Logan; Joseph S.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Logan; Joseph S..The latest application filed is for "guard ring electrostatic chuck".
- Logan; Joseph S. - Jamestown RI
- Logan; Joseph S. - Poughkeepsie NY
| Patent | Date |
|---|---|
| Guard ring electrostatic chuck Grant RE37,580 - Barnes , et al. March 12, 2 | 2002-03-12 |
| Guard ring electrostatic chuck Grant 5,612,851 - Barnes , et al. March 18, 1 | 1997-03-18 |
| Electrostatic chuck with reference electrode Grant 5,561,585 - Barnes , et al. October 1, 1 | 1996-10-01 |
| Method of making electrostatic chuck with oxide insulator Grant 5,535,507 - Barnes , et al. July 16, 1 | 1996-07-16 |
| Electrostatic chuck with reference electrode Grant 5,467,249 - Barnes , et al. November 14, 1 | 1995-11-14 |
| Guard ring electrostatic chuck Grant 5,463,525 - Barnes , et al. October 31, 1 | 1995-10-31 |
| Method and apparatus for filing high aspect patterns with metal Grant 5,302,266 - Grabarz , et al. April 12, 1 | 1994-04-12 |
| Scanned electron cyclotron resonance plasma source Grant 5,208,512 - Forster , et al. May 4, 1 | 1993-05-04 |
| Ceramic electrostatic chuck Grant 5,191,506 - Logan , et al. March 2, 1 | 1993-03-02 |
| Temperature cycling ceramic electrostatic chuck Grant 5,155,652 - Logan , et al. October 13, 1 | 1992-10-13 |
| Method for fabricating a split-ring electrostatic chuck Grant 5,099,571 - Logan , et al. March 31, 1 | 1992-03-31 |
| Electrostatic chuck having tapered electrodes Grant 5,055,964 - Logan , et al. October 8, 1 | 1991-10-08 |
| Low contamination RF sputter deposition apparatus Grant 4,818,359 - Jones , et al. April 4, 1 | 1989-04-04 |
| Hollow cathode enhanced plasma for high rate reactive ion etching and deposition Grant 4,637,853 - Bumble , et al. January 20, 1 | 1987-01-20 |
| Planar multi-level metal process with built-in etch stop Grant 4,447,824 - Logan , et al. May 8, 1 | 1984-05-08 |
| Planar multi-level metal process with built-in etch stop Grant 4,367,119 - Logan , et al. January 4, 1 | 1983-01-04 |
| Quadrupole R.F. sputtering system having an anode/cathode shield and a floating target shield Grant 4,362,611 - Logan , et al. December 7, 1 | 1982-12-07 |
| Omission of thick Si.sub.3 N.sub.4 layers in ISA schemes Grant 4,333,794 - Beyer , et al. June 8, 1 | 1982-06-08 |
| Reactive ion etching of aluminum Grant 3,994,793 - Harvilchuck , et al. November 30, 1 | 1976-11-30 |
| Method For Sputtering A Film On An Irregular Surface Grant 3,755,123 - Davidse , et al. August 28, 1 | 1973-08-28 |
| Rf Sputtering Method And Apparatus For Producing Insulating Films Of Varied Physical Properties Grant 3,617,459 - Logan November 2, 1 | 1971-11-02 |
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