Lohokare; Shrikant P.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lohokare; Shrikant P..The latest application filed is for "system and method for stress free conductor removal".

Company Profile

0.10.9

Lohokare; Shrikant P. - Fremont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
System, method and apparatus for self-cleaning dry etch Grant 8,211,238 - Bailey, III , et al. July 3, 2	2012-07-03
Method for stress free conductor removal Grant 8,017,516 - Bailey, III , et al. September 13, 2	2011-09-13
Methods and arrangement for the reduction of byproduct deposition in a plasma processing system Grant 7,959,984 - Lohokare , et al. June 14, 2	2011-06-14
Method for adjusting voltage on a powered Faraday shield Grant 7,413,673 - Lohokare , et al. August 19, 2	2008-08-19
System and method for stress free conductor removal App 20070190771 - Bailey; Andrew D. III ; et al.	2007-08-16
System and method for surface reduction, passivation, corrosion prevention and activation of copper surface Grant 7,232,766 - Bailey, III , et al. June 19, 2	2007-06-19
System and method for stress free conductor removal Grant 7,217,649 - Bailey, III , et al. May 15, 2	2007-05-15
System, method and apparatus for self-cleaning dry etch Grant 7,140,374 - Bailey, III , et al. November 28, 2	2006-11-28
Methods and systems for a stress-free cleaning a surface of a substrate Grant 7,129,167 - Bailey, III , et al. October 31, 2	2006-10-31
System, method and apparatus for self-cleaning dry etch App 20060219267 - Bailey; Andrew D. III ; et al.	2006-10-05
Methods and arrangement for the reduction of byproduct deposition in a plasma processing system App 20060130758 - Lohokare; Shrikant P. ; et al.	2006-06-22
Method for adjusting voltage on a powered faraday shield App 20050194355 - Lohokare, Shrikant P. ; et al.	2005-09-08
System, method and apparatus for improved global dual-damascene planarization Grant 6,939,796 - Lohokare , et al. September 6, 2	2005-09-06
System and method for stress free conductor removal App 20050106848 - Bailey, Andrew D. III ; et al.	2005-05-19
System, method and apparatus for self-cleaning dry etch App 20050093012 - Bailey, Andrew D. III ; et al.	2005-05-05
System and method for surface reduction, passivation, corrosion prevention and activation of copper surface App 20050087759 - Bailey, Andrew D. III ; et al.	2005-04-28
System, method and apparatus for improved global dual-damascene planarization App 20040248408 - Lohokare, Shrikant P. ; et al.	2004-12-09
System, method and apparatus for improved local dual-damascene planarization Grant 6,821,899 - Lohokare , et al. November 23, 2	2004-11-23
System, method and apparatus for improved local dual-damascene planarization App 20040180545 - Lohokare, Shrikant P. ; et al.	2004-09-16

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