Lokai; Peter

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lokai; Peter.The latest application filed is for "absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp".

Company Profile

0.12.8

Lokai; Peter - Goettingen DE
Lokai; Peter - Bovenden DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp Grant 7,006,541 - Lokai , et al. February 28, 2	2006-02-28
Resonator arrangement for bandwidth control Grant 6,856,638 - Aab , et al. February 15, 2	2005-02-15
On-line quality control of the key optical components in lithography lasers using laser induced fluorescence Grant 6,839,375 - Lokai , et al. January 4, 2	2005-01-04
Method and apparatus for reduction of spectral fluctuations Grant 6,792,023 - Kleinschmidt , et al. September 14, 2	2004-09-14
Wavelength and bandwidth monitor for excimer or molecular fluorine laser Grant 6,717,973 - Basting , et al. April 6, 2	2004-04-06
Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp App 20030210715 - Lokai, Peter ; et al.	2003-11-13
High-resolution confocal Fabry-Perot interferometer for absolute spectral parameter detection of excimer laser used in lithography applications App 20030161374 - Lokai, Peter	2003-08-28
Method and apparatus for wavelength calibration Grant 6,608,848 - Kleinschmidt , et al. August 19, 2	2003-08-19
Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp Grant 6,580,517 - Lokai , et al. June 17, 2	2003-06-17
Narrow band excimer or molecular fluorine laser having an output coupling interferometer App 20020141474 - Kleinschmidt, Juergen ; et al.	2002-10-03
Resonator arrangement for bandwidth control App 20020141471 - Aab, Konstantin ; et al.	2002-10-03
Narrow band excimer or molecular fluorine laser having an output coupling interferometer App 20020122452 - Kleinschmidt, Juergen ; et al.	2002-09-05
Wavelength and bandwidth monitor for excimer or molecular fluorine laser App 20020018505 - Basting, Dirk ; et al.	2002-02-14
Method and apparatus for wavelength calibration App 20020012368 - Kleinschmidt, Jurgen ; et al.	2002-01-31
Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp App 20020003817 - Lokai, Peter ; et al.	2002-01-10
Production of narrow-band coherent radiation by using at least one optical parametric oscillator Grant 5,896,220 - Stamm , et al. April 20, 1	1999-04-20
Tunable source of narrowband coherent radiation Grant 5,671,241 - Stamm , et al. September 23, 1	1997-09-23
Tunable, optical parametric oscillator Grant 5,661,595 - Stamm , et al. August 26, 1	1997-08-26
Tunable narrowband optical parametrical oscillator Grant 5,659,419 - Lokai , et al. August 19, 1	1997-08-19
Method and apparatus for stabilizing the frequency of a laser beam Grant 4,905,243 - Lokai , et al. February 27, 1	1990-02-27

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