LOIDL; Bernhard
Patent Applications and Registrations
Patent applications and USPTO patent grants for LOIDL; Bernhard.The latest application filed is for "vapor delivery head for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structures".
- LOIDL; Bernhard - Villach AT
- Loidl, Bernhard - Graz AT
| Patent | Date |
|---|---|
| Vapor Delivery Head For Preventing Stiction Of High Aspect Ratio Structures And/or Repairing High Aspect Ratio Structures App 20210366738 - BANDARAPU; Bhaskar ; et al. | 2021-11-25 |
| Spin Chuck Including Edge Ring App 20180096879 - Kon; Shih-Chung ; et al. | 2018-04-05 |
| Apparatus For Processing Wafer-shaped Articles App 20180040502 - KON; Shih-Chung ; et al. | 2018-02-08 |
| Method and apparatus for processing wafer-shaped articles Grant 9,887,122 - Si , et al. February 6, 2 | 2018-02-06 |
| Method And Apparatus For Processing Wafer-shaped Articles App 20170323823 - SI; Hongbo ; et al. | 2017-11-09 |
| Spin Chuck With Gas Leakage Prevention App 20170162426 - GLEISSNER; Andreas ; et al. | 2017-06-08 |
| Electrochemical method for the production of organofunctional silanes App 20050234255 - Kammel, Thomas ; et al. | 2005-10-20 |
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