loadpatents
Patent applications and USPTO patent grants for Loschner; Hans.The latest application filed is for "multi-beam tool for cutting patterns".
Patent | Date |
---|---|
Multi-beam tool for cutting patterns Grant 9,443,699 - Platzgummer , et al. September 13, 2 | 2016-09-13 |
Multi-Beam Tool for Cutting Patterns App 20150311030 - Platzgummer; Elmar ;   et al. | 2015-10-29 |
Multi-Beam Tool for Cutting Patterns App 20150311031 - Platzgummer; Elmar ;   et al. | 2015-10-29 |
Multi-beam deflector array device for maskless particle-beam processing Grant 7,687,783 - Platzgummer , et al. March 30, 2 | 2010-03-30 |
Multi-beam Deflector Array Device For Maskless Particle-beam Processing App 20080203317 - Platzgummer; Elmar ;   et al. | 2008-08-28 |
Charged-particle multi-beam exposure apparatus Grant 7,214,951 - Stengl , et al. May 8, 2 | 2007-05-08 |
Method of synthesising carbon nano tubes Grant 7,033,647 - Tang , et al. April 25, 2 | 2006-04-25 |
Method Of Synthesising Carbon Nano Tubes App 20060068096 - Tang; Xinhe ;   et al. | 2006-03-30 |
Particle multibeam lithography Grant 6,989,546 - Loschner , et al. January 24, 2 | 2006-01-24 |
Charged-particle multi-beam exposure apparatus App 20050104013 - Stengl, Gerhard ;   et al. | 2005-05-19 |
Apparatus for enhancing the lifetime of stencil masks Grant 6,858,118 - Platzgummer , et al. February 22, 2 | 2005-02-22 |
Large-area membrane mask and method for fabricating the mask Grant 6,835,508 - Butschke , et al. December 28, 2 | 2004-12-28 |
Apparatus for enhancing the lifetime of stencil masks App 20040188243 - Platzgummer, Elmar ;   et al. | 2004-09-30 |
Method for producing a superconducting circuit App 20030236169 - Lang, Wolfgang ;   et al. | 2003-12-25 |
Pattern lock system Grant 6,661,015 - Chalupka , et al. December 9, 2 | 2003-12-09 |
Particle Multibeam Lithography App 20030209676 - LOSCHNER, HANS ;   et al. | 2003-11-13 |
Field ionization ion source App 20030122085 - Stengl, Gerhard ;   et al. | 2003-07-03 |
Large-area membrane mask and method for fabricating the mask App 20030031939 - Butschke, Jorg ;   et al. | 2003-02-13 |
Pattern lock system App 20020033457 - Chalupka, Alfred ;   et al. | 2002-03-21 |
Lithographic imaging of a structure pattern onto one or more fields on a substrate App 20010036588 - Buschbeck, Herbert ;   et al. | 2001-11-01 |
Process for producing a carbon film on a substrate Grant 6,136,160 - Hrkut , et al. October 24, 2 | 2000-10-24 |
Process for producing a structured mask Grant 5,876,880 - Vonach , et al. March 2, 1 | 1999-03-02 |
Silicon membrane and method of making same Grant 5,672,449 - Loschner , et al. September 30, 1 | 1997-09-30 |
Method and apparatus for image alignment in ion lithography Grant 4,967,088 - Stengl , et al. October 30, 1 | 1990-10-30 |
Ion beam apparatus and method of modifying substrate Grant 4,924,104 - Stengl , et al. May 8, 1 | 1990-05-08 |
Arrangement for stabilizing an irradiated mask Grant 4,916,322 - Glavish , et al. April 10, 1 | 1990-04-10 |
Particle or radiation beam mask and process for making same Grant 4,891,547 - Stengl , et al. January 2, 1 | 1990-01-02 |
Ion-projection apparatus Grant 4,835,392 - Loschner , et al. May 30, 1 | 1989-05-30 |
Ion-projection lithographic apparatus with means for aligning the mask image with the substrate Grant 4,823,011 - Stengl , et al. April 18, 1 | 1989-04-18 |
Process for making a transmission mask Grant 4,780,382 - Stengl , et al. October 25, 1 | 1988-10-25 |
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