. ; et al. | 2012-12-06 |
| Method And Apparatus For Refurbishing Gas Distribution Plate Surfaces App 20120255635 - BANDA; Sumanth ; et al. | 2012-10-11 |
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