| Patent | Date |
|---|
Load Lock With Integrated Features
App 20210296146 - Blanchard; Michael ; et al. | 2021-09-23 |
Hybrid Control System For Workpiece Heating
App 20200395233 - Strassner; James D. ; et al. | 2020-12-17 |
Method And Apparatus For Calibration Of Substrate Temperature Using Pyrometer
App 20200378832 - Wilson; Eric D. ; et al. | 2020-12-03 |
Enhanced Substrate Temperature Measurement Apparatus, System And Method
App 20200378837 - Sun; Dawei ; et al. | 2020-12-03 |
System And Apparatus For Enhanced Substrate Heating And Rapid Substrate Cooling
App 20200381271 - Sun; Dawei ; et al. | 2020-12-03 |
Substrate handling and heating system
Grant 10,443,934 - Evans , et al. Oc | 2019-10-15 |
Apparatus for heating and processing a substrate
Grant 9,685,303 - Evans , et al. June 20, 2 | 2017-06-20 |
Apparatus for improving temperature uniformity of a workpiece
Grant 9,633,875 - Sun , et al. April 25, 2 | 2017-04-25 |
Hybrid thermal electrostatic clamp
Grant 9,633,886 - Evans , et al. April 25, 2 | 2017-04-25 |
Substrate Handling And Heating System
App 20160329458 - Evans; Morgan D. ; et al. | 2016-11-10 |
Apparatus For Heating And Processing A Substrate
App 20160329190 - Evans; Morgan D. ; et al. | 2016-11-10 |
Hybrid Thermal Electrostatic Clamp
App 20160307786 - Evans; Morgan D. ; et al. | 2016-10-20 |
Apparatus For Improving Temperature Uniformity Of A Workpiece
App 20160268150 - Sun; Dawei ; et al. | 2016-09-15 |
Dynamic heating method and system for wafer processing
Grant 9,287,148 - Evans , et al. March 15, 2 | 2016-03-15 |
Current lead with a configuration to reduce heat load transfer in an alternating electrical current environment
Grant 8,933,335 - Citver , et al. January 13, 2 | 2015-01-13 |
Method of cooling textured workpieces with an electrostatic chuck
Grant 8,672,311 - Stone , et al. March 18, 2 | 2014-03-18 |
Techniques for improving extracted ion beam quality using high-transparency electrodes
Grant 8,466,431 - Buff , et al. June 18, 2 | 2013-06-18 |
Interfacing two insulation parts in high voltage environment
Grant 8,455,760 - Low , et al. June 4, 2 | 2013-06-04 |
Current Lead with a Configuration to Reduce Heat Load Transfer in an Alternating Electrical Current Environment
App 20130092413 - CITVER; Gregory ; et al. | 2013-04-18 |
Insulator system for a terminal structure of an ion implantation system
Grant 8,143,604 - Low , et al. March 27, 2 | 2012-03-27 |
Method Of Cooling Textured Workpieces With An Electrostatic Chuck
App 20110291344 - Stone; Dale K. ; et al. | 2011-12-01 |
Method and apparatus for controlling beam current uniformity in an ion implanter
Grant 8,003,956 - Lischer , et al. August 23, 2 | 2011-08-23 |
Interfacing Two Insulation Parts In High Voltage Environment
App 20110094798 - Low; Russell J. ; et al. | 2011-04-28 |
Interfacing two insulation parts in high voltage environment
Grant 7,863,520 - Low , et al. January 4, 2 | 2011-01-04 |
Method And Apparatus For Controlling Beam Current Uniformity In An Ion Implanter
App 20100084582 - LISCHER; D. Jeffrey ; et al. | 2010-04-08 |
Embossed Electrostatic Chuck
App 20090122458 - Lischer; D. Jeffrey ; et al. | 2009-05-14 |
Techniques for low-temperature ion implantation
Grant 7,528,392 - England , et al. May 5, 2 | 2009-05-05 |
Interfacing Two Insulation Parts In High Voltage Environment
App 20090047801 - Low; Russell J. ; et al. | 2009-02-19 |
Techniques For Low-temperature Ion Implantation
App 20080124903 - ENGLAND; Jonathan Gerald ; et al. | 2008-05-29 |
Insulator system for a terminal structure of an ion implantation system
App 20070235663 - Low; Russell ; et al. | 2007-10-11 |
Contaminant deposition control baffle for a capacitive pressure transducer
Grant 6,993,973 - Lischer , et al. February 7, 2 | 2006-02-07 |
Contaminant Deposition Control Baffle For A Capacitive Pressure Transducer
App 20040226382 - Lischer, D. Jeffrey ; et al. | 2004-11-18 |
Capacitive pressure transducer with improved electrode support
Grant 6,105,436 - Lischer , et al. August 22, 2 | 2000-08-22 |
System for delivering a substantially constant vapor flow to a chemical process reactor
Grant 5,966,499 - Hinkle , et al. October 12, 1 | 1999-10-12 |
Pressure-based mass flow controller
Grant 5,868,159 - Loan , et al. February 9, 1 | 1999-02-09 |
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