liu xinye

Patent Applications and Registrations

Patent applications and USPTO patent grants for liu xinye.The latest application filed is for "vaporizer for atomic layer deposition system".

Company Profile

2.7.2

- Sunnyvale CA US
Liu; Xinye - Sunnyvale CA US
Liu; Xinye - Cambridge MA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Modulating etch selectivity and etch rate of silicon nitride thin films Grant 08617348 -	2013-12-31
Modulating etch selectivity and etch rate of silicon nitride thin films Grant 8,617,348 - Liu , et al. December 31, 2	2013-12-31
Modulating etch selectivity and etch rate of silicon nitride thin films Grant 8,187,486 - Liu , et al. May 29, 2	2012-05-29
Adsorption based material removal process Grant 8,043,972 - Liu , et al. October 25, 2	2011-10-25
Methods for removing silicon nitride and other materials during fabrication of contacts Grant 7,977,249 - Liu , et al. July 12, 2	2011-07-12
Adsorption based material removal process Grant 7,416,989 - Liu , et al. August 26, 2	2008-08-26
Vaporizer for atomic layer deposition system App 20070042119 - Matthysse; Larry ; et al.	2007-02-22
Methods and apparatus for cycle time improvements for atomic layer deposition App 20050016956 - Liu, Xinye ; et al.	2005-01-27
Chemical vapor deposition of aluminum oxide Grant 6,037,003 - Gordon , et al. March 14, 2	2000-03-14

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