Littau; Michael E.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Littau; Michael E..The latest application filed is for "determination of center of focus by parameter variability analysis".
- Littau; Michael E. - Bend OR
- Littau; Michael E. - Albuquerque NM
| Patent | Date |
|---|---|
| Determination of center of focus by parameter variability analysis Grant 7,119,893 - Littau , et al. October 10, 2 | 2006-10-10 |
| Determination of center of focus by cross-section analysis Grant 7,110,099 - Littau , et al. September 19, 2 | 2006-09-19 |
| Determination of center of focus by parameter variability analysis App 20040233445 - Littau, Michael E. ; et al. | 2004-11-25 |
| Determination of center of focus by cross-section analysis App 20040223137 - Littau, Michael E. ; et al. | 2004-11-11 |
| Scatterometric measurement of undercut multi-layer diffracting signatures App 20030197872 - Littau, Michael E. ; et al. | 2003-10-23 |
| Determination of center of focus by diffraction signature analysis Grant 6,606,152 - Littau , et al. August 12, 2 | 2003-08-12 |
| Determination of center of focus by diffraction signature analysis App 20030002031 - Littau, Michael E. ; et al. | 2003-01-02 |
| Determination of center of focus by diffraction signature analysis Grant 6,429,930 - Littau , et al. August 6, 2 | 2002-08-06 |
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