Liu; Shuwei
Patent Applications and Registrations
Patent applications and USPTO patent grants for Liu; Shuwei.The latest application filed is for "extreme ultraviolet mask blank structure".
Company Profile
19.13.31
- Liu; Shuwei - Singapore SG
Patent Activity
| Patent | Date |
|---|---|
| Extreme Ultraviolet Mask Blank Structure App 20220252971 - Liu; Shuwei ; et al. | 2022-08-11 |
| Extreme Ultraviolet Mask Absorber Materials App 20220236634 - Liu; Shuwei ; et al. | 2022-07-28 |
| Graded Interface In Bragg Reflector App 20220221786 - Xiao; Wen ; et al. | 2022-07-14 |
| Extreme Ultraviolet Mask Absorber Materials App 20220221783 - Liu; Shiyu ; et al. | 2022-07-14 |
| Physical vapor deposition chamber cleaning processes Grant 11,365,475 - Jindal , et al. June 21, 2 | 2022-06-21 |
| Graded interface in bragg reflector Grant 11,327,394 - Xiao , et al. May 10, 2 | 2022-05-10 |
| Extreme ultraviolet mask absorber materials Grant 11,300,872 - Liu , et al. April 12, 2 | 2022-04-12 |
| Extreme ultraviolet mask absorber materials Grant 11,300,871 - Liu , et al. April 12, 2 | 2022-04-12 |
| Extreme Ultraviolet Mask Absorber Materials App 20220107556 - Liu; Shuwei ; et al. | 2022-04-07 |
| Extreme ultraviolet mask absorber matertals Grant 11,275,303 - Liu , et al. March 15, 2 | 2022-03-15 |
| Extreme ultraviolet mask absorber matertals Grant 11,275,304 - Liu , et al. March 15, 2 | 2022-03-15 |
| Extreme ultraviolet mask blank defect reduction Grant 11,275,300 - Abhinand , et al. March 15, 2 | 2022-03-15 |
| Extreme ultraviolet mask absorber materials Grant 11,275,302 - Liu , et al. March 15, 2 | 2022-03-15 |
| Extreme ultraviolet mask absorber materials Grant 11,249,390 - Liu , et al. February 15, 2 | 2022-02-15 |
| Extreme ultraviolet mask absorber materials Grant 11,249,389 - Liu , et al. February 15, 2 | 2022-02-15 |
| Extreme ultraviolet mask absorber materials Grant 11,249,388 - Liu , et al. February 15, 2 | 2022-02-15 |
| Extreme Ultraviolet Mask Absorber Materials App 20220011663 - Liu; Shuwei ; et al. | 2022-01-13 |
| Ta--Cu alloy material for extreme ultraviolet mask absorber Grant 11,209,727 - Liu , et al. December 28, 2 | 2021-12-28 |
| Extreme ultraviolet mask absorber and processes for manufacture Grant 11,194,244 - Liu , et al. December 7, 2 | 2021-12-07 |
| Extreme Ultraviolet Mask Absorber Materials App 20210341828 - Liu; Shiyu ; et al. | 2021-11-04 |
| Extreme Ultraviolet Mask Absorber Materials App 20210325771 - Liu; Shuwei ; et al. | 2021-10-21 |
| Extreme Ultraviolet Mask Absorber Materials App 20210302826 - Liu; Shuwei ; et al. | 2021-09-30 |
| Extreme Ultraviolet Mask Blank Hard Mask Materials App 20210232041 - Liu; Shuwei ; et al. | 2021-07-29 |
| Extreme Ultraviolet Mask Absorber Materials App 20210232042 - Liu; Shuwei ; et al. | 2021-07-29 |
| Extreme Ultraviolet Mask Absorber Materials App 20210232039 - Liu; Shuwei ; et al. | 2021-07-29 |
| Extreme Ultraviolet Mask Blank Hard Mask Materials App 20210232040 - Liu; Shuwei ; et al. | 2021-07-29 |
| Extreme Ultraviolet Mask Blank Defect Reduction Methods App 20210124253 - Yoong; Herng Yau ; et al. | 2021-04-29 |
| Physical Vapor Deposition Chamber Cleaning Processes App 20210032742 - Jindal; Vibhu ; et al. | 2021-02-04 |
| Extreme Ultraviolet Mask Absorber Materials App 20200371429 - Liu; Shuwei ; et al. | 2020-11-26 |
| Extreme Ultraviolet Mask Absorber Materials App 20200371430 - Liu; Shuwei ; et al. | 2020-11-26 |
| Extreme Ultraviolet Mask Absorber Materials App 20200371428 - Liu; Shuwei ; et al. | 2020-11-26 |
| Extreme Ultraviolet Mask Absorber Materials App 20200371423 - Liu; Shuwei ; et al. | 2020-11-26 |
| Extreme Ultraviolet Mask Absorber Materials App 20200371422 - Liu; Shuwei ; et al. | 2020-11-26 |
| Extreme Ultraviolet Mask Absorber Materials App 20200371424 - Liu; Shuwei ; et al. | 2020-11-26 |
| Extreme Ultraviolet Mask Absorber Materials App 20200371427 - Liu; Shuwei ; et al. | 2020-11-26 |
| Graded Interface In Bragg Reflector App 20200333700 - Xiao; Wen ; et al. | 2020-10-22 |
| Extreme Ultraviolet Mask Absorber Materials App 20200249560 - Kind Code | 2020-08-06 |
| Extreme Ultraviolet Mask Absorber Materials App 20200249559 - Kind Code | 2020-08-06 |
| Extreme Ultraviolet Mask Absorber Materials App 20200249557 - Kind Code | 2020-08-06 |
| Physical Vapor Deposition Target Assembly App 20200241409 - Xiao; Wen ; et al. | 2020-07-30 |
| Extreme Ultraviolet Mask Absorber And Processes For Manufacture App 20200201167 - Liu; Shuwei ; et al. | 2020-06-25 |
| Ta-Cu Alloy Material For Extreme Ultraviolet Mask Absorber App 20200133111 - Liu; Shuwei ; et al. | 2020-04-30 |
| Extreme Ultraviolet Mask Absorber Materials App 20200026178 - Jindal; Vibhu ; et al. | 2020-01-23 |
| Extreme Ultraviolet Mask Blank Defect Reduction App 20200012183 - Abhinand; Sai ; et al. | 2020-01-09 |
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