| Patent | Date |
|---|
Film Thickness Uniformity Improvement Using Edge Ring And Bias Electrode Geometry
App 20220301920 - LO; Kin Pong ; et al. | 2022-09-22 |
Film thickness uniformity improvement using edge ring and bias electrode geometry
Grant 11,380,575 - Lo , et al. July 5, 2 | 2022-07-05 |
Methods For Calibrating An Optical Emission Spectrometer
App 20220178747 - LO; Kin Pong ; et al. | 2022-06-09 |
Integrated Epitaxy And Preclean System
App 20220059342 - HAWRYLCHAK; Lara ; et al. | 2022-02-24 |
Film Thickness Uniformity Improvement Using Edge Ring And Bias Electrode Geometry
App 20220028656 - LO; Kin Pong ; et al. | 2022-01-27 |
Integrated epitaxy and preclean system
Grant 11,164,737 - Hawrylchak , et al. November 2, 2 | 2021-11-02 |
Epitaxy system integrated with high selectivity oxide removal and high temperature contaminant removal
Grant 11,049,719 - Hawrylchak , et al. June 29, 2 | 2021-06-29 |
Thermal Processing Susceptor
App 20210175115 - NGO; Anhthu ; et al. | 2021-06-10 |
Thin film treatment process
Grant 10,971,357 - Liu , et al. April 6, 2 | 2021-04-06 |
Thermal processing susceptor
Grant 10,930,543 - Ngo , et al. February 23, 2 | 2021-02-23 |
Light pipe window structure for low pressure thermal processes
Grant 10,727,093 - Brillhart , et al. | 2020-07-28 |
Thin Film Treatment Process
App 20200111659 - LIU; Wei ; et al. | 2020-04-09 |
Upper dome with injection assembly
Grant 10,458,040 - Brillhart , et al. Oc | 2019-10-29 |
Gas distribution plate
Grant D858,192 - Lo Sep | 2019-09-03 |
Absorbing reflector for semiconductor processing chamber
Grant 10,306,708 - Lo , et al. | 2019-05-28 |
Susceptor design to reduce edge thermal peak
Grant 10,269,614 - Chu , et al. | 2019-04-23 |
Epitaxy System Integrated With High Selectivity Oxide Removal And High Temperature Contaminant Removal
App 20190067006 - HAWRYLCHAK; Lara ; et al. | 2019-02-28 |
Integrated Epitaxy And Preclean System
App 20190066998 - HAWRYLCHAK; Lara ; et al. | 2019-02-28 |
Integrated Epitaxy System High Temperature Contaminant Removal
App 20190062904 - HAWRYLCHAK; Lara ; et al. | 2019-02-28 |
Thermal Processing Susceptor
App 20180366363 - NGO; Anhthu ; et al. | 2018-12-20 |
Thermal processing susceptor
Grant 10,062,598 - Ngo , et al. August 28, 2 | 2018-08-28 |
Absorbing Reflector For Semiconductor Processing Chamber
App 20180084610 - LO; Kin Pong ; et al. | 2018-03-22 |
Upper Dome With Injection Assembly
App 20180066382 - BRILLHART; Paul ; et al. | 2018-03-08 |
Upper dome with injection assembly
Grant 9,845,550 - Brillhart , et al. December 19, 2 | 2017-12-19 |
Vacuum Platform With Process Chambers For Removing Carbon Contaminants And Surface Oxide From Semiconductor Substrates
App 20170350038 - LO; Kin Pong ; et al. | 2017-12-07 |
Absorbing reflector for semiconductor processing chamber
Grant 9,832,816 - Lo , et al. November 28, 2 | 2017-11-28 |
Integrated apparatus for efficient removal of halogen residues from etched substrates
Grant 9,735,002 - Kawaguchi , et al. August 15, 2 | 2017-08-15 |
Susceptor Design To Reduce Edge Thermal Peak
App 20160133504 - CHU; Schubert S. ; et al. | 2016-05-12 |
Honeycomb Multi-zone Gas Distribution Plate
App 20160068955 - BRILLHART; Paul ; et al. | 2016-03-10 |
Recursive Pumping Member
App 20160033070 - BRILLHART; Paul ; et al. | 2016-02-04 |
One-piece Injector Assembly And One-piece Exhaust Liner
App 20150368830 - BRILLHART; Paul ; et al. | 2015-12-24 |
Thermal Processing Susceptor
App 20150340266 - NGO; Anhthu ; et al. | 2015-11-26 |
Light Pipe Window Structure For Low Pressure Thermal Processes
App 20150340257 - BRILLHART; PAUL ; et al. | 2015-11-26 |
Upper Dome With Injection Assembly
App 20150233016 - BRILLHART; Paul ; et al. | 2015-08-20 |
Diffuser with backward facing step having varying step height
Grant 9,109,466 - Lo , et al. August 18, 2 | 2015-08-18 |
Absorbing Reflector For Semiconductor Processing Chamber
App 20140376898 - Lo; Kin Pong ; et al. | 2014-12-25 |
Diffuser With Backward Facing Step Having Varying Step Height
App 20130019583 - Lo; Kin Pong ; et al. | 2013-01-24 |
Etching chamber having flow equalizer and lower liner
Grant 8,313,578 - Carducci , et al. November 20, 2 | 2012-11-20 |
Etching Chamber Having Flow Equalizer And Lower Liner
App 20100065213 - Carducci; James D. ; et al. | 2010-03-18 |
Integrated method and apparatus for efficient removal of halogen residues from etched substrates
Grant 7,655,571 - Kawaguchi , et al. February 2, 2 | 2010-02-02 |
Etching Chamber Having Flow Equalizer And Lower Liner
App 20090188625 - CARDUCCI; JAMES D. ; et al. | 2009-07-30 |
Integrated Apparatus For Efficient Removal Of Halogen Residues From Etched Substrates
App 20090014324 - Kawaguchi; Mark Naoshi ; et al. | 2009-01-15 |
Integrated Method And Apparatus For Efficient Removal Of Halogen Residues From Etched Substrates
App 20080102646 - Kawaguchi; Mark Naoshi ; et al. | 2008-05-01 |
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