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Patent applications and USPTO patent grants for Lofaro; Michael Francis.The latest application filed is for "chemical mechanical planarization slurries and processes for platinum group metals".
Patent | Date |
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Chemical Mechanical Planarization Slurries And Processes For Platinum Group Metals App 20220277964 - Krishnan; Mahadevaiyer ;   et al. | 2022-09-01 |
Structure and method for formation of cladded interconnects for MRAMs Grant 7,442,647 - Kanakasabapathy , et al. October 28, 2 | 2008-10-28 |
Slurry for mechanical polishing (CMP) of metals and use thereof Grant 6,812,193 - Brigham , et al. November 2, 2 | 2004-11-02 |
Multi-wafer polishing tool App 20010005669 - Lofaro, Michael Francis | 2001-06-28 |
Manufacturing methods and uses for micro pipe systems Grant 6,228,744 - Levine , et al. May 8, 2 | 2001-05-08 |
Chemical-mechanical polishing system having a bi-material wafer backing film and two-piece wafer carrier Grant 6,171,513 - Davis , et al. January 9, 2 | 2001-01-09 |
Semiconductor structures containing a micro pipe system therein Grant 6,031,286 - Levine , et al. February 29, 2 | 2000-02-29 |
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