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Light Source, Euv Lithography System, And Method For Performing Circuit Layout Patterning Process
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Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20220260922 - HSIEH; Chieh ; et al. | 2022-08-18 |
EUV radiation modification methods and systems
Grant 11,419,203 - Chang , et al. August 16, 2 | 2022-08-16 |
Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof
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Radiation Source For Lithography Process
App 20220197160 - WU; Shang-Ying ; et al. | 2022-06-23 |
Extreme Ultraviolet Mask And Method Of Manufacturing The Same
App 20220197127 - SHIH; Chih-Tsung ; et al. | 2022-06-23 |
Light source, EUV lithography system, and method for generating EUV radiation
Grant 11,333,983 - Yang , et al. May 17, 2 | 2022-05-17 |
Extreme ultraviolet mask and method of manufacturing the same
Grant 11,275,301 - Shih , et al. March 15, 2 | 2022-03-15 |
Radiation source for lithography process
Grant 11,275,318 - Wu , et al. March 15, 2 | 2022-03-15 |
Apparatus and method for generating extreme ultraviolet radiation
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System and method for extreme ultraviolet source control
Grant 11,224,115 - Hsu , et al. January 11, 2 | 2022-01-11 |
Extreme Ultraviolet Lithography Method, Extreme Ultraviolet Mask And Formation Method Thereof
App 20210389661 - SHIH; Chih-Tsung ; et al. | 2021-12-16 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20210274627 - LAI; Wei-Chih ; et al. | 2021-09-02 |
EUV vessel inspection method and related system
Grant 11,092,555 - Chang , et al. August 17, 2 | 2021-08-17 |
Light Source For Lithography Exposure Process
App 20210243875 - HSIEH; Chieh ; et al. | 2021-08-05 |
Residual gain monitoring and reduction for EUV drive laser
App 20210235572 - Chang; Chun-Lin Louis ; et al. | 2021-07-29 |
Euv Lithography System And Method For Decreasing Debris In Euv Lithography System
App 20210223708 - YANG; Chi ; et al. | 2021-07-22 |
Radiation Source For Lithography Process
App 20210173316 - WU; Shang-Ying ; et al. | 2021-06-10 |
Euv Radiation Modification Methods And Systems
App 20210168923 - CHANG; Chun-Lin Louis ; et al. | 2021-06-03 |
Apparatus and method for generating extreme ultraviolet radiation
Grant 11,013,097 - Lai , et al. May 18, 2 | 2021-05-18 |
Light source for lithography exposure process
Grant 10,993,308 - Hsieh , et al. April 27, 2 | 2021-04-27 |
Residual gain monitoring and reduction for EUV drive laser
Grant 10,980,100 - Chang , et al. April 13, 2 | 2021-04-13 |
Method for detecting EUV pellicle rupture
Grant 10,976,674 - Shih , et al. April 13, 2 | 2021-04-13 |
Radiation source apparatus and method for decreasing debris in radiation source apparatus
Grant 10,955,762 - Yang , et al. March 23, 2 | 2021-03-23 |
System and Method for Extreme Ultraviolet Source Control
App 20210068241 - Hsu; Chun-Chia ; et al. | 2021-03-04 |
Light Source, Euv Lithography System, And Method For Generating Euv Radiation
App 20210055664 - YANG; Chi ; et al. | 2021-02-25 |
Radiation source for lithography process
Grant 10,928,741 - Wu , et al. February 23, 2 | 2021-02-23 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20210041787 - HSIEH; Chieh ; et al. | 2021-02-11 |
EUV radiation modification methods and systems
Grant 10,917,959 - Chang , et al. February 9, 2 | 2021-02-09 |
System and method for extreme ultraviolet source control
Grant 10,842,009 - Hsu , et al. November 17, 2 | 2020-11-17 |
Euv Vessel Inspection Method And Related System
App 20200348241 - CHANG; Chun-Lin Louis ; et al. | 2020-11-05 |
Radiation Source Apparatus And Method For Decreasing Debris In Radiation Source Apparatus
App 20200348607 - YANG; Chi ; et al. | 2020-11-05 |
Light source, EUV lithography system, and method for generating EUV radiation
Grant 10,824,083 - Yang , et al. November 3, 2 | 2020-11-03 |
Light source for lithography exposure process
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Radiation Source For Lithography Process
App 20200278617 - WU; Shang-Ying ; et al. | 2020-09-03 |
EUV vessel inspection method and related system
Grant 10,718,718 - Chang , et al. | 2020-07-21 |
Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system
Grant 10,712,676 - Yang , et al. | 2020-07-14 |
Radiation source for lithography process
Grant 10,656,539 - Wu , et al. | 2020-05-19 |
Residual gain monitoring and reduction for EUV drive laser
App 20200146137 - Chang; Chun-Lin Louis ; et al. | 2020-05-07 |
Light Source For Lithography Exposure Process
App 20200142318 - CHEN; Hsin-Feng ; et al. | 2020-05-07 |
Method Of Reducing Undesired Light Influence In Extreme Ultraviolet Exposure
App 20200133127 - SHIH; Chih-Tsung ; et al. | 2020-04-30 |
Extreme Ultraviolet Mask And Method Of Manufacturing The Same
App 20200073225 - SHIH; Chih-Tsung ; et al. | 2020-03-05 |
Radiation Source Apparatus, Euv Lithography System, And Method For Decreasing Debris In Euv Lithography System
App 20200073261 - YANG; Chi ; et al. | 2020-03-05 |
Light Source For Lithography Exposure Process
App 20200068696 - HSIEH; Chieh ; et al. | 2020-02-27 |
Method For Detecting Euv Pellicle Rupture
App 20200057383 - SHIH; Chih-Tsung ; et al. | 2020-02-20 |
Euv Vessel Inspection Method And Related System
App 20200025688 - CHANG; Chun-Lin Louis ; et al. | 2020-01-23 |
Euv Radiation Modification Methods And Systems
App 20200026179 - CHANG; Chun-Lin Louis ; et al. | 2020-01-23 |
Residual gain monitoring and reduction for EUV drive laser
Grant 10,524,345 - Chang , et al. Dec | 2019-12-31 |
Light source for lithography exposure process
Grant 10,509,324 - Chen , et al. Dec | 2019-12-17 |
EUV source generation method and related system
Grant 10,506,698 - Chang , et al. Dec | 2019-12-10 |
Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system
Grant 10,495,987 - Yang , et al. De | 2019-12-03 |
Light source for lithography exposure process
Grant 10,477,663 - Hsieh , et al. Nov | 2019-11-12 |
Light Source For Lithography Exposure Process
App 20190310556 - CHEN; Hsin-Feng ; et al. | 2019-10-10 |
EUV radiation modification methods and systems
Grant 10,429,729 - Chang , et al. O | 2019-10-01 |
EUV vessel inspection method and related system
Grant 10,429,314 - Chang , et al. October 1, 2 | 2019-10-01 |
System and Method for Extreme Ultraviolet Source Control
App 20190289706 - Hsu; Chun-Chia ; et al. | 2019-09-19 |
Method for lithographic process and lithographic system
Grant 10,361,134 - Lai , et al. | 2019-07-23 |
Light source for lithography exposure process
Grant 10,338,475 - Chen , et al. | 2019-07-02 |
Apparatus and method for generating extreme ultraviolet radiation
Grant 10,342,109 - Lai , et al. | 2019-07-02 |
System and method for extreme ultraviolet source control
Grant 10,314,154 - Hsu , et al. | 2019-06-04 |
System and Method for Extreme Ultraviolet Source Control
App 20190166680 - Hsu; Chun-Chia ; et al. | 2019-05-30 |
Radiation Source For Lithography Process
App 20190155179 - WU; Shang-Ying ; et al. | 2019-05-23 |
Methods and Systems for Aligning Master Oscillator Power Amplifier Systems
App 20190157828 - Chang; Chun-Lin Louis ; et al. | 2019-05-23 |
Light Source For Lithography Exposure Process
App 20190155157 - Chen; Hsin-Feng ; et al. | 2019-05-23 |
Light Source For Lithography Exposure Process
App 20190150265 - HSIEH; Chieh ; et al. | 2019-05-16 |
Droplet Generator And Method Of Servicing Extreme Ultraviolet Imaging Tool
App 20190150266 - LAI; Wei-Chih ; et al. | 2019-05-16 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20190150262 - LAI; Wei-Chih ; et al. | 2019-05-16 |
Apparatus And Method For Generating Extreme Ultraviolet Radiation
App 20190150263 - LAI; Wei-Chih ; et al. | 2019-05-16 |
Light Source, Euv Lithography System, And Method For Generating Euv Radiation
App 20190094717 - YANG; Chi ; et al. | 2019-03-28 |
Radiation Source Apparatus, Euv Lithography System, And Method For Decreasing Debris In Euv Lithography System
App 20190094718 - YANG; Chi ; et al. | 2019-03-28 |
Method For Lithographic Process And Lithographic System
App 20190067132 - LAI; Wei-Chih ; et al. | 2019-02-28 |
Euv Vessel Inspection Method And Related System
App 20190033225 - CHANG; Chun-Lin Louis ; et al. | 2019-01-31 |
Apparatus for decontaminating windows of an EUV source module
Grant 10,165,664 - Chen , et al. Dec | 2018-12-25 |
Euv Radiation Modification Methods And Systems
App 20180314145 - CHANG; Chun-Lin Louis ; et al. | 2018-11-01 |
Residual Gain Monitoring and Reduction for EUV Drive Laser
App 20180317308 - Chang; Chun-Lin Louis ; et al. | 2018-11-01 |
Euv Source Generation Method And Related System
App 20180317309 - CHANG; Chun-Lin Louis ; et al. | 2018-11-01 |
Lithography system and method for mask inspection
Grant 9,618,855 - Tsai , et al. April 11, 2 | 2017-04-11 |
Lithography System and Method For Mask Inspection
App 20140226143 - Tsai; Fei-Gwo ; et al. | 2014-08-14 |
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