Liu, Fang-Fei
Patent Applications and Registrations
Patent applications and USPTO patent grants for Liu, Fang-Fei.The latest application filed is for "dry clean method instead of traditional wet clean after metal etch".
- Liu, Fang-Fei - Hsin-Chu TW
- Liu; Fang-Fei - Hsinchu Hsien TW
| Patent | Date |
|---|---|
| Dry clean method instead of traditional wet clean after metal etch App 20030104697 - Chang, Hong-Long ; et al. | 2003-06-05 |
| Dry clean method instead of traditional wet clean after metal etch Grant 6,526,996 - Chang , et al. March 4, 2 | 2003-03-04 |
| Post-cleaning method of a via etching process Grant 6,500,766 - Lu , et al. December 31, 2 | 2002-12-31 |
| Post-cleaning method of a via etching process App 20020096494 - Lu, Hungyueh ; et al. | 2002-07-25 |
| Post-cleaning method of a via etching process App 20020081859 - Lu, Hungyueh ; et al. | 2002-06-27 |
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