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System and method for using a two part cover and a box for protecting a reticle Grant 8,446,570 - Del Puerto , et al. May 21, 2 | 2013-05-21 |
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System and Method for Using a Two Part Cover and a Box for Protecting a Reticle App 20110001955 - Puerto; Santiago del ;   et al. | 2011-01-06 |
System and method for using a two part cover and a box for protecting a reticle Grant 7,830,497 - del Puerto , et al. November 9, 2 | 2010-11-09 |
System and method for using a two part cover and a box for protecting a reticle App 20070258061 - Puerto; Santiago del ;   et al. | 2007-11-08 |
System for using a two part cover for and a box for protecting a reticle Grant 7,209,220 - Puerto , et al. April 24, 2 | 2007-04-24 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20060219931 - Van Der Werf; Jan E. ;   et al. | 2006-10-05 |
System and method for using a two part cover for and a box for protecting a reticle App 20060087639 - Puerto; Santiago del ;   et al. | 2006-04-27 |
Off-axis leveling in lithographic projection apparatus Grant 7,019,815 - Jasper , et al. March 28, 2 | 2006-03-28 |
Gas flushing system with recovery system for use in lithographic apparatus Grant 6,987,278 - Loopstra January 17, 2 | 2006-01-17 |
Off-axis levelling in lithographic projection apparatus App 20050157281 - Jasper, Johannes C.M. ;   et al. | 2005-07-21 |
System for using a two part cover for protecting a reticle Grant 6,906,783 - del Puerto , et al. June 14, 2 | 2005-06-14 |
Position measuring system for use in lithographic apparatus Grant 6,894,261 - Castenmiller , et al. May 17, 2 | 2005-05-17 |
Off-axis levelling in lithographic projection apparatus App 20050088638 - Jasper, Johannes C.M. ;   et al. | 2005-04-28 |
Displacement device Grant 6,879,063 - Frissen , et al. April 12, 2 | 2005-04-12 |
Position measuring device, position measuring system, lithographic apparatus, and device manufacturing method Grant 6,875,992 - Castenmiller , et al. April 5, 2 | 2005-04-05 |
Position measuring device, position measuring system, lithographic apparatus, and device manufacturing method App 20040211921 - Castenmiller, Thomas J.M. ;   et al. | 2004-10-28 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20040190677 - Van Der Werf, Jan E. ;   et al. | 2004-09-30 |
Abbe arm calibration system for use in lithographic apparatus App 20040184018 - Groeneveld, Rogier H.M. ;   et al. | 2004-09-23 |
Actuator and transducer Grant 6,791,443 - Loopstra September 14, 2 | 2004-09-14 |
Lithographic projection apparatus with positioning system for use with reflectors Grant 6,765,218 - Loopstra , et al. July 20, 2 | 2004-07-20 |
Actuator and transducer App 20040095217 - Loopstra, Erik R. | 2004-05-20 |
Abbe arm calibration system for use in lithographic apparatus Grant 6,730,920 - Groeneveld , et al. May 4, 2 | 2004-05-04 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,721,389 - Van Der Werf , et al. April 13, 2 | 2004-04-13 |
Actuator and transducer Grant 6,710,353 - Loopstra March 23, 2 | 2004-03-23 |
Off-axis levelling in lithographic projection apparatus Grant 6,674,510 - Jasper , et al. January 6, 2 | 2004-01-06 |
System and method for using a two part cover for protecting a reticle App 20030227605 - del Puerto, Santiago ;   et al. | 2003-12-11 |
System and method for using a two part cover for protecting a reticle App 20030218728 - del Puerto, Santiago ;   et al. | 2003-11-27 |
Lithographic projection apparatus with positioning system for use with reflectors App 20030168615 - Loopstra, Erik R. ;   et al. | 2003-09-11 |
Displacement device App 20030155821 - Frissen, Petrus C.M. ;   et al. | 2003-08-21 |
Gas flushing system with recovery system for use in lithographic apparatus App 20030146396 - Loopstra, Erik R. | 2003-08-07 |
Lithographic projection apparatus with positioning system for use with reflectors Grant 6,593,585 - Loopstra , et al. July 15, 2 | 2003-07-15 |
Gas flushing system for use in lithographic apparatus Grant 6,555,834 - Loopstra April 29, 2 | 2003-04-29 |
Purge gas systems for use in lithographic projection apparatus Grant 6,542,220 - Schrijver , et al. April 1, 2 | 2003-04-01 |
Displacement device Grant 6,531,793 - Frissen , et al. March 11, 2 | 2003-03-11 |
Lithographic projection apparatus having a temperature controlled heat shield Grant 6,509,951 - Loopstra , et al. January 21, 2 | 2003-01-21 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20020037461 - Van Der Werf, Jan E. ;   et al. | 2002-03-28 |
Lithographic projection apparatus having a temperature controlled heat shield App 20010013925 - Loopstra, Erik R. ;   et al. | 2001-08-16 |
Position detection system for use in lithographic apparatus App 20010011712 - Castenmiller, Thomas J.M. ;   et al. | 2001-08-09 |
Abbe arm calibration system for use in lithographic apparatus App 20010008273 - Groeneveld, Rogier H.M. ;   et al. | 2001-07-19 |
Positioning device having two object holders Grant 6,262,796 - Loopstra , et al. July 17, 2 | 2001-07-17 |
Method and apparatus for repetitively projecting a mask pattern on a substrate, using a time-saving height measurement Grant 6,208,407 - Loopstra March 27, 2 | 2001-03-27 |
Positioning device having three coil systems mutually enclosing angles of 120.degree. and lithographic device comprising such a positioning device Grant 6,054,784 - Sperling , et al. April 25, 2 | 2000-04-25 |
Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device Grant 5,969,441 - Loopstra , et al. October 19, 1 | 1999-10-19 |