Lo; Chi-Ching
Patent Applications and Registrations
Patent applications and USPTO patent grants for Lo; Chi-Ching.The latest application filed is for "high density plasma reactor with multiple top coils".
- Lo; Chi-Ching - Hsinchu TW
- Lo, Chi-Ching - Hsinchu City TW
| Patent | Date |
|---|---|
| High density plasma reactor with multiple top coils Grant 9,607,809 - Lo , et al. March 28, 2 | 2017-03-28 |
| High Density Plasma Reactor With Multiple Top Coils App 20140273537 - LO; Chi-Ching ; et al. | 2014-09-18 |
| Electrostatic chuck assembly having disassembling device Grant 7,102,871 - Chang , et al. September 5, 2 | 2006-09-05 |
| Electrostatic chuck assembly having disassembling device App 20050094349 - Chang, Cheng-Liang ; et al. | 2005-05-05 |
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