Lu; Danny Chien
Patent Applications and Registrations
Patent applications and USPTO patent grants for Lu; Danny Chien.The latest application filed is for "method of non-destructive post tungsten etch residue removal".
- Lu; Danny Chien - Gilroy CA
- Lu, Danny Chien - Milpitas CA
- Lu; Danny Chien - San Jose CA
| Patent | Date |
|---|---|
| Methods of non-destructive post tungsten etch residue removal Grant 10,217,627 - Lu , et al. Feb | 2019-02-26 |
| Method Of Non-destructive Post Tungsten Etch Residue Removal App 20150096589 - LU; Danny Chien ; et al. | 2015-04-09 |
| Infrared Endpoint Detection For Photoresist Strip Processes App 20100190098 - WALKER; QUENTIN E. ; et al. | 2010-07-29 |
| Cleaning ceramic surfaces App 20030190870 - Shih, Hong ; et al. | 2003-10-09 |
| Method of cleaning a semiconductor device processing chamber after a copper etch process Grant 6,352,081 - Lu , et al. March 5, 2 | 2002-03-05 |
| Method and apparatus for cleaning by-products from plasma chamber surfaces Grant 5,756,400 - Ye , et al. May 26, 1 | 1998-05-26 |
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