Lu; Ming-Hui
Patent Applications and Registrations
Patent applications and USPTO patent grants for Lu; Ming-Hui.The latest application filed is for "method of selectively removing tungsten over silicon oxide".
- Lu; Ming-Hui - Taipei TW
- Lu; Ming-Hui - Taipei City TW
- Lu; Ming Hui - Taoyuan TW
- LU; MING HUI - Taoyuan City TW
- Lu; Ming Hui - Zhongli TW
- Lu; Ming Hui - Zhongli City TW
| Patent | Date |
|---|---|
| Method of selectively removing tungsten over silicon oxide Grant 10,501,660 - Ho , et al. Dec | 2019-12-10 |
| Method Of Selectively Removing Tungsten Over Silicon Oxide App 20190203073 - Ho; Yun-Lung ; et al. | 2019-07-04 |
| Slurry Composition, Use Thereof, And Polishing Method App 20170253766 - Ho; Yun-Lung ; et al. | 2017-09-07 |
| Chemical mechanical polishing slurry Grant 9,718,991 - Yang , et al. August 1, 2 | 2017-08-01 |
| Chemical Mechanical Polishing Slurry App 20160347971 - YANG; YI HAN ; et al. | 2016-12-01 |
| Polishing composition Grant 9,493,678 - Ho , et al. November 15, 2 | 2016-11-15 |
| Polishing Composition App 20160208141 - Ho; Yun Lung ; et al. | 2016-07-21 |
| Cleaning composition and cleaning method using the same Grant 9,165,760 - Fu , et al. October 20, 2 | 2015-10-20 |
| Polishing slurry composition Grant 9,039,925 - Chen , et al. May 26, 2 | 2015-05-26 |
| Slurry composition and method of fabricating damascene structure using the same Grant 8,901,001 - Chang , et al. December 2, 2 | 2014-12-02 |
| Silica having metal ions absorbed thereon and fabricating method thereof Grant 8,747,693 - Ho , et al. June 10, 2 | 2014-06-10 |
| Cleaning Composition And Cleaning Method Using The Same App 20140107008 - Fu; Yu-Chi ; et al. | 2014-04-17 |
| Polishing composition for planarizing metal layer Grant 8,641,920 - Chang , et al. February 4, 2 | 2014-02-04 |
| Polishing Slurry Composition App 20130264515 - Chen; Wei-Jung ; et al. | 2013-10-10 |
| Silica Having Metal Ions Absorbed Thereon And Fabricating Method Thereof App 20130068995 - Ho; Yun-Lung ; et al. | 2013-03-21 |
| Cleaning Composition App 20110160112 - Chang; Song-Yuan ; et al. | 2011-06-30 |
| Slurry Composition And Method Of Fabricating Damascene Structure Using The Same App 20100255681 - Chang; Song-Yuan ; et al. | 2010-10-07 |
| Chemical Mechanical Polishing Composition App 20100193728 - CHANG; Song-Yuan ; et al. | 2010-08-05 |
| Acidic post-CMP cleaning composition Grant 7,763,577 - Chang , et al. July 27, 2 | 2010-07-27 |
| Polishing Composition for Planarizing Metal Layer App 20100163784 - CHANG; Song-Yuan ; et al. | 2010-07-01 |
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