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Patent applications and USPTO patent grants for Lu; Li-Chih.The latest application filed is for "blank mask and fabrication method thereof, and method of fabricating photomask".
Patent | Date |
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Method and system for processing substrate by chemical solution in semiconductor manufacturing fabrication Grant 10,508,953 - Yang , et al. Dec | 2019-12-17 |
Mask blank and fabrication method thereof, and method of fabricating photomask Grant 10,459,332 - Chang , et al. Oc | 2019-10-29 |
Blank Mask And Fabrication Method Thereof, And Method Of Fabricating Photomask App 20180284601 - Chang; Hao-Ming ;   et al. | 2018-10-04 |
Method And System For Processing Substrate By Chemical Solution In Semiconductor Manufacturing Fabrication App 20180161828 - YANG; Min-An ;   et al. | 2018-06-14 |
Data file editing device for computer systems Grant 7,467,156 - Lu December 16, 2 | 2008-12-16 |
Data file editing device for computer systems App 20070016623 - Lu; Li-Chih | 2007-01-18 |
Production planning system Grant 7,039,479 - Lu May 2, 2 | 2006-05-02 |
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