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Patent applications and USPTO patent grants for Loo; David H..The latest application filed is for "in situ plasma clean for removal of residue from pedestal surface without breaking vacuum".
Patent | Date |
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In situ plasma clean for removal of residue from pedestal surface without breaking vacuum Grant 9,818,585 - Green , et al. November 14, 2 | 2017-11-14 |
In Situ Plasma Clean For Removal Of Residue From Pedestal Surface Without Breaking Vacuum App 20140366912 - GREEN; Richard J. ;   et al. | 2014-12-18 |
In situ plasma clean for removal of residue from pedestal surface without breaking vacuum Grant 8,900,471 - Green , et al. December 2, 2 | 2014-12-02 |
In Situ Plasma Clean For Removal Of Residue From Pedestal Surface Without Breaking Vacuum App 20100218785 - Green; Richard J. ;   et al. | 2010-09-02 |
Method and apparatus for optimizing a dechucking period used to dechuck a workpiece from an electrostatic chuck Grant 5,818,682 - Loo October 6, 1 | 1998-10-06 |
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