Lowe-Webb; Roger R.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lowe-Webb; Roger R..The latest application filed is for "local process variation correction for overlay measurement".

Company Profile

0.13.0

Lowe-Webb; Roger R. - Sunnyvale CA
Lowe-Webb; Roger R. - Mountain View CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Local process variation correction for overlay measurement Grant 7,508,976 - Yang , et al. March 24, 2	2009-03-24
Spectrometer measurement of diffracting structures Grant 7,372,565 - Holden , et al. May 13, 2	2008-05-13
Alignment target to be measured with multiple polarization states Grant 7,236,244 - Yang , et al. June 26, 2	2007-06-26
Alignment target with designed in offset Grant 7,230,705 - Yang , et al. June 12, 2	2007-06-12
Apparatus and method for the measurement of diffracting structures Grant 7,115,858 - Holden , et al. October 3, 2	2006-10-03
Spectroscopically measured overlay target Grant 7,061,615 - Lowe-Webb June 13, 2	2006-06-13
Positioning two elements using an alignment target with a designed offset Grant 7,046,361 - Yang , et al. May 16, 2	2006-05-16
Measuring an alignment target with a single polarization state Grant 6,992,764 - Yang , et al. January 31, 2	2006-01-31
Method and apparatus for using an alignment target with designed in offset Grant 6,982,793 - Yang , et al. January 3, 2	2006-01-03
Encoder measurement based on layer thickness Grant 6,970,255 - Spady , et al. November 29, 2	2005-11-29
Encoder with an alignment target Grant 6,958,819 - Heaton , et al. October 25, 2	2005-10-25
Measuring an alignment target with multiple polarization states Grant 6,949,462 - Yang , et al. September 27, 2	2005-09-27
Correcting the system polarization sensitivity of a metrology tool having a rotatable polarizer Grant 6,522,406 - Rovira , et al. February 18, 2	2003-02-18

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