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Patent applications and USPTO patent grants for Lombardo; Brian S..The latest application filed is for "windowless belt and method for improved in-situ wafer monitoring".
Patent | Date |
---|---|
Unsupported chemical mechanical polishing belt Grant 6,656,030 - Xu , et al. December 2, 2 | 2003-12-02 |
Windowless Belt And Method For Improved In-situ Wafer Monitoring App 20020090819 - XU, CANGSHAN ;   et al. | 2002-07-11 |
Unsupported chemical mechanical polishing belt Grant 6,406,363 - Xu , et al. June 18, 2 | 2002-06-18 |
Unsupported chemical mechanical polishing belt App 20020068513 - Xu, Cangshan ;   et al. | 2002-06-06 |
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