| Patent | Date |
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Method Of Using High Density Plasma Chemical Vapor Deposition Chamber
App 20220270855 - WU; Wei-Ching ; et al. | 2022-08-25 |
Method Of Manufacturing Semiconductor Device And Semiconductor Devices
App 20220262677 - CHEN; Hsiao-Min ; et al. | 2022-08-18 |
Amorphous Layers for Reducing Copper Diffusion and Method Forming Same
App 20220254679 - Lin; Jyh-Nan ; et al. | 2022-08-11 |
Multi-layer Diffusion Barrier And Method Of Making The Same
App 20220190122 - LIN; Jyh-nan ; et al. | 2022-06-16 |
Electron Migration Control In Interconnect Structures
App 20220181203 - Chen; Chun-Jen ; et al. | 2022-06-09 |
High density plasma chemical vapor deposition chamber and method of using
Grant 11,342,164 - Wu , et al. May 24, 2 | 2022-05-24 |
Method of manufacturing semiconductor devices including formation of adhesion enhancement layer
Grant 11,322,397 - Chen , et al. May 3, 2 | 2022-05-03 |
Amorphous layers for reducing copper diffusion and method forming same
Grant 11,315,829 - Lin , et al. April 26, 2 | 2022-04-26 |
Electron migration control in interconnect structures
Grant 11,264,273 - Chen , et al. March 1, 2 | 2022-03-01 |
Semiconductor device having multi-layer diffusion barrier and method of making the same
Grant 11,264,467 - Lin , et al. March 1, 2 | 2022-03-01 |
Equipment module with enhanced protection from airborne contaminants, and method of operation
Grant 11,194,259 - Chiu , et al. December 7, 2 | 2021-12-07 |
Method Of Manufacturing Semiconductor Devices And Semiconductor Devices
App 20210351041 - HAN; Hui-An ; et al. | 2021-11-11 |
Electron Migration Control In Interconnect Structures
App 20210233805 - CHEN; Chun-Jen ; et al. | 2021-07-29 |
Method of manufacturing semiconductor devices and semiconductor devices
Grant 11,069,534 - Han , et al. July 20, 2 | 2021-07-20 |
High Density Plasma Chemical Vapor Deposition Chamber And Method Of Using
App 20210125811 - WU; Wei-Ching ; et al. | 2021-04-29 |
Aluminum-containing layers and methods of forming the same
Grant 10,978,337 - Lin , et al. April 13, 2 | 2021-04-13 |
Amorphous Layers for Reducing Copper Diffusion and Method Forming Same
App 20210066122 - Lin; Jyh-Nan ; et al. | 2021-03-04 |
Method of controlling an adjustable nozzle and method of making a semiconductor device
Grant 10,910,199 - Wu , et al. February 2, 2 | 2021-02-02 |
Method for controlling plasma in semiconductor fabrication
Grant 10,867,787 - Wu , et al. December 15, 2 | 2020-12-15 |
Coating apparatus and method of forming coating film
Grant 10,864,530 - Wang , et al. December 15, 2 | 2020-12-15 |
Semiconductor device having a shallow trench isolation structure and methods of forming the same
Grant 10,867,838 - Lin , et al. December 15, 2 | 2020-12-15 |
Multi-layer Diffusion Barrier And Method Of Making The Same
App 20200365695 - Lin; Jyh-nan ; et al. | 2020-11-19 |
Semiconductor device having a multi-layer diffusion barrier
Grant 10,749,004 - Lin , et al. A | 2020-08-18 |
Thermal chemical vapor deposition system and operating method thereof
Grant 10,724,140 - Lo , et al. | 2020-07-28 |
Semiconductor Device And Method For Forming The Same
App 20200203473 - LIN; Chun-Li ; et al. | 2020-06-25 |
Method Of Manufacturing Semiconductor Device And Semiconductor Devices
App 20200135553 - CHEN; Hsiao-Min ; et al. | 2020-04-30 |
Method Of Manufacturing Semiconductor Devices And Semiconductor Devices
App 20200135868 - HAN; Hui-An ; et al. | 2020-04-30 |
Deposition device structure
Grant 10,626,499 - Lo , et al. | 2020-04-21 |
Aluminum-Containing Layers and Methods of Forming the Same
App 20200090986 - Lin; Jhy-nan ; et al. | 2020-03-19 |
Equipment Module With Enhanced Protection From Airborne Contaminants, And Method Of Operation
App 20200073258 - Chiu; Chih-Chiang ; et al. | 2020-03-05 |
Showerhead, semicondcutor processing apparatus having the same and semiconductor process
Grant 10,533,252 - Chiu , et al. Ja | 2020-01-14 |
Method For Controlling Plasma In Semiconductor Fabrication
App 20190378714 - WU; Cheng-Tsung ; et al. | 2019-12-12 |
Method and system for controlling plasma in semiconductor fabrication
Grant 10,395,918 - Wu , et al. A | 2019-08-27 |
Deposition Device Structure
App 20190032215 - LO; Yen-Chan ; et al. | 2019-01-31 |
Multi-layer Diffusion Barrier And Method Of Making The Same
App 20190006474 - Lin; Jyh-nan ; et al. | 2019-01-03 |
Semiconductor structure with protection layer
Grant 10,164,063 - Chiang , et al. Dec | 2018-12-25 |
Thermal chemical vapor deposition system and operating method thereof
Grant 10,161,041 - Lo , et al. Dec | 2018-12-25 |
Thermal Chemical Vapor Deposition System and Operating Method Thereof
App 20180334747 - Lo; Yen-Chan ; et al. | 2018-11-22 |
Semiconductor Device Having a Shallow Trench Isolation Structure and Methods of Forming The Same
App 20180240698 - Lin; Chun-Li ; et al. | 2018-08-23 |
Method Of Controlling An Adjustable Nozzle And Method Of Making A Semiconductor Device
App 20180226224 - WU; Wei-Ching ; et al. | 2018-08-09 |
Semiconductor Structure With Protection Layer
App 20180166560 - CHIANG; Chih-Wei ; et al. | 2018-06-14 |
Semiconductor device having a shallow trench isolation structure and methods of forming the same
Grant 9,953,861 - Lin , et al. April 24, 2 | 2018-04-24 |
Adjustable nozzle for plasma deposition and a method of controlling the adjustable nozzle
Grant 9,941,100 - Wu , et al. April 10, 2 | 2018-04-10 |
Substrate heat treatment apparatus and heat treatment method
Grant 9,859,137 - Kuo , et al. January 2, 2 | 2018-01-02 |
Structure and method of semiconductor device structure with gate
Grant 9,859,113 - Li , et al. January 2, 2 | 2018-01-02 |
Gap fill self planarization on post EPI
Grant 9,831,307 - Chen , et al. November 28, 2 | 2017-11-28 |
Showerhead, Semicondcutor Processing Apparatus Having The Same And Semiconductor Process
App 20170283948 - Chiu; Chih-Chiang ; et al. | 2017-10-05 |
Interlayer dielectric structure with high aspect ratio process (HARP)
Grant 9,716,044 - Chang , et al. July 25, 2 | 2017-07-25 |
Coating Apparatus And Method Of Forming Coating Film
App 20170157625 - WANG; Lan-Hai ; et al. | 2017-06-08 |
Apparatus for dielectric deposition process
Grant 9,631,273 - Wang , et al. April 25, 2 | 2017-04-25 |
Thermal Chemical Vapor Deposition System And Operating Method Thereof
App 20170107619 - LO; Yen-Chan ; et al. | 2017-04-20 |
High density plasma reactor with multiple top coils
Grant 9,607,809 - Lo , et al. March 28, 2 | 2017-03-28 |
Apparatus and operation method thereof
Grant 9,607,873 - Liao , et al. March 28, 2 | 2017-03-28 |
Gap Fill Self Planarization On Post Epi
App 20170084689 - Chen; Po-Chang ; et al. | 2017-03-23 |
Semiconductor Apparatus And Cleaning Method For The Semiconductor Apparatus
App 20170053783 - TSENG; Yin-Bin ; et al. | 2017-02-23 |
Coating apparatus and method of forming coating film
Grant 9,573,144 - Wang , et al. February 21, 2 | 2017-02-21 |
Gap fill self planarization on post EPI
Grant 9,536,771 - Chen , et al. January 3, 2 | 2017-01-03 |
Method And System For Controlling Plasma In Semiconductor Fabrication
App 20160343625 - WU; Cheng-Tsung ; et al. | 2016-11-24 |
Asymmetrical chamber configuration
Grant 9,490,152 - Wang , et al. November 8, 2 | 2016-11-08 |
Structure And Method Of Semiconductor Device Structure With Gate
App 20160307758 - LI; Jing-Yang ; et al. | 2016-10-20 |
Semiconductor Device Having A Shallow Trench Isolation Structure And Methods Of Forming The Same
App 20160148833 - Lin; Chun-Li ; et al. | 2016-05-26 |
Thin film deposition apparatus with multi chamber design and film deposition methods
Grant 9,324,559 - Wang , et al. April 26, 2 | 2016-04-26 |
Semiconductor structure with anti-etch structure in via and method for manufacturing the same
Grant 9,209,071 - Chang , et al. December 8, 2 | 2015-12-08 |
Coating Apparatus And Method Of Forming Coating Film
App 20150348779 - WANG; Lan-Hai ; et al. | 2015-12-03 |
Substrate Heat Treatment Apparatus And Heat Treatment Method
App 20150348847 - KUO; Chun-Cha ; et al. | 2015-12-03 |
Semiconductor Structure With Anti-Etch Structure In Via And Method For Manufacturing The Same
App 20150279729 - Chang; Geng-Shuoh ; et al. | 2015-10-01 |
Apparatus And Operation Method Thereof
App 20150228516 - LIAO; SI-WEN ; et al. | 2015-08-13 |
Profile pre-shaping for replacement poly gate interlayer dielectric
Grant 9,048,185 - Chiang , et al. June 2, 2 | 2015-06-02 |
Method of forming interlayer dielectric film above metal gate of semiconductor device
Grant 8,946,095 - Chen , et al. February 3, 2 | 2015-02-03 |
Pre-treatment Method For Metal-oxide Reduction And Device Formed
App 20150001728 - CHEN; Li ; et al. | 2015-01-01 |
Thin Film Deposition Apparatus With Multi Chamber Design And Film Deposition Methods
App 20140377961 - Wang; Lan Hai ; et al. | 2014-12-25 |
Profile Pre-shaping For Replacement Poly Gate Interlayer Dielectric
App 20140349471 - Chiang; Chih-Wei ; et al. | 2014-11-27 |
Mechanism of patterning a semiconductor device and product resulting therefrom
Grant 8,884,404 - Li , et al. November 11, 2 | 2014-11-11 |
Gas delivery for uniform film properties at UV curing chamber
Grant 8,872,138 - Lu , et al. October 28, 2 | 2014-10-28 |
Gap Fill Self Planarization on Post EPI
App 20140306294 - Chen; Po-Chang ; et al. | 2014-10-16 |
High Density Plasma Reactor With Multiple Top Coils
App 20140273537 - LO; Chi-Ching ; et al. | 2014-09-18 |
Gas Delivery For Uniform Film Properties At Uv Curing Chamber
App 20140231671 - LU; Yu-Ying ; et al. | 2014-08-21 |
Profile pre-shaping for replacement poly gate interlayer dielectric
Grant 8,803,249 - Chiang , et al. August 12, 2 | 2014-08-12 |
Method Of Forming Interlayer Dielectric Film Above Metal Gate Of Semiconductor Device
App 20140120706 - Chen; LI ; et al. | 2014-05-01 |
Profile Pre-shaping For Replacement Poly Gate Interlayer Dielectric
App 20140042553 - Chiang; Chih-Wei ; et al. | 2014-02-13 |
Apparatus for Dielectric Deposition Process
App 20140026813 - Wang; Lan-Hai ; et al. | 2014-01-30 |
Asymmetrical Chamber Configuration
App 20130319543 - Wang; Lan-Hai ; et al. | 2013-12-05 |
Semiconductor Device And Method For Forming The Same
App 20130292791 - LIN; Chun-Li ; et al. | 2013-11-07 |
Mechanism Of Patterning A Semiconductor Device And Product Resulting Therefrom
App 20130228899 - LI; Yi-Fang ; et al. | 2013-09-05 |
Wafer Curing Apparatus Having Improved Shrinkage
App 20130193350 - Lu; Yu-Ying ; et al. | 2013-08-01 |
Adjustable Nozzle For Plasma Deposition And A Method Of Controlling The Adjustable Nozzle
App 20130156940 - WU; Wei-Ching ; et al. | 2013-06-20 |
Interlayer Dielectric Structure And Method Making The Same
App 20130043539 - Chang; Jen-Chi ; et al. | 2013-02-21 |
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