Liu; Kuo-Shih

Patent Applications and Registrations

Patent applications and USPTO patent grants for Liu; Kuo-Shih.The latest application filed is for "low dose charged particle metrology system".

Company Profile

3.6.12

Liu; Kuo-Shih - Fremont CA
Liu; Kuo-Shih - Taipei City TW
Liu; Kuo-Shih - Milpitas CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods of inspecting samples with multiple beams of charged particles Grant 11,430,631 - Liu , et al. August 30, 2	2022-08-30
Low Dose Charged Particle Metrology System App 20220113637 - Wang; Fei ; et al.	2022-04-14
Low dose charged particle metrology system Grant 11,175,590 - Wang , et al. November 16, 2	2021-11-16
Low Dose Charged Particle Metrology System App 20200333714 - WANG; Fei ; et al.	2020-10-22
Methods Of Inspecting Samples With Multiple Beams Of Charged Particles App 20200227233 - LIU; Kuo-Shih ; et al.	2020-07-16
Using phase difference of interference lithography for resolution enhancement Grant 8,582,079 - Liu , et al. November 12, 2	2013-11-12
Solar Panel And Electrode Structure Thereof And Manufacturing Method Thereof App 20130037076 - WANG; Keh-Yao ; et al.	2013-02-14
Solar Cell Panel App 20120247532 - LIU; Kuo-Shih ; et al.	2012-10-04
Integrated Interference-assisted Lithography App 20100002210 - HENDEL; RUDOLF ; et al.	2010-01-07
Patterning Resolution Enhancement Combining Interference Lithography And Self-aligned Double Patterning Techniques App 20090246706 - HENDEL; RUDOLF ; et al.	2009-10-01
Resolution Enhancement Techniques Combining Interference-assisted Lithography With Other Photolithography Techniques App 20090117491 - Hendel; Rudolf ; et al.	2009-05-07
Resolution Enhancement Techniques Combining Four Beam Interference-assisted Lithography With Other Photolithography Techniques App 20090111056 - Hendel; Rudolf ; et al.	2009-04-30
Using Phase Difference Of Interference Lithography For Resolution Enhancement App 20090046263 - Liu; Kuo-Shih ; et al.	2009-02-19
Reduction of plasma edge effect on plasma enhanced CVD processes Grant 6,553,932 - Liu , et al. April 29, 2	2003-04-29
Reduction of plasma edge effect on plasma enhanced CVD processes App 20010042511 - Liu, Kuo-Shih ; et al.	2001-11-22
Gas feedthrough with electrostatic discharge characteristic Grant 6,170,430 - Liu , et al. January 9, 2	2001-01-09

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