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Split Double Sided Wafer And Reticle Clamps
App 20220236649 - LIPSON; Matthew ; et al. | 2022-07-28 |
Lithographic Apparatus, Substrate Table, And Method
App 20220082953 - LIPSON; Matthew ; et al. | 2022-03-17 |
A Method To Manufacture Nano Ridges In Hard Ceramic Coatings
App 20210405539 - AKBAS; Mehmet Ali ; et al. | 2021-12-30 |
Lithography Supports With Defined Burltop Topography
App 20210173312 - LIPSON; Matthew ; et al. | 2021-06-10 |
Substrates and methods of using those substrates
Grant 11,016,401 - Lipson , et al. May 25, 2 | 2021-05-25 |
Mask assembly
Grant 11,009,803 - Kruizinga , et al. May 18, 2 | 2021-05-18 |
Lithographic apparatus and method
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Substrates And Methods Of Using Those Substrates
App 20200073262 - LIPSON; Matthew ; et al. | 2020-03-05 |
Mask Assembly
App 20200057394 - KRUIZINGA; Matthias ; et al. | 2020-02-20 |
Mask assembly
Grant 10,558,129 - Kruizinga , et al. Feb | 2020-02-11 |
Electrostatic clamp and a method for manufacturing the same
Grant 10,310,391 - Lipson , et al. | 2019-06-04 |
Electrostatic clamp and a method for manufacturing the same
Grant 10274842 - | 2019-04-30 |
Lithographic Apparatus And Device Manufacturing Method
App 20190086819 - LOOPSTRA; Erik Roelof ; et al. | 2019-03-21 |
Lithographic apparatus and device manufacturing method
Grant 10,146,142 - Loopstra , et al. De | 2018-12-04 |
Mask Assembly
App 20180329314 - KRUIZINGA; Matthias ; et al. | 2018-11-15 |
Lithographic Apparatus And Method
App 20180267414 - DELPUERTO; Santiago E. ; et al. | 2018-09-20 |
Lithographic apparatus and method
Grant 10,001,713 - Del Puerto , et al. June 19, 2 | 2018-06-19 |
An Electrostatic Clamp and a Method for Manufacturing the Same
App 20170242345 - LIPSON; Matthew ; et al. | 2017-08-24 |
Lithographic Apparatus And Device Manufacturing Method
App 20170160650 - LOOPSTRA; Erik Roelof ; et al. | 2017-06-08 |
Lithographic apparatus and device manufacturing method
Grant 9,606,448 - Loopstra , et al. March 28, 2 | 2017-03-28 |
Lithographic apparatus and device manufacturing method
Grant 9,442,388 - Loopstra , et al. September 13, 2 | 2016-09-13 |
Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp
Grant 9,348,236 - Helmus , et al. May 24, 2 | 2016-05-24 |
Lithographic apparatus, fluid combining unit and device manufacturing method
Grant 9,330,912 - Mulkens , et al. May 3, 2 | 2016-05-03 |
Lithographic Apparatus and Method
App 20150370180 - DEL PUERTO; Santiago E. ; et al. | 2015-12-24 |
Side seal for wet lens elements
Grant 9,195,148 - Lipson , et al. November 24, 2 | 2015-11-24 |
Lithographic Apparatus And Device Manufacturing Method
App 20140347642 - LOOPSTRA; Erik Roelof ; et al. | 2014-11-27 |
Lithographic apparatus and device manufacturing method involving fluid mixing and control of the physical property of a fluid
Grant 8,755,027 - Lipson , et al. June 17, 2 | 2014-06-17 |
Lithographic Apparatus And Device Manufacturing Method
App 20140071420 - Loopstra; Erik Roelof ; et al. | 2014-03-13 |
Two-photon or higher-order absorbing optical materials for generation of reactive species
Grant 8,597,549 - Cumpston , et al. December 3, 2 | 2013-12-03 |
Electrostatic Clamp, Lithographic Apparatus And Method Of Manufacturing An Electrostatic Clamp
App 20130308116 - Helmus; Peter Richard ; et al. | 2013-11-21 |
Lithographic apparatus and device manufacturing method
Grant 8,208,123 - Loopstra , et al. June 26, 2 | 2012-06-26 |
Bonding silicon silicon carbide to glass ceramics
Grant 8,168,017 - Lipson , et al. May 1, 2 | 2012-05-01 |
Lithographic Apparatus, Fluid Combining Unit And Device Manufacturing Method
App 20120013866 - MULKENS; Johannes Catharinus Hubertus ; et al. | 2012-01-19 |
Lithographic Apparatus And Device Manufacturing Method
App 20110317138 - LIPSON; Matthew ; et al. | 2011-12-29 |
Lithographic apparatus with a fluid combining unit and related device manufacturing method
Grant 8,045,135 - Mulkens , et al. October 25, 2 | 2011-10-25 |
Lithographic apparatus and device manufacturing method
Grant 8,027,026 - Lipson , et al. September 27, 2 | 2011-09-27 |
Lithographic Apparatus And Device Manufacturing Method
App 20110134402 - LIPSON; Matthew ; et al. | 2011-06-09 |
Lithographic apparatus and device manufacturing method
Grant 7,894,040 - Lipson , et al. February 22, 2 | 2011-02-22 |
Side Seal for Wet Lens Elements
App 20100271605 - Lipson; Matthew ; et al. | 2010-10-28 |
Side seal for wet lens elements
Grant 7,781,029 - Lipson , et al. August 24, 2 | 2010-08-24 |
Bonding Silicon Silicon Carbide to Glass Ceramics
App 20100128242 - Lipson; Matthew ; et al. | 2010-05-27 |
Bonding silicon silicon carbide to glass ceramics
Grant 7,678,458 - Lipson , et al. March 16, 2 | 2010-03-16 |
Two-photon Or Higher-order Absorbing Optical Materials For Generation Of Reactive Species
App 20080283804 - Cumpston; Brian ; et al. | 2008-11-20 |
Lithographic apparatus and device manufacturing method utilizing placement of a patterning device at a pupil plane
Grant 7,423,732 - Lipson , et al. September 9, 2 | 2008-09-09 |
Bonding Silicon Silicon Carbide to Glass Ceramics
App 20080174054 - Lipson; Matthew ; et al. | 2008-07-24 |
Lithographic apparatus and device manufacturing method
App 20080117392 - Mulkens; Johannes Catharinus Hubertus ; et al. | 2008-05-22 |
Method to modify the spatial response of a pattern generator
Grant 7,335,398 - Lipson , et al. February 26, 2 | 2008-02-26 |
Method of covering clear aperture of optic during deposition of glue protection layer
App 20080038456 - Lipson; Matthew | 2008-02-14 |
Apparatus to Modify the Spatial Response of a Pattern Generator
App 20080017106 - LIPSON; Matthew ; et al. | 2008-01-24 |
Two-photon or higher-order absorbing optical materials for generation of reactive species
Grant 7,235,194 - Cumpston , et al. June 26, 2 | 2007-06-26 |
System and method to block unwanted light reflecting from a pattern generating portion from reaching an object
Grant 7,180,573 - Lipson , et al. February 20, 2 | 2007-02-20 |
Optical data storage system and method
Grant 7,129,006 - Hesselink , et al. October 31, 2 | 2006-10-31 |
Side seal for wet lens elements
App 20060240365 - Lipson; Matthew ; et al. | 2006-10-26 |
Method for protection of adhesives used to secure optics from ultra-violet light
Grant 7,081,278 - Lipson , et al. July 25, 2 | 2006-07-25 |
Lithographic apparatus and device manufacturing method utilizing placement of a patterning device at a pupil plane
App 20060092396 - Lipson; Matthew ; et al. | 2006-05-04 |
System and method to block unwanted light reflecting from a pattern generating portion from reaching an object
App 20060082745 - Lipson; Matthew ; et al. | 2006-04-20 |
Lithographic apparatus and device manufacturing method
App 20060072088 - Lipson; Matthew ; et al. | 2006-04-06 |
System and method to modify the spatial response of a pattern generator
App 20060019030 - Lipson; Matthew ; et al. | 2006-01-26 |
Method of covering clear aperture of optic during deposition of glue protection layer
App 20050153064 - Lipson, Matthew | 2005-07-14 |
Lithographic apparatus and device manufacturing method
App 20050094119 - Loopstra, Erik Roelof ; et al. | 2005-05-05 |
Two-photon or higher-order absorbing optical materials for generation of reactive species
App 20040110984 - Cumpston, Brian ; et al. | 2004-06-10 |
Method for protection of adhesives used to secure optics from ultra-violet light
App 20040058061 - Lipson, Matthew ; et al. | 2004-03-25 |
Optical data storage system and method
App 20040009406 - Hesselink, Lambertus ; et al. | 2004-01-15 |
Two-photon or higher-order absorbing optical materials for generation of reactive species
Grant 6,608,228 - Cumpston , et al. August 19, 2 | 2003-08-19 |
Optical data storage system with multiple layer media
Grant 6,574,174 - Amble , et al. June 3, 2 | 2003-06-03 |
Optical storage media and method for optical data storage via local changes in reflectivity of a format grating
Grant 6,512,606 - Lipson , et al. January 28, 2 | 2003-01-28 |
Optical Storage Media And Method For Optical Data Storage Via Local Changes In Reflectivity Of A Format Grating
App 20010030934 - LIPSON, MATTHEW ; et al. | 2001-10-18 |
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