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Patent applications and USPTO patent grants for Lo; Sio On.The latest application filed is for "silicon mandrel etch after native oxide punch-through".
Patent | Date |
---|---|
Silicon mandrel etch after native oxide punch-through Grant 11,387,115 - Yan , et al. July 12, 2 | 2022-07-12 |
Silicon Mandrel Etch After Native Oxide Punch-through App 20200203182 - Yan; Chun ;   et al. | 2020-06-25 |
Method For Removing Aluminum Fluoride Contamination From Semiconductor Processing Equipment App 20170056935 - GOPALAN; Ramesh ;   et al. | 2017-03-02 |
Geometries and patterns for surface texturing to increase deposition retention Grant 9,101,954 - Wang , et al. August 11, 2 | 2015-08-11 |
Geometries And Patterns For Surface Texturing To Increase Deposition Retention App 20150079336 - WANG; Jianqi ;   et al. | 2015-03-19 |
Non destructive selective deposition removal of non-metallic deposits from aluminum containing substrates Grant 8,398,779 - Bao , et al. March 19, 2 | 2013-03-19 |
Non Destructive Selective Deposition Removal Of Non-metallic Deposits From Aluminum Containing Substrates App 20100218788 - Bao; Liyuan ;   et al. | 2010-09-02 |
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