Lowisch; Martin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lowisch; Martin.The latest application filed is for "method and lithography device with a mask reflecting light".

Company Profile

0.6.6

Lowisch; Martin - Oberkochen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and lithography device with a mask reflecting light Grant 8,268,518 - Mann , et al. September 18, 2	2012-09-18
Method and Lithography Device with a Mask Reflecting Light App 20110229827 - MANN; Hans-Jurgen ; et al.	2011-09-22
Masks, lithography device and semiconductor component Grant 7,914,955 - Mann , et al. March 29, 2	2011-03-29
Masks, Lithography Device And Semiconductor Component App 20090268189 - MANN; Hans-Juergen ; et al.	2009-10-29
Groupwise corrected objective Grant 7,576,934 - Schottner , et al. August 18, 2	2009-08-18
Masks, lithography device and semiconductor component Grant 7,572,556 - Mann , et al. August 11, 2	2009-08-11
Projection objective Grant 7,557,902 - Dinger , et al. July 7, 2	2009-07-07
Groupwise corrected objective App 20070195317 - Schottner; Michael ; et al.	2007-08-23
Masks, lithography device and semiconductor component App 20070082272 - Mann; Hans-Jurgen ; et al.	2007-04-12
Euv projection lens with mirrors made from material with differing signs for the rise in temperature dependence of the thermal expansion coefficient around the zero transition temperature App 20070035814 - Dinger; Udo ; et al.	2007-02-15
Device manufacturing method and computer program Grant 7,042,550 - Lowisch , et al. May 9, 2	2006-05-09
Device manufacturing method and computer program App 20040137677 - Lowisch, Martin ; et al.	2004-07-15

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