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Low dielectric constant film produced from silicon compounds comprising silicon-carbon bond Grant 7,651,725 - Yau , et al. January 26, 2 | 2010-01-26 |
Low Dielectric Constant Film Produced From Silicon Compounds Comprising Silicon-carbon Bond App 20080061439 - Yau; Wai-Fan ;   et al. | 2008-03-13 |
Low Dielectric Constant Film Produced From Silicon Compounds Comprising Silicon-carbon Bond App 20080064225 - Yau; Wai-Fan ;   et al. | 2008-03-13 |
Low Dielectric Constant Film Produced From Silicon Compounds Comprising Silicon-carbon Bond App 20080044557 - YAU; WAI-FAN ;   et al. | 2008-02-21 |
Integrated low k dielectrics and etch stops Grant 7,227,244 - Bjorkman , et al. June 5, 2 | 2007-06-05 |
Method of depositing low k films Grant 7,160,821 - Huang , et al. January 9, 2 | 2007-01-09 |
Method of decreasing the k value in sioc layer deposited by chemical vapor deposition Grant 7,074,708 - Gaillard , et al. July 11, 2 | 2006-07-11 |
Low dielectric constant film produced from silicon compounds comprising silicon-carbon bonds Grant 7,023,092 - Yau , et al. April 4, 2 | 2006-04-04 |
Method of depositing low k films App 20050260864 - Huang, Tzu-Fang ;   et al. | 2005-11-24 |
Low dielectric constant film produced from silicon compounds comprising silicon-carbon bonds App 20050156317 - Yau, Wai-Fan ;   et al. | 2005-07-21 |
Integrated low K dielectrics and etch stops Grant 6,858,153 - Bjorkman , et al. February 22, 2 | 2005-02-22 |
Integrated low k dielectrics and etch stops App 20050023694 - Bjorkman, Claes H. ;   et al. | 2005-02-03 |
Method of depositing low K films Grant 6,806,207 - Huang , et al. October 19, 2 | 2004-10-19 |
Low dielectric constant film produced from silicon compounds comprising silicon-carbon bonds App 20040201103 - Yau, Wai-Fan ;   et al. | 2004-10-14 |
Method of decreasing the K value in SIOC layer deposited by chemical vapor deposition Grant 6,784,119 - Gaillard , et al. August 31, 2 | 2004-08-31 |
Method of decreasing the K value in SIOC layer deposited by chemical vapor deposition App 20040166665 - Gaillard, Frederic ;   et al. | 2004-08-26 |
Method of depositing a low dielectric with organo silane Grant 6,770,556 - Yau , et al. August 3, 2 | 2004-08-03 |
Low dielectric constant film produced from silicon compounds comprising silicon-carbon bond App 20040147109 - Yau, Wai-Fan ;   et al. | 2004-07-29 |
Method of depositing a low K dielectric with organo silane Grant 6,730,593 - Yau , et al. May 4, 2 | 2004-05-04 |
Method of decreasing the K value in SIOC layer deposited by chemical vapor deposition App 20040029400 - Gaillard, Frederic ;   et al. | 2004-02-12 |
Integrated low k dielectrics and etch stops Grant 6,669,858 - Bjorkman , et al. December 30, 2 | 2003-12-30 |
Method of decreasing the K value in SiOC layer deposited by chemical vapor deposition Grant 6,627,532 - Gaillard , et al. September 30, 2 | 2003-09-30 |
Method of depositing low K films App 20030162410 - Huang, Tzu-Fang ;   et al. | 2003-08-28 |
Method of depositing low k films using an oxidizing plasma Grant 6,593,247 - Huang , et al. July 15, 2 | 2003-07-15 |
Method of depositing a low dielectric with organo silane App 20030113992 - Yau, Wai-Fan ;   et al. | 2003-06-19 |
Method of depositing a low k dielectric with organo silane Grant 6,511,903 - Yau , et al. January 28, 2 | 2003-01-28 |
Method of depositing a low K dielectric with organo silane Grant 6,511,909 - Yau , et al. January 28, 2 | 2003-01-28 |
Method of depositing a low K dielectric with organo silane App 20020111042 - Yau, Wai-Fan ;   et al. | 2002-08-15 |
Intergrated low k dielectrics and etch stops App 20020084257 - Bjorkman, Claes H. ;   et al. | 2002-07-04 |
Integrated low k dielectrics and etch stops App 20020074309 - Bjorkman, Claes H. ;   et al. | 2002-06-20 |
Integrated low K dielectrics and etch stops Grant 6,340,435 - Bjorkman , et al. January 22, 2 | 2002-01-22 |
A Low Dielectric Constant Film Produced From Silicon Compounds Comprising Silicon-carbon Bonds App 20020000670 - YAU, WAI-FAN ;   et al. | 2002-01-03 |
Plasma Processes For Depositing Low Dielectric Constant Films App 20010004479 - CHEUNG, DAVID ;   et al. | 2001-06-21 |
Low power method of depositing a low k dielectric with organo silane Grant 6,072,227 - Yau , et al. June 6, 2 | 2000-06-06 |
Method of depositing a low k dielectric with organo silane Grant 6,054,379 - Yau , et al. April 25, 2 | 2000-04-25 |