Lischke; Burkhard

Patent Applications and Registrations

Patent applications and USPTO patent grants for Lischke; Burkhard.The latest application filed is for "method for producing beam-shaping diaphragms for lithographic devices".

Company Profile

0.17.0

Lischke; Burkhard - Munich DE
Lischke; Burkhard - Muenchen DE
Lischke; Burkhard - Berlin DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for producing beam-shaping diaphragms for lithographic devices Grant 5,049,460 - Benecke , et al. September 17, 1	1991-09-17
Method for manufacturing a control plate for a lithographic device Grant 4,994,336 - Benecke , et al. February 19, 1	1991-02-19
Particle beam measuring method for non-contact testing of interconnect networks Grant 4,985,681 - Brunner , et al. January 15, 1	1991-01-15
Aperture diaphragm for a lithography apparatus Grant 4,982,099 - Lischke January 1, 1	1991-01-01
Method for examining a specimen in a particle beam instrument Grant 4,954,705 - Brunner , et al. September 4, 1	1990-09-04
Diaphragm system for generating a plurality of particle probes haivng variable cross section Grant 4,899,060 - Lischke February 6, 1	1990-02-06
Arrangement for optical image processing Grant 4,786,149 - Hoenig , et al. November 22, 1	1988-11-22
Lithographic apparatus for the production of microstructures Grant 4,724,328 - Lischke February 9, 1	1988-02-09
Arrangement for detecting secondary and/or backscatter electrons in an electron beam apparatus Grant 4,714,833 - Rose , et al. December 22, 1	1987-12-22
Apparatus and method for measuring lengths in a scanning particle microscope Grant 4,677,296 - Lischke , et al. June 30, 1	1987-06-30
Sampling method for fast potential determination in electron beam mensuration Grant 4,623,836 - Frosien , et al. November 18, 1	1986-11-18
Arrangement for testing micro interconnections and a method for operating the same Grant 4,587,481 - Lischke , et al. May 6, 1	1986-05-06
Method for the contact-free testing of microcircuits or the like with a particle beam probe Grant 4,573,008 - Lischke February 25, 1	1986-02-25
Spectrometer objective for particle beam measurement technique Grant 4,551,625 - Lischke , et al. November 5, 1	1985-11-05
Method and device for determining the focal length of a long focal length electron optical lens Grant 4,246,487 - Anger , et al. January 20, 1	1981-01-20
Charged-particle beam optical apparatus for imaging a mask on a specimen Grant 4,164,658 - Frosien , et al. August 14, 1	1979-08-14
Charged-particle beam optical apparatus for the reduction imaging of a mask on a specimen Grant 4,140,913 - Anger , et al. February 20, 1	1979-02-20

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