loadpatents
Patent applications and USPTO patent grants for LO; Hansel.The latest application filed is for "process system with variable flow valve".
Patent | Date |
---|---|
Process System With Variable Flow Valve App 20220223383 - SHONO; Eric Kihara ;   et al. | 2022-07-14 |
Novel And Effective Homogenize Flow Mixing Design App 20220165547 - PANDEY; Vishwas Kumar ;   et al. | 2022-05-26 |
Dogbone Inlet Cone Profile For Remote Plasma Oxidation Chamber App 20210272776 - PANDEY; Vishwas Kumar ;   et al. | 2021-09-02 |
Argon addition to remote plasma oxidation Grant 11,081,340 - Lo , et al. August 3, 2 | 2021-08-03 |
Chamber inlet Grant D924,825 - Shono , et al. July 13, 2 | 2021-07-13 |
Dogbone inlet cone profile for remote plasma oxidation chamber Grant 11,049,696 - Pandey , et al. June 29, 2 | 2021-06-29 |
Side Inject Designs For Improved Radical Concentrations App 20210074505 - SHONO; Eric Kihara ;   et al. | 2021-03-11 |
Side inject designs for improved radical concentrations Grant 10,847,337 - Shono , et al. November 24, 2 | 2020-11-24 |
Argon Addition To Remote Plasma Oxidation App 20200251331 - Kind Code | 2020-08-06 |
Asymmetric Injection For Better Wafer Uniformity App 20200240014 - Shono; Eric Kihara ;   et al. | 2020-07-30 |
Dogbone Inlet Cone Profile For Remote Plasma Oxidation Chamber App 20200219703 - PANDEY; Vishwas Kumar ;   et al. | 2020-07-09 |
Method And Apparatus For Supplying Improved Gas Flow To A Processing Volume Of A Processing Chamber App 20200199748 - PANDEY; Vishwas Kumar ;   et al. | 2020-06-25 |
Argon addition to remote plasma oxidation Grant 10,636,650 - Lo , et al. | 2020-04-28 |
Dogbone inlet cone profile for remote plasma oxidation chamber Grant 10,636,626 - Pandey , et al. | 2020-04-28 |
Dogbone Inlet Cone Profile For Remote Plasma Oxidation Chamber App 20190228951 - PANDEY; Vishwas Kumar ;   et al. | 2019-07-25 |
Side Inject Designs For Improved Radical Concentrations App 20190228942 - SHONO; Eric Kihara ;   et al. | 2019-07-25 |
Argon Addition To Remote Plasma Oxidation App 20190221427 - LO; Hansel ;   et al. | 2019-07-18 |
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