| Patent | Date |
|---|
Sensor device and method of fabrication
Grant 11,383,973 - Shao , et al. July 12, 2 | 2022-07-12 |
Structure and methodology for detecting defects during MEMS device production
Grant 11,377,348 - Liu July 5, 2 | 2022-07-05 |
Calibration Device, Calibration System And Calibration Method
App 20220113172 - LIU; Lianjun ; et al. | 2022-04-14 |
Bracket Apparatus
App 20220107049 - LIU; Lianjun | 2022-04-07 |
Calibration Device
App 20220082657 - ZHANG; Kaikai ; et al. | 2022-03-17 |
Calibration Bracket
App 20220003578 - Liu; Lianjun ; et al. | 2022-01-06 |
Calibration Bracket
App 20210404846 - LIU; Lianjun | 2021-12-30 |
Sensor Device And Method Of Fabrication
App 20210221677 - Shao; Peng ; et al. | 2021-07-22 |
Integrating diverse sensors in a single semiconductor device
Grant 11,021,363 - Liu , et al. June 1, 2 | 2021-06-01 |
Structure And Methodology For Detecting Defects During Mems Device Production
App 20210155474 - Liu; Lianjun | 2021-05-27 |
Structure and methodology for detecting defects during MEMS device production
Grant 10,941,037 - Liu March 9, 2 | 2021-03-09 |
Cabinet liquid cooling system and cabinet
Grant 10,827,648 - Liu , et al. November 3, 2 | 2020-11-03 |
Structure And Methodology For Detecting Defects During Mems Device Production
App 20200207618 - Liu; Lianjun | 2020-07-02 |
MEMS inertial sensor and forming method therefor
Grant 10,591,508 - Liu | 2020-03-17 |
Through substrate via (TSV) and method therefor
Grant 10,546,779 - Zhang , et al. Ja | 2020-01-28 |
Integrating Diverse Sensors In A Single Semiconductor Device
App 20190292042 - LIU; LIANJUN ; et al. | 2019-09-26 |
Integrating diverse sensors in a single semiconductor device
Grant 10,364,140 - Liu , et al. July 30, 2 | 2019-07-30 |
Cabinet Liquid Cooling System and Cabinet
App 20190208667 - Liu; Lianjun ; et al. | 2019-07-04 |
Pressure sensor having a multiple wheatstone bridge configuration of sense elements
Grant 10,302,514 - Liu | 2019-05-28 |
Motion Triggered System Power Up
App 20190092104 - Ahmed; Firoz ; et al. | 2019-03-28 |
Through Substrate Via (tsv) And Method Therefor
App 20190074220 - ZHANG; QING ; et al. | 2019-03-07 |
Signal interface circuit and pressure sensor system including same
Grant 10,215,653 - Holm , et al. Feb | 2019-02-26 |
Cabinet liquid cooling system and cabinet
Grant 10,178,801 - Liu , et al. J | 2019-01-08 |
Through substrate via (TSV) and method therefor
Grant 10,157,792 - Zhang , et al. Dec | 2018-12-18 |
Magnetic field sensor with permanent magnet biasing
Grant 10,145,907 - Holm , et al. De | 2018-12-04 |
Signal Interface Circuit And Pressure Sensor System Including Same
App 20180292280 - Holm; Paige M. ; et al. | 2018-10-11 |
Mems Inertial Sensor And Forming Method Therefor
App 20180210006 - LIU; Lianjun | 2018-07-26 |
Pressure Sensor Having A Multiple Wheatstone Bridge Configuration Of Sense Elements
App 20180172533 - Liu; Lianjun | 2018-06-21 |
Through Substrate Via (tsv) And Method Therefor
App 20180122698 - ZHANG; QING ; et al. | 2018-05-03 |
Method for selective etching using dry film photoresist
Grant 9,960,081 - Stevens , et al. May 1, 2 | 2018-05-01 |
MEMS inertial sensor and forming method therefor
Grant 9,958,471 - Liu May 1, 2 | 2018-05-01 |
Magnetic field sensor with multiple axis sense capability
Grant 9,933,496 - Holm , et al. April 3, 2 | 2018-04-03 |
Microelectromechanical system devices having crack resistant membrane structures and methods for the fabrication thereof
Grant 9,926,187 - Dawson , et al. March 27, 2 | 2018-03-27 |
System And Method For Characterizing Critical Parameters Resulting From A Semiconductor Device Fabrication Process
App 20180053698 - Holm; Paige M. ; et al. | 2018-02-22 |
Magnetic field sensor with permanent magnet biasing
Grant 9,897,667 - Holm , et al. February 20, 2 | 2018-02-20 |
Corruption detection and smart reset of ferromagnetic structures in magnetic field sensors
Grant 9,857,435 - Holm , et al. January 2, 2 | 2018-01-02 |
Magnetic field sensor with multiple sense layer magnetization orientations
Grant 9,841,469 - Holm , et al. December 12, 2 | 2017-12-12 |
Microelectromechanical System Devices Having Crack Resistant Membrane Structures And Methods For The Fabrication Thereof
App 20170341926 - Dawson; Chad S ; et al. | 2017-11-30 |
Magnetic field programming of electronic devices on a wafer
Grant 9,824,774 - Lance , et al. November 21, 2 | 2017-11-21 |
Magnetic Field Sensor With Multiple Axis Sense Capability
App 20170307697 - Holm; Paige M. ; et al. | 2017-10-26 |
Actively preventing charge induced leakage of semiconductor devices
Grant 9,790,085 - Bilic , et al. October 17, 2 | 2017-10-17 |
CMOS and pressure sensor integrated on a chip and fabrication method
Grant 9,790,082 - Liu , et al. October 17, 2 | 2017-10-17 |
Magnetic Field Sensor With Permanent Magnet Biasing
App 20170293001 - Holm; Paige M. ; et al. | 2017-10-12 |
Electric field sensor, system, and method for programming electronic devices on a wafer
Grant 9,784,787 - Liu , et al. October 10, 2 | 2017-10-10 |
Method for reset and stabilization control of a magnetic sensor
Grant 9,766,301 - Liu , et al. September 19, 2 | 2017-09-19 |
Magnetic field sensor with skewed sense magnetization of sense layer
Grant 9,739,842 - Holm , et al. August 22, 2 | 2017-08-22 |
Sensor package including a magnetic field sensor and a continuous coil structure for enabling z-axis self-test capability
Grant 9,720,051 - Holm , et al. August 1, 2 | 2017-08-01 |
Magnetic Field Sensor With Multiple Sense Layer Magnetization Orientations
App 20170212175 - Holm; Paige M. ; et al. | 2017-07-27 |
Magnetic Field Sensor With Skewed Sense Magnetization Of Sense Layer
App 20170212176 - Holm; Paige M. ; et al. | 2017-07-27 |
Magnetic Field Sensor With Permanent Magnet Biasing
App 20170212189 - Holm; Paige M. ; et al. | 2017-07-27 |
MEMS microphone and forming method therefor
Grant 9,674,619 - Liu June 6, 2 | 2017-06-06 |
Magnetic field sensor with structure for reconditioning magnetic polarization of flux guides
Grant 9,664,755 - Holm , et al. May 30, 2 | 2017-05-30 |
Substrate structure and method for manufacturing same
Grant 9,633,952 - Liu April 25, 2 | 2017-04-25 |
Probe card and method for testing magnetic sensors
Grant 9,606,144 - Liu , et al. March 28, 2 | 2017-03-28 |
Optical programming of electronic devices on a wafer
Grant 9,607,911 - Liu , et al. March 28, 2 | 2017-03-28 |
Integrating Diverse Sensors In A Single Semiconductor Device
App 20170081174 - LIU; LIANJUN ; et al. | 2017-03-23 |
Apparatus and method for resetting a Z-axis sensor flux guide
Grant 9,588,211 - Liu , et al. March 7, 2 | 2017-03-07 |
Corruption Detection And Smart Reset Of Ferromagnetic Structures In Magnetic Field Sensors
App 20160334472 - HOLM; PAIGE M. ; et al. | 2016-11-17 |
Electric Field Sensor, System, And Method For Programming Electronic Devices On A Wafer
App 20160306007 - LIU; LIANJUN ; et al. | 2016-10-20 |
Microelectromechanical system devices having through substrate vias and methods for the fabrication thereof
Grant 9,469,523 - Liu October 18, 2 | 2016-10-18 |
Optical Programming Of Electronic Devices On A Wafer
App 20160276231 - LIU; LIANJUN ; et al. | 2016-09-22 |
Wafer-level Magnetic Field Programming Of Magnetic Field Sensors
App 20160274188 - LIU; LIANJUN ; et al. | 2016-09-22 |
Magnetic Field Programming Of Electronic Devices On A Wafer
App 20160276004 - LANCE; Philippe ; et al. | 2016-09-22 |
Integrated inertial sensor and pressure sensor, and forming method therefor
Grant 9,448,251 - Liu September 20, 2 | 2016-09-20 |
Optical disc drive installation mechanism, and outer frame for installing optical disc drive
Grant 9,389,652 - Liu , et al. July 12, 2 | 2016-07-12 |
Method of making contact posts for a microelectromechanical device
Grant 9,343,242 - Liu May 17, 2 | 2016-05-17 |
Cabinet Liquid Cooling System and Cabinet
App 20160113153 - Liu; Lianjun ; et al. | 2016-04-21 |
Through substrate via with diffused conductive component
Grant 9,318,376 - Holm , et al. April 19, 2 | 2016-04-19 |
Apparatus And Method For Reset And Stabilization Control Of A Magnetic Sensor
App 20160084920 - LIU; Lianjun ; et al. | 2016-03-24 |
Method and structure for testing and calibrating three axis magnetic field sensing devices
Grant 9,279,865 - Liu , et al. March 8, 2 | 2016-03-08 |
Apparatus and method for reset and stabilization control of a magnetic sensor
Grant 9,229,070 - Liu , et al. January 5, 2 | 2016-01-05 |
Magnetic Field Sensor With Z-axis Self-test Capability
App 20150346290 - Holm; Paige M. ; et al. | 2015-12-03 |
Mems Device Having Conductive Microstructures Laterally Surrounded By Oxide Material
App 20150291414 - LIU; LIANJUN | 2015-10-15 |
Inertial Sensor With Trim Capacitance And Method Of Trimming Offset
App 20150268268 - Liu; Lianjun ; et al. | 2015-09-24 |
Microelectromechanical System Devices Having Through Substrate Vias And Methods For The Fabrication Thereof
App 20150225229 - Liu; Lianjun | 2015-08-13 |
Probe Card And Method For Testing Magnetic Sensors
App 20150219689 - LIU; Lianjun ; et al. | 2015-08-06 |
Apparatus And Method For Reconditioning Z-axis Sensor Flux Guides
App 20150204951 - Holm; Paige M. ; et al. | 2015-07-23 |
Apparatus And Method For Resetting A Z-axis Sensor Flux Guide
App 20150192655 - LIU; Lianjun ; et al. | 2015-07-09 |
MEMS pressure sensor and manufacturing method therefor
Grant 9,073,745 - Liu July 7, 2 | 2015-07-07 |
MEMS pressure sensor and manufacturing method therefor
Grant 9,073,746 - Liu July 7, 2 | 2015-07-07 |
Cavity based packaging for MEMS devices
Grant 9,061,885 - Karlin , et al. June 23, 2 | 2015-06-23 |
Microelectromechanical system devices having through substrate vias and methods for the fabrication thereof
Grant 9,041,213 - Liu May 26, 2 | 2015-05-26 |
Method for fabricating multiple types of MEMS devices
Grant 9,034,679 - Liu May 19, 2 | 2015-05-19 |
Probe card and method for testing magnetic sensors
Grant 9,035,671 - Liu , et al. May 19, 2 | 2015-05-19 |
Vent hole sealing in multiple die sensor device
Grant 9,018,029 - Bowles , et al. April 28, 2 | 2015-04-28 |
Mems Sensor Device With Multi-stimulus Sensing And Method Of Fabrication
App 20150102437 - Liu; Lianjun ; et al. | 2015-04-16 |
Apparatus and method for resetting a Z-axis sensor flux guide
Grant 9,000,760 - Liu , et al. April 7, 2 | 2015-04-07 |
Optical Disc Drive Installation Mechanism, And Outer Frame For Installing Optical Disc Drive
App 20150092341 - Liu; Lianjun ; et al. | 2015-04-02 |
Microelectromechanical System Devices Having Crack Resistant Membrane Structures And Methods For The Fabrication Thereof
App 20150059484 - Dawson; Chad S ; et al. | 2015-03-05 |
Apparatus And Method For Reset And Stabilization Control Of A Magnetic Sensor
App 20150054502 - Liu; Lianjun ; et al. | 2015-02-26 |
Apparatus and method for reset and stabilization control of a magnetic sensor
Grant 08922205 - | 2014-12-30 |
Microelectromechanical system devices having crack resistant membrane structures and methods for the fabrication thereof
Grant 8,921,952 - Dawson , et al. December 30, 2 | 2014-12-30 |
Apparatus and method for reset and stabilization control of a magnetic sensor
Grant 8,922,205 - Liu , et al. December 30, 2 | 2014-12-30 |
Mems Device And Method For Fabricating Mems Devices
App 20140374851 - Liu; Lianjun | 2014-12-25 |
Microelectromechanical system devices having through substrate vias and methods for the fabrication thereof
Grant 8,883,535 - Liu November 11, 2 | 2014-11-11 |
Microelectromechanical System Devices Having Through Substrate Vias And Methods For The Fabrication Thereof
App 20140264909 - Liu; Lianjun | 2014-09-18 |
Microelectromechanical System Devices Having Through Substrate Vias And Methods For The Fabrication Thereof
App 20140239423 - Liu; Lianjun | 2014-08-28 |
Microelectromechanical System Devices Having Crack Resistant Membrane Structures And Methods For The Fabrication Thereof
App 20140210018 - Dawson; Chad S. ; et al. | 2014-07-31 |
Electromechanical transducer device and method of forming a electromechanical transducer device
Grant 8,736,145 - Liu , et al. May 27, 2 | 2014-05-27 |
Substrate Structure And Method For Manufacturing Same
App 20140048910 - Liu; Lianjun | 2014-02-20 |
Semiconductor Device And Method Of Fabricating Same
App 20140008739 - Karlin; Lisa H. ; et al. | 2014-01-09 |
Mems Microphone And Forming Method Therefor
App 20140003633 - Liu; Lianjun | 2014-01-02 |
Mems Microphone And Forming Method Therefor
App 20140001581 - Liu; Lianjun | 2014-01-02 |
Mems Pressure Sensor And Manufacturing Method Therefor
App 20140001584 - Liu; Lianjun | 2014-01-02 |
Mems Pressure Sensor And Manufacturing Method Therefor
App 20140001579 - Liu; Lianjun | 2014-01-02 |
Mems Inertial Sensor And Forming Method Therefor
App 20130340526 - Liu; Lianjun | 2013-12-26 |
Integrated Inertial Sensor And Pressure Sensor, And Forming Method Therefor
App 20130340525 - Liu; Lianjun | 2013-12-26 |
Method And Structure For Testing And Calibrating Three Axis Magnetic Field Sensing Devices
App 20130300402 - Liu; Lianjun ; et al. | 2013-11-14 |
Method of fabricating a semiconductor device that limits damage to elements of the semiconductor device that are exposed during processing
Grant 8,551,814 - Karlin , et al. October 8, 2 | 2013-10-08 |
Apparatus And Method For Resetting A Z-axis Sensor Flux Guide
App 20130221949 - Liu; Lianjun ; et al. | 2013-08-29 |
Pressure transducer having structure for monitoring surface charge
Grant 8,511,170 - Liu , et al. August 20, 2 | 2013-08-20 |
Method of forming an electromechanical transducer device
Grant 8,513,042 - Perruchot , et al. August 20, 2 | 2013-08-20 |
Device structures for in-plane and out-of-plane sensing micro-electro-mechanical systems (MEMS)
Grant 8,461,656 - Park , et al. June 11, 2 | 2013-06-11 |
Methods for forming a micro electro-mechanical device
Grant 8,461,657 - Tang , et al. June 11, 2 | 2013-06-11 |
Method of making a micro-electro-mechanical-systems (MEMS) device
Grant 8,455,286 - Karlin , et al. June 4, 2 | 2013-06-04 |
Electromechanical transducer device and method of forming a electromechanical transducer device
Grant 8,445,978 - Perruchot , et al. May 21, 2 | 2013-05-21 |
Apparatus And Method For Reset And Stabilization Control Of A Magnetic Sensor
App 20130106410 - Liu; Lianjun ; et al. | 2013-05-02 |
Probe Card And Method For Testing Magnetic Sensors
App 20130009659 - Liu; Lianjun ; et al. | 2013-01-10 |
Shielding for a micro electro-mechanical device and method therefor
Grant 8,330,239 - Tang , et al. December 11, 2 | 2012-12-11 |
Methods For Forming A Micro Electro-mechanical Device
App 20120282719 - TANG; JINBANG ; et al. | 2012-11-08 |
Pressure Transducer Having Structure For Monitoring Surface Charge
App 20120125113 - LIU; LIANJUN ; et al. | 2012-05-24 |
Method Of Making A Micro-electro-mechanical-systems (mems) Device
App 20120107993 - Karlin; Lisa H. ; et al. | 2012-05-03 |
MEMS microphone with cavity and method therefor
Grant 8,158,492 - Liu , et al. April 17, 2 | 2012-04-17 |
Three dimensional integrated passive device and method of fabrication
Grant 8,148,793 - Liu April 3, 2 | 2012-04-03 |
MEMS capacitive device and method of forming same
Grant 8,149,564 - Liu , et al. April 3, 2 | 2012-04-03 |
Electrical coupling of wafer structures
Grant 8,138,062 - Liu , et al. March 20, 2 | 2012-03-20 |
Method Of Forming An Electromechanical Transducer Device
App 20120056308 - Perruchot; Francois ; et al. | 2012-03-08 |
Method of forming a micro-electromechanical system (MEMS) having a gap stop
Grant 8,119,431 - Park , et al. February 21, 2 | 2012-02-21 |
Methods For Making In-plane And Out-of-plane Sensing Micro-electro-mechanical Systems (mems)
App 20120001277 - Park; Woo Tae ; et al. | 2012-01-05 |
Stacked And Shielded Packages With Interconnects
App 20110250721 - Bowles; Philip H. ; et al. | 2011-10-13 |
Electromechanical Transducer Device And Method Of Forming A Electromechanical Transducer Device
App 20110233693 - Perruchot; Francois ; et al. | 2011-09-29 |
Semiconductor Device And Method Of Fabricating Same
App 20110221042 - Karlin; Lisa H. ; et al. | 2011-09-15 |
Electromechanical Transducer Device And Method Of Forming A Electromechanical Transducer Device
App 20110221307 - Liu; Lianjun ; et al. | 2011-09-15 |
Electrical Coupling Of Wafer Structures
App 20110143476 - LIU; LIANJUN ; et al. | 2011-06-16 |
Balun signal transformer and method of forming
Grant 7,961,063 - Liu , et al. June 14, 2 | 2011-06-14 |
Micro Electromechanical Systems (mems) Having A Gap Stop And Method Therefor
App 20110133294 - Park; Woo Tae ; et al. | 2011-06-09 |
Radio frequency circuit with integrated on-chip radio frequency inductive signal coupler
Grant 7,869,784 - Liu January 11, 2 | 2011-01-11 |
Microelectromechanical systems component and method of making same
Grant 7,829,366 - Miller , et al. November 9, 2 | 2010-11-09 |
Micromechanical device with piezoelectric and electrostatic actuation and method therefor
Grant 7,830,066 - Liu November 9, 2 | 2010-11-09 |
Mems Microphone With Cavity And Method Therefor
App 20100276767 - Liu; Lianjun ; et al. | 2010-11-04 |
Shielding For A Micro Electro-mechanical Device And Method Therefor
App 20100276766 - Tang; Jinbang ; et al. | 2010-11-04 |
Mems Capacitive Device And Method Of Forming Same
App 20100214716 - Liu; Lianjun ; et al. | 2010-08-26 |
MEMS capacitor with conductively tethered moveable capacitor plate
Grant 7,742,275 - Liu June 22, 2 | 2010-06-22 |
Self-poling piezoelectric MEMs device
Grant 7,732,991 - Liu June 8, 2 | 2010-06-08 |
Three Dimensional Integrated Passive Device And Method Of Fabrication
App 20100117767 - Liu; Lianjun | 2010-05-13 |
Microelecronic Assembly And Method For Forming The Same
App 20100105168 - Ramiah; Chandrasekaram ; et al. | 2010-04-29 |
Balun transformer with improved harmonic suppression
Grant 7,683,733 - Li , et al. March 23, 2 | 2010-03-23 |
Three dimensional integrated passive device and method of fabrication
Grant 7,674,646 - Liu March 9, 2 | 2010-03-09 |
Integrated passive device and method of fabrication
Grant 7,663,196 - Liu , et al. February 16, 2 | 2010-02-16 |
Balun Signal Transformer And Method Of Forming
App 20100026411 - LIU; LIANJUN ; et al. | 2010-02-04 |
Transmitter with improved power efficiency
Grant 7,630,693 - Liu , et al. December 8, 2 | 2009-12-08 |
Control and testing of a micro electromechanical switch having a piezo element
Grant 7,586,238 - Liu September 8, 2 | 2009-09-08 |
Microelectromechanical Systems Component And Method Of Making Same
App 20090218642 - Miller; Melvy F. ; et al. | 2009-09-03 |
Balun Transformer With Improved Harmonic Suppression
App 20090195324 - Li; Qiang ; et al. | 2009-08-06 |
Re-configurable impedance matching and harmonic filter system
Grant 7,567,782 - Liu , et al. July 28, 2 | 2009-07-28 |
Piezoelectric MEMS switches and methods of making
Grant 7,556,978 - Liu July 7, 2 | 2009-07-07 |
Self-poling Piezoelectric Mems Device
App 20090085432 - Liu; Lianjun | 2009-04-02 |
Mems Capacitor With Conductively Tethered Moveable Capacitor Plate
App 20090059465 - Liu; Lianjun | 2009-03-05 |
Micromechanical Device With Piezoelectric And Electrostatic Actuation And Method Therefor
App 20090026880 - Liu; Lianjun | 2009-01-29 |
Control and testing of a micro electromechanical switch
Grant 7,479,785 - Liu , et al. January 20, 2 | 2009-01-20 |
Method Of Making Contact Posts For A Microelectromechanical Device
App 20080314723 - Liu; Lianjun | 2008-12-25 |
Optical monitoring and control system and method for plasma reactors
Grant 7,462,335 - Liu , et al. December 9, 2 | 2008-12-09 |
Integrated Circuit Having Re-configurable Balun Circuit And Method Therefor
App 20080278258 - Liu; Lianjun | 2008-11-13 |
Methods and apparatus for RF shielding in vertically-integrated semiconductor devices
Grant 7,446,017 - Liu , et al. November 4, 2 | 2008-11-04 |
Balun Signal Transformer
App 20080258837 - Liu; Lianjun ; et al. | 2008-10-23 |
Method for manufacturing a passive integrated matching network for power amplifiers
Grant 7,439,606 - Liu , et al. October 21, 2 | 2008-10-21 |
Stacked And Shielded Die Packages With Interconnects
App 20080246126 - Bowles; Philip H. ; et al. | 2008-10-09 |
Radio Frequency Circuit With Integrated On-chip Radio Frequency Inductive Signal Coupler
App 20080207159 - Liu; Lianjun | 2008-08-28 |
Compact radio frequency harmonic filter using integrated passive device technology
Grant 7,418,251 - Liu August 26, 2 | 2008-08-26 |
Methods and apparatus for thermal isolation in vertically-integrated semiconductor devices
Grant 7,414,316 - Liu , et al. August 19, 2 | 2008-08-19 |
Integrated Passive Device And Method Of Fabrication
App 20080191293 - Liu; Lianjun ; et al. | 2008-08-14 |
Three dimensional integrated passive device and method of fabrication
App 20080122560 - Liu; Lianjun | 2008-05-29 |
Transmitter with improved power efficiency
App 20080119214 - Liu; Lianjun ; et al. | 2008-05-22 |
Methods and apparatus for a hybrid antenna switching system
App 20080102762 - Liu; Lianjun ; et al. | 2008-05-01 |
Control And Testing Of A Micro Electromechanical Switch Having A Piezo Element
App 20080042518 - Liu; Lianjun | 2008-02-21 |
Control And Testing Of A Micro Electromechanical Switch
App 20080043523 - Liu; Lianjun ; et al. | 2008-02-21 |
Method For Manufacturing A Passive Integrated Matching Network For Power Amplifiers
App 20080036035 - Liu; Lianjun ; et al. | 2008-02-14 |
Re-configurable impedance matching and harmonic filter system
App 20080026709 - Liu; Lianjun ; et al. | 2008-01-31 |
Methods and apparatus for RF shielding in vertically-integrated semiconductor devices
App 20070281438 - Liu; Lianjun ; et al. | 2007-12-06 |
Radio frequency circuit with integrated on-chip radio frequency signal coupler
Grant 7,305,223 - Liu , et al. December 4, 2 | 2007-12-04 |
Methods and apparatus for a packaged MEMS switch
App 20070236307 - Liu; Lianjun | 2007-10-11 |
Method of manufacturing a passive integrated matching network for power amplifiers
Grant 7,276,420 - Liu , et al. October 2, 2 | 2007-10-02 |
Methods and apparatus for thermal isolation in vertically-integrated semiconductor devices
App 20070205502 - Liu; Lianjun ; et al. | 2007-09-06 |
Piezoelectric MEMS switches and methods of making
App 20070202626 - Liu; Lianjun | 2007-08-30 |
Method of manufacturing a passive integrated matching network for power amplifiers
App 20070007622 - Liu; Lianjun ; et al. | 2007-01-11 |
Methods and apparatus for a MEMS varactor
Grant 7,141,989 - Liu November 28, 2 | 2006-11-28 |
Radio frequency circuit with integrated on-chip radio frequency signal coupler
App 20060141979 - Liu; Lianjun ; et al. | 2006-06-29 |
Compact radio frequency harmonic filter using integrated passive device technology
App 20060141978 - Liu; Lianjun | 2006-06-29 |
Method and apparatus for transferring heat from a substrate to a chuck
Grant 7,017,652 - Mitrovic , et al. March 28, 2 | 2006-03-28 |
Optical monitoring and control system and method for plasma reactors
Grant 7,018,553 - Liu , et al. March 28, 2 | 2006-03-28 |
Method of making a micromechanical device
App 20050088261 - Liu, Lianjun ; et al. | 2005-04-28 |
Dry silylation plasma etch process
Grant 6,809,036 - Liu October 26, 2 | 2004-10-26 |
Method and apparatus for plasma cleaning of workpieces
App 20040200576 - Liu, Lianjun | 2004-10-14 |
Micro-electro-mechanical device and method of making
Grant 6,794,101 - Liu , et al. September 21, 2 | 2004-09-21 |
Method and apparatus for plasma cleaning of workpieces
Grant 6,776,170 - Liu August 17, 2 | 2004-08-17 |
Method of making a micromechanical device
Grant 6,706,548 - Liu March 16, 2 | 2004-03-16 |
Method and apparatus for transferring heat from a substrate to a chuck
App 20040043639 - Mitrovic, Andrej S. ; et al. | 2004-03-04 |
Micro-electro-mechanical device and method of making
App 20030224267 - Liu, Lianjun ; et al. | 2003-12-04 |
Optical monitoring and control system and method for plasma reactors
App 20030201162 - Liu, Lianjun ; et al. | 2003-10-30 |
Method of making a micromechanical device
App 20030129824 - Liu, Lianjun | 2003-07-10 |
Dry silylation plasma etch process
App 20030054658 - Liu, Lianjun | 2003-03-20 |
Method and apparatus for plasma cleaning of workpieces
App 20030047191 - Liu, Lianjun | 2003-03-13 |
Optical monitoring and control system and method for plasma reactors
App 20030038112 - Liu, Lianjun ; et al. | 2003-02-27 |
Method for preventing titanium lifting during and after metal etching
Grant 5,705,428 - Liu , et al. January 6, 1 | 1998-01-06 |
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