| Patent | Date |
|---|
Material Deposition Apparatus Having At Least One Heating Assembly And Method For Pre- And/or Post-heating A Substrate
App 20220056575 - LOPP; Andreas ; et al. | 2022-02-24 |
Evaporation Source, Vapor Deposition Apparatus, And Method For Coating A Substrate In A Vacuum Chamber
App 20220033958 - DEPPISCH; Thomas ; et al. | 2022-02-03 |
Temperature-controlled Shield, Material Deposition Apparatus And Method For Depositing A Material Onto A Substrate
App 20210381102 - LOPP; Andreas ; et al. | 2021-12-09 |
Vapor Deposition Apparatus And Method For Coating A Substrate In A Vacuum Chamber
App 20210381095 - BANGERT; Stefan ; et al. | 2021-12-09 |
Methods of operating a deposition apparatus, and deposition apparatus
Grant 10,483,465 - Dieguez-Campo , et al. Nov | 2019-11-19 |
Mask Arrangement For Masking A Substrate In A Processing Chamber, Apparatus For Depositing A Layer On A Substrate, And Method Fo
App 20190301002 - BANGERT; Stefan ; et al. | 2019-10-03 |
Nozzle For A Distribution Assembly Of A Material Deposition Source Arrangement, Material Deposition Source Arrangement, Vacuum D
App 20190226090 - LOPP; Andreas ; et al. | 2019-07-25 |
Methods Of Operating A Deposition Apparatus, And Deposition Apparatus
App 20190148642 - DIEGUEZ-CAMPO; Jose Manuel ; et al. | 2019-05-16 |
Measurement Assembly For Measuring A Deposition Rate And Method Therefore
App 20180187302 - DIEGUEZ-CAMPO; Jose Manuel ; et al. | 2018-07-05 |
Mask Arrangement For Masking A Substrate In A Processing Chamber
App 20170342541 - BANGERT; Stefan ; et al. | 2017-11-30 |
Material Deposition Arrangement, A Vacuum Deposition System And Method For Depositing Material
App 20170314120 - GEBELE; Thomas ; et al. | 2017-11-02 |
Evaporation Source For Organic Material
App 20170092899 - BANGERT; Stefan ; et al. | 2017-03-30 |
Evaporation Source For Organic Material
App 20170081755 - DIEGUEZ-CAMPO; Jose Manuel ; et al. | 2017-03-23 |
Mini Rotatable Sputter Devices For Sputter Deposition
App 20160189939 - DEPPISCH; Thomas ; et al. | 2016-06-30 |
Actively-aligned Fine Metal Mask
App 20160043319 - WHITE; John M. ; et al. | 2016-02-11 |
Method For Coating A Substrate And Coater
App 20150214018 - Scheer; Evelyn ; et al. | 2015-07-30 |
Magnet arrangement for a target backing tube, target backing tube including the same, cylindrical target assembly and sputtering system
Grant 9,005,414 - Lopp , et al. April 14, 2 | 2015-04-14 |
Adjustable Mask
App 20150004312 - Scheer; Evelyn ; et al. | 2015-01-01 |
Multidirectional Racetrack Rotary Cathode For Pvd Array Applications
App 20140332369 - Scheer; Evelyn ; et al. | 2014-11-13 |
Dynamic load lock with cellular structure for discrete substrates
Grant 8,869,967 - Buschbeck , et al. October 28, 2 | 2014-10-28 |
Systems And Methods For Forming A Layer Of Sputtered Material
App 20130284590 - Bender; Marcus ; et al. | 2013-10-31 |
Dynamic Load Lock With Cellular Structure For Discrete Substrates
App 20130199891 - BUSCHBECK; Wolfgang ; et al. | 2013-08-08 |
Advanced Platform For Passivating Crystalline Silicon Solar Cells
App 20130171757 - PONNEKANTI; HARI K. ; et al. | 2013-07-04 |
Evaporation System And Method
App 20120107504 - MAURER; Philipp ; et al. | 2012-05-03 |
Coater with a large-area assembly of rotatable magnetrons
Grant 8,137,510 - Bangert , et al. March 20, 2 | 2012-03-20 |
Magnet Arrangement For A Target Backing Tube, Target Backing Tube Including The Same, Cylindrical Target Assembly And Sputtering System
App 20120012458 - LOPP; Andreas ; et al. | 2012-01-19 |
Sputter Deposition System And Method
App 20110100799 - Lopp; Andreas ; et al. | 2011-05-05 |
Reactive Gas Distributor, Reactive Gas Treatment System, And Reactive Gas Treatment Method
App 20100025370 - Dieguez-Campo; Manuel ; et al. | 2010-02-04 |
Method for operating a sputter cathode with a target
Grant 7,575,662 - Bangert , et al. August 18, 2 | 2009-08-18 |
Sputter Coating Device
App 20090178919 - Lopp; Andreas ; et al. | 2009-07-16 |
Magnet arrangement for a planar magnetron
Grant 7,531,071 - Deppisch , et al. May 12, 2 | 2009-05-12 |
Sputter Coating Device And Coating Method
App 20090114528 - Lindenberg; Ralph ; et al. | 2009-05-07 |
Flooding Chamber For Coating Installations
App 20080223294 - Gebele; Thomas ; et al. | 2008-09-18 |
Sputtering Magnetron
App 20080190765 - Lopp; Andreas ; et al. | 2008-08-14 |
Magnet arrangement for a planar magnetron background and summary of the invention
App 20080067062 - Deppisch; Thomas ; et al. | 2008-03-20 |
Method for operating a sputter cathode with a target
App 20060254905 - Bangert; Stefan ; et al. | 2006-11-16 |
Magnet arrangement for a planar magnetron
App 20060219550 - Deppisch; Thomas ; et al. | 2006-10-05 |
Coater with a large-area assembly of rotatable magnetrons
App 20050252768 - Bangert, Stefan ; et al. | 2005-11-17 |
Sputter arrangement with a magnetron and a target
App 20050178660 - Lopp, Andreas ; et al. | 2005-08-18 |
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