Liu; Benjamin Y. H.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Liu; Benjamin Y. H..The latest application filed is for "apparatus and method for vapor generation and film deposition".

Company Profile

0.72.53

Liu; Benjamin Y. H. - North Oaks MN
Liu; Benjamin Y. H. - Minneapolis MN

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus for real-time size-distributed measurement of aerosol mass concentration Grant 11,085,861 - Chen , et al. August 10, 2	2021-08-10
Apparatus and method for vapor generation and film deposition Grant 10,287,679 - Dinh , et al.	2019-05-14
Method and apparatus for generating monodisperse aerosols Grant 9,895,707 - Duan , et al. February 20, 2	2018-02-20
Apparatus and method for vapor generation and film deposition App 20180044789 - Dinh; Thuc M. ; et al.	2018-02-15
Apparatus and method for vapor generation and film deposition Grant 9,797,593 - Dinh , et al. October 24, 2	2017-10-24
Electrical ionizer for aerosol charge conditioning and measurement Grant 9,764,333 - Dick , et al. September 19, 2	2017-09-19
Electrospray ionizer for mass spectrometry of aerosol particles Grant 9,768,005 - He , et al. September 19, 2	2017-09-19
E-cigarette actuator App 20170020198 - Naqwi; Amir ; et al.	2017-01-26
Particle sampling and measurement in the ambient air Grant 9,541,488 - Liu , et al. January 10, 2	2017-01-10
Apparatus and method for vapor generation and film deposition App 20160334099 - Dinh; Thuc M. ; et al.	2016-11-17
Air conditioning system with vapor bypassing App 20160091228 - Naqwi; Amir A. ; et al.	2016-03-31
Method And Apparatus For Generating Monodisperse Aerosols App 20150314317 - Duan; Hongxu ; et al.	2015-11-05
Method and apparatus for vapor and gas filtration Grant 9,089,800 - Liu , et al. July 28, 2	2015-07-28
Fine droplet atomization for liquid precursor vaporization Grant 8,986,784 - Liu , et al. March 24, 2	2015-03-24
Method and apparatus for vapor generation and wafer cleaning Grant 8,945,281 - Dinh , et al. February 3, 2	2015-02-03
Liquid flow control for film deposition Grant 8,783,652 - Dinh , et al. July 22, 2	2014-07-22
Apparatus for vapor condensation and recovery Grant 8,728,240 - Liu , et al. May 20, 2	2014-05-20
Apparatus for counting particles in a gas Grant 8,711,338 - Liu , et al. April 29, 2	2014-04-29
Apparatus for filtration and gas-vapor mixing in thin film deposition App 20140096715 - Liu; Benjamin Y.H. ; et al.	2014-04-10
Particle Sampling And Measurement In The Ambient Air App 20140083167 - Liu; Benjamin Y. H. ; et al.	2014-03-27
High stability and high capacity precursor vapor generation for thin film deposition Grant 8,603,580 - Liu December 10, 2	2013-12-10
Apparatus for counting particles in a gas Grant 8,603,247 - Liu , et al. December 10, 2	2013-12-10
Integrated system for vapor generation and thin film deposition App 20130312674 - Liu; Benjamin Y.H. ; et al.	2013-11-28
Fine droplet atomizer for liquid precursor vaporization App 20130292485 - Liu; Benjamin Y.H. ; et al.	2013-11-07
Apparatus for vapor condensation and recovery App 20130295749 - Liu; Benjamin Y.H. ; et al.	2013-11-07
Method for vapor condensation and recovery App 20130295776 - Liu; Benjamin Y.H. ; et al.	2013-11-07
Method and apparatus for generating vapor at high rates Grant 8,554,064 - Dinh , et al. October 8, 2	2013-10-08
Apparatus for counting particles in a gas App 20130239888 - Liu; Benjamin Y.H. ; et al.	2013-09-19
Liquid flow control for film deposition App 20130233395 - Dinh; Thuc M. ; et al.	2013-09-12
Method for liquid precursor atomization Grant 8,529,985 - Liu September 10, 2	2013-09-10
Fine droplet atomizer for liquid precursor vaporization Grant 8,511,583 - Liu , et al. August 20, 2	2013-08-20
Method and apparatus for vapor and gas filtration App 20130203264 - Liu; Benjamin Y.H. ; et al.	2013-08-08
Method for counting particles in a gas Grant 8,465,791 - Liu , et al. June 18, 2	2013-06-18
Method for liquid precursor atomization App 20130064976 - Liu; Benjamin Y.H.	2013-03-14
Apparatus for liquid precursor atomization Grant 8,393,599 - Liu March 12, 2	2013-03-12
Method and apparatus for counting particles in a gas App 20130036973 - Liu; Benjamin Y.H. ; et al.	2013-02-14
Method for generating charged particles App 20120315768 - Dick; William ; et al.	2012-12-13
Method and apparatus for liquid precursor atomization App 20120132723 - Liu; Benjamin Y.H.	2012-05-31
Method and apparatus for liquid precursor atomization Grant 8,132,793 - Liu March 13, 2	2012-03-13
Integrated system for vapor generation and thin film deposition App 20110232588 - Liu; Benjamin Y.H. ; et al.	2011-09-29
Electrical ionizer for aerosol charge conditioning and measurement App 20110220811 - Dick; William ; et al.	2011-09-15
Fine droplet atomizer for liquid precursor vaporization App 20110192909 - Liu; Benjamin Y.H. ; et al.	2011-08-11
Method for generating charged particles App 20110097507 - Dick; William ; et al.	2011-04-28
Method and apparatus for counting particles in a gas App 20110091649 - Liu; Benjamin Y.H. ; et al.	2011-04-21
Method and apparatus for generating charged particles for deposition on a surface Grant 7,882,799 - Dick , et al. February 8, 2	2011-02-08
Apparatus for high-accuracy fiber counting in air Grant 7,830,510 - Liu , et al. November 9, 2	2010-11-09
High accuracy vapor generation and delivery for thin film deposition App 20100203244 - Liu; Benjamin Y.H. ; et al.	2010-08-12
Apparatus For High-accuracy Fiber Counting In Air App 20100085569 - Liu; Benjamin Y.H. ; et al.	2010-04-08
Method and apparatus for liquid precursor atomization App 20100065972 - Liu; Benjamin Y.H.	2010-03-18
Apparatus for filtration and gas-vapor mixing in thin film deposition App 20090293807 - Liu; Benjamin Y.H. ; et al.	2009-12-03
Method And Apparatus For Particle Filtration And Enhancing Tool Performance In Film Deposition App 20090084315 - Liu; Benjamin Y.H. ; et al.	2009-04-02
Aerosol measurement by dilution and particle counting Grant 7,363,828 - Liu April 29, 2	2008-04-29
Personal mask test system Grant 7,325,441 - Liu , et al. February 5, 2	2008-02-05
Aerosol measurement by dilution and particle counting App 20070242261 - Liu; Benjamin Y.H.	2007-10-18
Synthesis of nanoporous particles Grant 7,276,224 - Zachariah , et al. October 2, 2	2007-10-02
Electrostatic precipitator for diesel blow-by Grant 7,267,711 - Liu September 11, 2	2007-09-11
Synthesis Of Nanoporous Particles App 20070207084 - Zachariah; Michael R. ; et al.	2007-09-06
High stability and high capacity precursor vapor generation for thin film deposition App 20070120275 - Liu; Benjamin Y.H.	2007-05-31
Method and apparatus for automatic cell and biological sample preparation and detection App 20060281143 - Liu; Benjamin Y.H. ; et al.	2006-12-14
Cascade impactor with individually driven impactor plates Grant 7,082,811 - Marple , et al. August 1, 2	2006-08-01
High accuracy vapor generation and delivery for thin film deposition App 20060144338 - Liu; Benjamin Y.H. ; et al.	2006-07-06
Method and apparatus for generating charged particles for deposition on a surface App 20060093737 - Dick; William ; et al.	2006-05-04
Personal mask test system App 20060048783 - Liu; Benjamin Y.H. ; et al.	2006-03-09
High-performance vaporizer for liquid-precursor and multi-liquid-precursor vaporization in semiconductor thin film deposition App 20050147749 - Liu, Benjamin Y.H. ; et al.	2005-07-07
Electrostatic precipitator with internal power supply Grant 6,902,604 - Heckel , et al. June 7, 2	2005-06-07
Electrostatic precipitator for diesel blow-by App 20050061152 - Liu, Benjamin Y.H.	2005-03-24
Cascade impactor with individually driven impactor plates App 20050028616 - Marple, Virgil A. ; et al.	2005-02-10
Method and apparatus for cascade impactor testing of inhalable drug therapies recovery for chemical analysis App 20040250634 - Liu, Benjamin Y.H. ; et al.	2004-12-16
Compact, high-efficiency condensation nucleus counter Grant 6,829,044 - Liu December 7, 2	2004-12-07
Electrostatic precipitator with internal power supply App 20040226449 - Heckel, Scott P. ; et al.	2004-11-18
Method and apparatus for vapor generation and film deposition Grant 6,805,907 - Sun , et al. October 19, 2	2004-10-19
Scanning deposition head for depositing particles on a wafer Grant 6,746,539 - Sun , et al. June 8, 2	2004-06-08
Method and apparatus for cascade impactor testing of inhalable drug therapies recovery for chemical analysis Grant 6,723,568 - Liu , et al. April 20, 2	2004-04-20
Compact, high-efficiency condensation nucleus counter App 20030202169 - Liu, Benjamin Y.H.	2003-10-30
Wide-range particle counter Grant 6,639,671 - Liu October 28, 2	2003-10-28
Method and apparatus for deposition of particles on surfaces Grant 6,607,597 - Sun , et al. August 19, 2	2003-08-19
Suspended particle container for an atomizer Grant 6,601,777 - Sun , et al. August 5, 2	2003-08-05
Sampler for eliminating particle-related artifacts for flue gas measurement Grant 6,561,045 - Liu , et al. May 13, 2	2003-05-13
Automatic condensed oil remover Grant 6,527,821 - Liu , et al. March 4, 2	2003-03-04
Method and apparatus for vapor generation and film deposition App 20020192375 - Sun, James J. ; et al.	2002-12-19
Efficient high-productivity cascade impactors Grant 6,453,758 - Marple , et al. September 24, 2	2002-09-24
Method and apparatus for deposition of particles on surfaces App 20020100416 - Sun, James J. ; et al.	2002-08-01
Suspended Particle Container For An Atomizer App 20020103657 - Sun, James J. ; et al.	2002-08-01
Scanning deposition head for depositing particles on a wafer App 20020100424 - Sun, James J. ; et al.	2002-08-01
Compact high efficiency electrostatic precipitator for droplet aerosol collection App 20020092424 - Liu, Benjamin Y.H. ; et al.	2002-07-18
Method and apparatus for vapor generation and film deposition Grant 6,409,839 - Sun , et al. June 25, 2	2002-06-25
Method and apparatus for thin film deposition on large area substrates Grant 6,349,668 - Sun , et al. February 26, 2	2002-02-26
Sampler for eliminating particle-related artifacts for flue gas measurement App 20010032519 - Liu, Benjamin Y.H. ; et al.	2001-10-25
Compact high efficiency electrostatic precipitator for droplet aerosol collection App 20010020417 - Liu, Benjamin Y.H. ; et al.	2001-09-13
Compact electrostatic precipitator for droplet aerosol collection Grant 6,221,136 - Liu , et al. April 24, 2	2001-04-24
High output PSL aerosol generator Grant 5,609,798 - Liu , et al. March 11, 1	1997-03-11
Method and apparatus for depositing particles on surfaces Grant 5,534,309 - Liu July 9, 1	1996-07-09
Condensation-growth particle scrubber Grant 5,176,723 - Liu , et al. January 5, 1	1993-01-05
High output monodisperse aerosol generator Grant 5,160,664 - Liu November 3, 1	1992-11-03
High volume PM.sub.10 sampling inlet Grant 5,040,424 - Marple , et al. August 20, 1	1991-08-20
Particle concentrating sampler Grant 4,972,957 - Liu , et al. November 27, 1	1990-11-27
Cyclone personal sampler for aerosols Grant 4,941,899 - Liu July 17, 1	1990-07-17
System for airborne particle measurement in a vacuum Grant 4,928,537 - Liu , et al. May 29, 1	1990-05-29
Non-contaminating flow visualization system Grant 4,875,340 - Liu , et al. October 24, 1	1989-10-24
Cartridge personal sampling impactor Grant 4,827,779 - Marple , et al. May 9, 1	1989-05-09
System for surface and fluid cleaning Grant 4,817,652 - Liu , et al. April 4, 1	1989-04-04
Non-contaminating flow visualization system Grant 4,771,608 - Liu , et al. September 20, 1	1988-09-20
Particle shield Grant 4,718,975 - Bowling , et al. January 12, 1	1988-01-12
High volume virtual impactor Grant 4,670,135 - Marple , et al. June 2, 1	1987-06-02
Method of recycling collected exhaust particles Grant 4,338,784 - Liu , et al. July 13, 1	1982-07-13
Apparatus for recycling collected exhaust particles Grant 4,316,360 - Liu , et al. February 23, 1	1982-02-23
Method for reducing particulates discharged by combustion means Grant 4,304,096 - Liu , et al. December 8, 1	1981-12-08
Solar heat collector Grant 4,015,582 - Liu , et al. April 5, 1	1977-04-05
Method and apparatus for generating dry dust particles Grant 3,997,433 - Liu , et al. December 14, 1	1976-12-14
Method And Apparatus For Generating Monodisperse Aerosol Grant 3,790,079 - Berglund , et al. February 5, 1	1974-02-05