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Patent applications and USPTO patent grants for Lorusso; Gian Francesco.The latest application filed is for "detection of contamination in euv systems".
Patent | Date |
---|---|
Detection Of Contamination In Euv Systems App 20120099092 - Jonckheere; Rik ;   et al. | 2012-04-26 |
Methods and Systems for Evaluating Extreme Ultraviolet Mask Flatness App 20120075604 - Lorusso; Gian Francesco ;   et al. | 2012-03-29 |
Systems and methods for UV lithography Grant 8,006,202 - Lorusso , et al. August 23, 2 | 2011-08-23 |
Method and system for measuring contamination of a lithographical element Grant 7,750,319 - Lorusso , et al. July 6, 2 | 2010-07-06 |
Detection Of Contamination In Euv Systems App 20090103069 - Jonckheere; Rik ;   et al. | 2009-04-23 |
Method And System For Measuring Contamination Of A Lithographical Element App 20080315125 - Lorusso; Gian Francesco ;   et al. | 2008-12-25 |
Systems And Methods For Uv Lithography App 20080229273 - Lorusso; Gian Francesco ;   et al. | 2008-09-18 |
Automated feature analysis with off-axis tilting Grant 7,423,269 - Azordegan , et al. September 9, 2 | 2008-09-09 |
Method and apparatus for aberration-insensitive electron beam imaging Grant 7,405,402 - Vedula , et al. July 29, 2 | 2008-07-29 |
Method and system for e-beam scanning Grant 7,276,690 - Lorusso , et al. October 2, 2 | 2007-10-02 |
Method and apparatus for accurate e-beam metrology Grant 7,098,456 - Lorusso , et al. August 29, 2 | 2006-08-29 |
Automated focusing of electron image Grant 7,041,976 - Neil , et al. May 9, 2 | 2006-05-09 |
Methods of stabilizing measurement of ArF resist in CD-SEM Grant 7,015,468 - Azordegan , et al. March 21, 2 | 2006-03-21 |
SEM profile and surface reconstruction using multiple data sets Grant 6,930,308 - Lorusso , et al. August 16, 2 | 2005-08-16 |
Method and system for e-beam scanning Grant 6,815,675 - Lorusso , et al. November 9, 2 | 2004-11-09 |
Energy filter multiplexing Grant 6,784,425 - Lorusso , et al. August 31, 2 | 2004-08-31 |
Undercut Measurement Using Sem App 20040000638 - Lorusso, Gian Francesco ;   et al. | 2004-01-01 |
Undercut measurement using SEM Grant 6,670,612 - Lorusso , et al. December 30, 2 | 2003-12-30 |
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